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Terahertz sensing with a 3D meta-absorbing chip based on two-photon polymerization printing

Photonics Research 2024年第5期12卷 895-903页

作者： XUEER CHEN LONGFANG YE daquan yu School of Electronic Science and Engineering Xiamen UniversityXiamen 361005China Institute of Electromagnetics and Acoustics Xiamen UniversityXiamen 361005China Xiamen Sky Semiconductor Technology Co. Ltd.Xiamen 361026China

The narrowband meta-absorbers exhibit significantly enhanced electromagnetic confinement capabilities, showcasing broad application prospects in sensing fields. They can be applied for biomarker detection, chemical composition analysis, and monitoring of specific gas in the environment. In this work, we propose a 3D meta-absorber with an out-of-plane plasma mechanism based on a two-photon printing system. Compared to the conventional fabrication of a metal-insulator-metal 2D meta-absorber, the 3D absorber is composed of a metal layer and a resin layer from top to bottom;its manufacturing process is simpler, only including two-photon printing and magnetron sputtering deposition. A noticeable absorbing resonance appears at 0.3142 THz with perfect absorbance with a high Q-factor of 104.67. The theoretical sensitivity to the refractive index of the sensor reaches up to172.5 GHz/RIU, with a figure of merit (FOM) of 19.56. In the experiments, it was validated as a meta-absorber with high sensitivity for doxycycline (DCH). As the DCH concentration increases from 0 to 4 mg/mL, the absorption intensity decreases around 49%, while the resonant frequency shift is around 70 GHz. It reflects the real-time residual content of DCH, and is potentially applied in trace antibiotic detection. The results showcase a perfect narrowband absorption capability with strong electromagnetic confinement in the terahertz spectrum, along with high-Q sensing characteristics of DCH. Compared to 2D metamaterials, the diversity of3D metamaterial significantly expands, and introduces additional effects to provide greater flexibility in manipulating electromagnetic waves. The 3D device offers opportunities for the application of terahertz biochemical sensing.

关键词： absorber printing absorbing

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面向Chiplet集成的三维互连硅桥技术

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电子与封装 2024年第6期24卷 7-17+6页

作者：赵瑾于大全秦飞北京工业大学数学统计学与力学学院厦门大学电子科学与技术学院厦门云天半导体科技有限公司

摩尔定律的发展速度放缓和集成电路产品应用的多元化趋势，共同推动了先进封装技术的快速发展。先进互连技术是先进封装的核心，在高速、高频传输、功耗、超细节距互连以及系统集成能力等方面均展现出显著优势。硅桥技术作为Chiplet以... 详细信息

摩尔定律的发展速度放缓和集成电路产品应用的多元化趋势，共同推动了先进封装技术的快速发展。先进互连技术是先进封装的核心，在高速、高频传输、功耗、超细节距互连以及系统集成能力等方面均展现出显著优势。硅桥技术作为Chiplet以及异构集成封装的重要解决方案，可以以较低的成本实现多芯片间的局部高密度互连，在处理器、存储器、射频器件中被广泛应用。介绍了业界主流的硅桥技术，并对硅桥技术的结构特点和关键技术进行了分析和总结。深入讨论了硅桥技术的发展趋势及挑战，为相关领域的进一步发展提供参考。

关键词：先进互连技术 Chiplet 硅桥技术高密度互连

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集成电路互连微纳米尺度硅通孔技术进展

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电子与封装 2024年第6期24卷 109-118页

作者：黎科张鑫硕夏启飞钟毅于大全厦门大学电子科学与技术学院福建厦门361005 厦门大学化学化工学院福建厦门361005 厦门云天半导体科技有限公司福建厦门361013

集成电路互连微纳米尺度硅通孔(TSV)技术已成为推动芯片在“后摩尔时代”持续向高算力发展的关键。通过引入微纳米尺度高深宽比TSV结构,2.5D/3D集成技术得以实现更高密度、更高性能的三维互连。同时,采用纳米TSV技术实现集成电路背面供... 详细信息

集成电路互连微纳米尺度硅通孔(TSV)技术已成为推动芯片在“后摩尔时代”持续向高算力发展的关键。通过引入微纳米尺度高深宽比TSV结构,2.5D/3D集成技术得以实现更高密度、更高性能的三维互连。同时,采用纳米TSV技术实现集成电路背面供电,可有效解决当前信号网络与供电网络之间布线资源冲突的瓶颈问题,提高供电效率和整体性能。随着材料工艺和设备技术的不断创新,微纳米尺度TSV技术在一些领域取得了显著进展,为未来高性能、低功耗集成电路的发展提供了重要支持。综述了目前业界主流的微纳米尺度TSV技术,并对其结构特点和关键技术进行了分析和总结,同时探讨了TSV技术的发展趋势及挑战。

