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Practical System for Long-Range Nano-Positioning and Nano-Measurement

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Practical System for Long-Range Nano-Positioning and Nano-Me...

第二届仪器科学与技术国际学术研讨会

作者： Zhao Meirong Qi Yongyue Lin Mingchun Lin Yuchi state key laboratory of precision measuring technology and instruments Tianjin University

＜正＞ The stage is driven by piezoelectric motor. The displacement of the stage is measured by interferometer and at the same time a feedback signal is offered by the interferometer to control the movement of the motor. Then a closed-loop positioning and measuring system is established. by comparing with the capacitive micrometer, the whole system has a resolution of 0.8nm and a measuring accuracy of less than 10nm within the range of 10mm. This system can be applied for the ultra-precision measurement of samples beneath a scanning probe microscope, as well as in a variety of precision positioning techniques. The design concepts, structure of nano-guide, linear driving motor, laser interferometric measuring system, signal processing and controlling system etc. are described in detail.

关键词： nanometrology laser interferometer piezoelectric motor closed-loop control guide

Study on Laser Visual Measurement Method for Seamless Steel Pipe Straightness Error by Multiple Line- structured Laser Sensors

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Chinese Journal of Lasers 2001年第2期 10-13页

作者： SUN Changku LIU Yue LU Rongsheng YE Shenghua (state key laboratory of precision measuring technology and instruments, Tianjin University, Tianjin 300072, China)

An original non contact measurement method using multiple line structured laser sensors is introduced for seamless steel pipe straightness error is in this paper. An arc appears on the surface of the measured seamless steel pipe against a line structured laser source. After the image of the arc is accepted by a CCD camera, the coordinates of the center of the pipe cross section circle containing the arc can be worked out through a certain algorithm. Similarly, multiple line structured laser sensors are equipped parallel to the pipe. The straightness error of the seamless steel pipe, therefore, can be inferred from the coordinates of multiple cross section centers obtained from every line structured laser sensor.

关键词： seamless steel pipe straightness error line structured laser sensor

Noninvasive Measurement of blood Glucose by Dynamic Pulse Impedance Spectroscopy

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Noninvasive Measurement of Blood Glucose by Dynamic Pulse Im...

第三届国际仪器科学技术学术研讨会

作者： LI Gang LU Zong-wu LIN Ling state key laboratory of precision measuring technology and instruments Tianjin University Tianjin 300072 China

Noninvasive blood glucose measurement by impedance will certainly be well developed because of its easy use, low cost, high sensitivity and very short measuring time. However, it is difficult to impro

关键词： Pulse Wave Impedance Spectroscopy blood Glucose Noninvasive Measurement

用大像元CMOS线阵光电探测器和插值法测量激光光斑中心位置

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中国激光 2002年第1期29卷 69-72页

作者：孟贤男曾理江清华大学精密仪器与机械学系精密测试技术与仪器国家重点实验室北京100084

探讨了用大像元 (0 .8mm)CMOS线阵光电探测器确定激光光斑中心位置的插值方法 ,并对插值误差进行了理论分析和实验验证。采用线性插值可使测量分辨率提高 10倍以上。通过实测两种激光准直中光斑中心位置的漂移 ,验证了该探测器及插值方... 详细信息

探讨了用大像元 (0 .8mm)CMOS线阵光电探测器确定激光光斑中心位置的插值方法 ,并对插值误差进行了理论分析和实验验证。采用线性插值可使测量分辨率提高 10倍以上。通过实测两种激光准直中光斑中心位置的漂移 ,验证了该探测器及插值方法的实用性。

关键词：激光准直技术大像元 CMOS线阵光电探测器插值法光斑中心位置

维普期刊数据库

2-D measuring System with Nanometer Resolution and Long Range

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2-D Measuring System with Nanometer Resolution and Long Rang...

第三届国际仪器科学技术学术研讨会

作者： QI Yong-yue ZHAO Mei-rong LIN Yu-chi state key laboratory of precision measuring technology and instruments Tianjin University 300072 China

A new laser displacement measuring system with nanometric resolution has been developed. Optical system with 8 times optical path difference is designed. The following materials and methods are utiliz

关键词： nano-measurement laser interferometer coupled difference error compensation

Design of Probe for measuring High-reflective Sculptured Surface

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Design of Probe for Measuring High-reflective Sculptured Sur...

第二届仪器科学与技术国际学术研讨会

作者： Zhao Xiaosong, Zhang Hongwei, Liu Zheng, Zhang Guoxiong state key laboratory of precision measuring technology and instruments, Tianjin University, Tianjin, China

based on multi-camera vision measurement and polarization characteristic, the probe system with three cameras was developed. On the basis of geometry model, the impacts of structural parameters on vertical resolution ratio of the system were analyzed and the parameters were optimized, which offer the theoretical foundation for the on-line measurement of the sculptured high accuracy surface. In order to evaluate the full geometrical accuracy of the turbine blade data, an algorithm to compare this full geometry to the nominal CAD data geometry was developed. Combined with coordinate measuring machines, the system can be used to measure high-reflective metal surfaces, with high accuracy and efficiency.

关键词： triangulation method camera model vision measurement coordinate measuring machine high-reflective surface

A Novel Method of Multi-range Models by Near-Infrared Spectral Analysis for Components of Organic Materials

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A Novel Method of Multi-range Models by Near-Infrared Spectr...

第三届国际仪器科学技术学术研讨会

作者： ZHANG Xue-dian CHANG Min XU Ke-xin state key laboratory of precision measuring technology and instruments Tianjin University Tianjin 300072 China

Near-infrared (NIR) spectroscopy has gained wide spread acceptance in recent years as a powerful diagnostic tool, particularly for the concentrations of Components of Organic Materials. Frequently, a

关键词： Near-infrared (NIR) PLS non-linear model

MEMS Torsion-Mirror Actuators for Optical Switching or Attenuating Applications

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光学学报 2003年第S1期23卷 141-142页

作者： Wengang Wu, Dachao Li, Yong Yuan, Guizhen Yan, Yilong Hao, Shijiu Jin institute of Microelectronics, Peking University, beijing 100871, China, Tel: 86-10-62757163, Fax: 86-10-62751789,E-mail: wuwg@*** state key laboratory of precision measuring technology and instruments, Tianjin University, Tianjin 300072, China Institute of Microelectronics Peking University Beijing 100871 China state key laboratory of precision measuring technology and instruments Tianjin University Tianjin 300072 China

Novel MEMS torsion-mirror actuators with monolithically integrated fiber self-holding structures are fabricated, and investigated experimentally and theoretically. Their electromechanical and optical characteristics a... 详细信息

关键词： for in on PP MEMS Torsion-Mirror Actuators for Optical Switching or Attenuating Applications of Figure

维普期刊数据库

In-situ Auto-analysis System of Seawater Nutrients

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In-situ Auto-analysis System of Seawater Nutrients

第三届国际仪器科学技术学术研讨会

作者： WANG Yan WANG Zhi-li HAN Yong-hui state key laboratory of precision measuring technology & instruments Tianjin University Tianjin 300072 China

For prediction of red tide and knowledge of the nutrients’ concentrations and their change trend, based on the principle of absorbance, an auto analysis system of seawater nutrients is designed, which

关键词： PROFIbUS-DP bus MCGS seawater nutrients in-situ monitor