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Flexible nanoimprint lithography enables high-throughput manufacturing of bioinspired microstructures on warped substrates for efficient III-nitride optoelectronic devices

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Science Bulletin 2024年第13期69卷 2080-2088页

作者： Siyuan Cui Ke Sun zhefu liao Qianxi Zhou Leonard Jin Conglong Jin Jiahui Hu Kuo-Sheng Wen Sheng Liu Shengjun Zhou Center for Photonics and Semiconductors School of Power and Mechanical EngineeringWuhan UniversityWuhan 430072China The Institute of Technological Sciences Wuhan UniversityWuhan 430072China Department of Mechanical and Mechatronics Engineering University of WaterlooWaterloo ONN2L 3G1Canada Jiangxi SMTC Semiconductor Co. Ltd.Nanchang 330096China

III-nitride materials are of great importance in the development of modern optoelectronics,but they have been limited over years by low light utilization rate and high dislocation densities in heteroepitaxial films grown on foreign substrate with limited refractive index contrast and large lattice ***,we demonstrate a paradigm of high-throughput manufacturing bioinspired microstructures on warped substrates by flexible nanoimprint lithography for promoting the light extraction *** design a flexible nanoimprinting mold of copolymer and a two-step etching process that enable high-efficiency fabrication of nanoimprinted compound-eye-like Al2O3 microstructure(NCAM)and nanoimprinted compound-eye-like SiO_(2)microstructure(NCSM)template,achieving a 6.4-fold increase in throughput and 25%savings in economic costs over stepper projection *** to NCAM template,we find that the NCSM template can not only improve the light extraction capability,but also modulate the morphology of AlN nucleation layer and reduce the formation of misoriented GaN grains on the inclined sidewall of microstructures,which suppresses the dislocations generated during coalescence,resulting in 40%reduction in dislocation *** study provides a low-cost,high-quality,and high-throughput solution for manufacturing microstructures on warped surfaces of III-nitride optoelectronic devices.

关键词： Flexible nanoimprint lithography Bioinspired Micro-and nano-manufacturing III-nitride epitaxy Optoelectronic devices

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Solar energy full-spectrum perfect absorption and efficient photo-thermal generation

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Chinese Physics B 2021年第8期30卷 381-387页

作者： zhefu liao Zhengqi Liu Qizhao Wu Xiaoshan Liu Xuefeng Zhan Gaorong Zeng Guiqiang Liu College of Physics and Communication Electronics Jiangxi Normal UniversityNanchang 330022China

Designing and manufacturing cost-effective absorbers that can cover the full-spectrum of solar irradiation is still critically important for solar *** control of the lightwave reflection and transmission,metamaterials realize high absorption over a relatively wide ***,a truncated circular cone metasurface(TCCM)composed of alternating multiple layers of titanium(Ti)and silicon dioxide(SiO_(2))is *** by the synergetic of surface plasmon resonances and Fabry-Pérot resonances,the TCCM simultaneously achieves high absorptivity(exceed 90%),and absorption broadband covers almost the entire solar irradiation *** addition,the novel absorber exhibits great photo-thermal *** exploiting the ultrahigh melting point of Ti and SiO_(2),high-efficiency solar irradiation absorption and heat release have been achieved at 700℃when the solar concentration ratio is 500(i.e.,incident light intensity at 5×10^(5) W/m^(2)).It is worth noting that the photo-thermal efficiency is almost unchanged when the incident angle increases from 0°to 45°.The outstanding capacity for solar harvesting and light-to-heat reported in this paper suggests that TCCM has great potential in photothermal therapies,solar desalination,and radiative cooling,etc.

关键词： solar energy photo-thermal generation perfect absorption plasmonic

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