关键词：先进互连技术 2.5D/3D芯粒集成背面供电高深宽比TSV

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面向大算力应用的芯粒集成技术

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电子与封装 2024年第6期24卷 42-47页

作者：王成迁汤文学戴飞虎丁荣峥于大全中国电子科技集团公司第五十八研究所江苏无锡214035 厦门大学电子科学与技术学院福建厦门361005

随着先进制程接近物理极限,摩尔定律已无法满足人工智能大算力需求。芯粒技术被公认为延续摩尔定律,提升芯片算力的最有效途径。针对芯粒技术研究热点,从集成芯片的应用与发展、典型芯粒封装技术、芯粒技术的挑战和机遇方面进行了系统... 详细信息

随着先进制程接近物理极限,摩尔定律已无法满足人工智能大算力需求。芯粒技术被公认为延续摩尔定律,提升芯片算力的最有效途径。针对芯粒技术研究热点,从集成芯片的应用与发展、典型芯粒封装技术、芯粒技术的挑战和机遇方面进行了系统性的梳理。详细列举了当前芯粒技术的应用成果,分析了2.5D、3D堆栈以及3D FO封装技术特点。

关键词：大算力芯粒芯粒封装摩尔定律

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玻璃通孔三维互连技术中的应力问题

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机械工程学报 2022年第2期58卷 246-258页

作者：赵瑾李威钟毅于大全秦飞北京工业大学电子封装技术与可靠性研究所北京100124 厦门大学微电子与集成电路系厦门361005

玻璃通孔(Through glass via,TGV)三维互连技术由于具有优异的电学、光学特性,良好的力学稳定性和低成本等优势,在三维封装、集成无源器件和光电器件集成方面具有广泛应用前景。然而,玻璃通孔三维互连结构复杂,由多种材料间热膨胀系数... 详细信息

玻璃通孔(Through glass via,TGV)三维互连技术由于具有优异的电学、光学特性,良好的力学稳定性和低成本等优势,在三维封装、集成无源器件和光电器件集成方面具有广泛应用前景。然而,玻璃通孔三维互连结构复杂,由多种材料间热膨胀系数不匹配引起的热应力将影响器件和封装的性能和可靠性,针对玻璃通孔三维互连技术的应力和可靠性问题,很多学者开展了相关研究。首先总结了TGV三维互连结构中的应力问题,包括TGV铜填充热应力理论模型、TGV孔完全填充或不完全填充铜在应力、局部应力集中引发的热机械可靠性问题。其次,针对TGV互连结构应力问题,总结了应力解析和有限元仿真分析进展,明确孔内填充聚合物可缓解残余应力及热应力,具有较高的抗热应力可靠性。最后,指出TGV互连应力和可靠性还存在亟待解决的问题。

关键词：玻璃通孔(TGV) 可靠性应力裂纹

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Linear-Quadratic Pareto Cooperative Game for Mean-Field Backward Stochastic System

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Journal of Systems Science & Complexity 2024年第3期37卷 947-964页

作者： WANG yu School of Control Science and Engineering Shandong UniversityJinan 250061China

This paper focuses on a Pareto cooperative differential game with a linear mean-field backward stochastic system and a quadratic form cost functional. Based on a weighted sum optimality method, the Pareto game is equivalently converted to an optimal control problem. In the first place,the feedback form of Pareto optimal strategy is derived by virtue of decoupling technology, which is represented by four Riccati equations, a mean-field forward stochastic differential equation(MF-FSDE),and a mean-field backward stochastic differential equation(MF-BSDE). In addition, the corresponding Pareto optimal solution is further obtained. Finally, the author solves a problem in mathematical finance to illustrate the application of the theoretical results.

关键词： Backward stochastic differential equation linear-quadratic control mean-field Pareto optimality

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Topological Stability and Entropy for Certain Set-valued Maps

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Acta Mathematica Sinica,English Series 2024年第4期40卷 962-984页

作者： yu ZHANG yu Jun ZHU School of Mathematical Sciences Xiamen UniversityXiamen 361005P.R.China

In this paper,the dynamics(including shadowing property,expansiveness,topological stability and entropy)of several types of upper semi-continuous set-valued maps are mainly considered from differentiable dynamical systems points of *** is shown that(1)if f is a hyperbolic endomorphism then for eachε>0 there exists a C^(1)-neighborhood U of f such that the induced set-valued map F_(f,U)has theε-shadowing property,and moreover,if f is an expanding endomorphism then there exists a C^(1)-neighborhood U of f such that the induced set-valued map F_(f,U)has the Lipschitz shadowing property;(2)when a set-valued map F is generated by finite expanding endomorphisms,it has the shadowing property,and moreover,if the collection of the generators has no coincidence point then F is expansive and hence is topologically stable;(3)if f is an expanding endomorphism then for eachε>0 there exists a C^(1)-neighborhood U of f such that h(F_(f,U,ε))=h(f);(4)when F is generated by finite expanding endomorphisms with no coincidence point,the entropy formula of F is ***,the dynamics of the set-valued maps based on discontinuous maps on the interval are also considered.

关键词： Set-valued map orbit space hyperbolic endomorphism perturbation shadowing expansiveness topological stability entropy

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A new liquid membrane diffusion model for characterizing the adsorption kinetics of europium by using a continuous measurement of adsorption platform

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Nuclear Science and Techniques 2024年第1期35卷 59-72页

作者： Hao-Qi yu Tao yu Jian-Hua Ye State Key Laboratory of Nuclear Resources and Environment East China University of TechnologyNanchang 330013China CGN Cangnan Nuclear Power Co. Ltd.Cangnan 325800China Jiangxi Province Key Laboratory of Polymer Micro/Nano Manufacturing and Devices East China University of TechnologyNanchang 330013China School of Nuclear Science and Engineering East China University of TechnologyNanchang 330013China

To explore the kinetic adsorption under continuous and nonequilibrium states, an integration of continuous measurement and adsorption platform kinetics method was proposed, which was initially called the ICM-AP kinetics method, and a corresponding kinetic adsorption experimental method was developed. Adsorption experiments of europium(Eu) on Ca-bentonite,Na-bentonite, and the D231 cation exchange resin were performed using the ICM-AP kinetics method and continuous measurements. Because the kinetic experimental results observed in this study were different from those of traditional batch adsorption data, pseudo-first-order or pseudo-second-order kinetic models were unsuitable for fitting the experimental ***, a liquid membrane diffusion(LMD) model was developed based on the assumption of simultaneous adsorption/desorption to discuss the mechanism of kinetic adsorption. The kinetic adsorption mechanism was also studied by using *** results indicated that the proposed adsorption model can fit the experimental data more suitably, and the adsorption/desorption behaviors of Eu on bentonite and the D231 resin were simultaneously observed, suggesting that the adsorption kinetics of Eu(Ⅲ) was mainly dominated by hydrated Eu(Ⅲ) ions on the liquid membrane.

关键词： ICM-AP method LMD model Adsorption mechanism Eu(Ⅲ)

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Device design principles and bioelectronic applications for flexible organic electrochemical transistors

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International Journal of Extreme Manufacturing 2024年第1期6卷 126-153页

作者： Lin Gao Mengge Wu Xinge yu Junsheng yu State Key Laboratory of Electronic Thin Films and Integrated Devices School of Optoelectronic Science and EngineeringUniversity of Electronic Science and Technology of China(UESTC)Chengdu 610054People’s Republic of China Department of Biomedical Engineering City University of Hong KongHong Kong Special Administrative Region of ChinaPeople’s Republic of China

Organic electrochemical transistors(OECTs) exhibit significant potential for applications in healthcare and human-machine interfaces, due to their tunable synthesis, facile deposition, and excellent biocompatibility. Expanding OECTs to the fexible devices will significantly facilitate stable contact with the skin and enable more possible bioelectronic applications. In this work,we summarize the device physics of fexible OECTs, aiming to offer a foundational understanding and guidelines for material selection and device architecture. Particular attention is paid to the advanced manufacturing approaches, including photolithography and printing techniques, which establish a robust foundation for the commercialization and large-scale fabrication. And abundantly demonstrated examples ranging from biosensors, artificial synapses/neurons, to bioinspired nervous systems are summarized to highlight the considerable prospects of smart healthcare. In the end, the challenges and opportunities are proposed for fexible OECTs. The purpose of this review is not only to elaborate on the basic design principles of fexible OECTs, but also to act as a roadmap for further exploration of wearable OECTs in advanced bio-applications.

关键词： flexible organic electrochemical transistors wearable bioelectronics manufacturing approaches device physics neuromorphic applications

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A guidance and control design with reduced information for a dual-spin stabilized projectile

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Defence Technology（防务技术） 2024年第3期33卷 494-505页

作者： yu Wang Jiyan yu Xiaoming Wang Jia Fangxiu Intelligent Ammunition Technology National Defense Key Discipline Laboratory Nanjing University of Science and TechnologyNanjingJiangsu210094China

In this paper,an integrated guidance and control method based on an adaptive path-following controller is proposed to control a spin-stabilized projectile with only translational motion information under the constraint of an actuator,uncertainties in aerodynamic parameters and measurements,and control system *** to the fairly high rotation speed,the dynamic model of this missile is strongly nonlinear,uncertain and coupled in pitch,yaw and roll channels.A theoretical equivalent resultant force and uncertainty compensation method are comprehensively used to realize decoupling of pitch and *** response to the strong nonlinear and time-varying characteristics of the dynamic system,the quasi-linear model whose parameters are obtained by interpolation of points selected as the segmentation points in the trajectory envelope,is used for calculation in each *** cope with the system uncertainty caused by model approximation,parameter uncertainty and ballistic interference,an extended state estimator is used to compensate the output feedback according to the test ballistic *** order to improve the tracking efficiency and ensure the tracking error convergence with only translational motion information,the virtual guide point,whose derivative is deduced according to the Lyapunov principle,is calculated in real time according to the projection relationship between the real-time position and the reference trajectory,and a virtual line-of-sight angle and the backstepping method are used for the design of the guidance and control *** order to avoid the influence of control input saturation on the guidance and control performance due to the actuator limitation and improve the robustness of the system,an anti-saturation compensator is designed according to the two-step *** feasibility and effectiveness of the path-following controller is verified through closed-loop flight simulations with measurement,control,and condition *** result

关键词： Spin-stabilized projectile Reduced information Path-following control Extended state observer Coupled nonlinear system Input saturation

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