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Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation

Nanomanufacturing and Metrology 2023年第4期6卷 46-59页

作者： Hyunsung Lim yuki shimizu Division of Mechanical and Aerospace Engineering Hokkaido UniversitySapporoJapan

The feasible resolution of angular displacement measurement by an optical angle sensor based on laser autocollimation is investigated.Improving the sensor sensitivity while maintaining the noise level of the sensor signal as low as possible is necessary to achieve high-resolution angular displacement measurement.In this paper,the contribution of each component,such as a photodiode,a trans-impedance amplifer,and an analog-to-digital converter in the optical angle sensor,to the noise level of the sensor signal is frst estimated on the basis of theoretical equations.The feasible sensitivity of the optical angle sensor is also estimated in numerical calculations.The sensitivity of a photodiode element at the edge of its photosensitive area is evaluated in experiments to realize the estimation of the angle sensor sensitivity.Experimental results are applied to the numerical calculations.The infuences of the measurement laser beam diameter,the spot diameter of the focused laser beam on the photosensitive area,and the focal length of the collimator objective of the optical angle sensor are also consid-ered in the numerical calculations.Finally,a prototype optical setup is developed.Experiments are performed to demonstrate that a compact optical angle sensor based on laser autocollimation with a collimator objective having a focal length shorter than 100 mm can achieve a resolution beyond 0.001 arc-second with a bandwidth of 1 kHz.This resolution is better than those achieved by commercial autocollimators employing an image sensor or a position-sensitive detector.The industrial contribution of this paper lies in the detailed breakdown of noise components in the readout signal of an angle sensor in a practical condition and the systematic estimation of its feasible resolution as well as its sensitivity.

关键词： Angle measurement Resolution Laser autocollimation Photodiode Signal noise

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Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

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Nanomanufacturing and Metrology 2021年第1期4卷 3-27页

作者： yuki shimizu Department of Finemechanics Tohoku University6-6-01Aramaki Aza-AobaAoba-kuSendaiMiyagi 980-8579Japan

Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating,which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors.Especially,optical configurations such as Lloyd's mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner.For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder,an orthogonal two-axis Lloyd's mirror interferometer,which has been realized through innovation to Lloyd’s mirror interferometer,has been developed.In addition,the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer.Furthermore,the optical setup for the non-orthogonal two-axis Lloyd's mirror interferometer has been optimized for the fabrication of a large-area scale grating.In this review article,principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed,while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders.Verification of the pitch of the fabricated pattern structures,whose accuracy strongly affects the performance of planar/surface encoders,is also an important task to be addressed.In this paper,major methods for the evaluation of a grating pitch are also reviewed.

关键词： Planar scale grating Interference lithography Lloyd’s mirror interferometer Interference fringe

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High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide

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Chinese Journal of Mechanical Engineering 2018年第5期31卷 8-16页

作者： yuki shimizu Satoshi Kataoka Wei Gao Department of Finemechanics Tohoku University

This paper proposes a new method for measurement of the roll error motion of a slide table in a precision linear slide. The proposed method utilizes a pair of clinometers in the production process of a precision linear slide, where the roll error motion measurement will be carried out repeatedly to confirm whether the surface form errors of slide guideways in the linear slide are su ciently corrected by hand scraping process. In the proposed method, one of the clinometers is mounted on the slide table, while the other is placed on a vibration isolation table, on which the precision linear slide is mounted, so that influences of external disturbances can be cancelled. An experimental setup is built on a vibration isolation table, and some experiments are carried out to verify the feasibility of the proposed method.

关键词： Linear slide Clinometer Rotational error motion measurement

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Foreword to the Special Issue on Micro- and Nano-Metrology in Japan(I)

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Nanomanufacturing and Metrology 2021年第1期4卷 1-2页

作者： yuki shimizu Yasuhiro Mizutani Masaki Michihata Department of Finemechanics Tohoku UniversitySendai 9808579Japan Department of Mechanical Engineering Osaka UniversitySuita 5650871Japan Department of Precision Engineering The University of TokyoBunkyo 1138654Japan

Micro-and nano-metrology occupies an important position in modern production engineering where higher-precision machining is required.A visualization of the process is indispensable for the creation of new technologies in stateof-the-art manufacturing that deals with the geometrical quantity in micrometers/nanometers.Precision micro-and nano-metrology is thus becoming more and more important as the platform of various manufacturing technologies,as well as strategic tools for responding to rapidly changing fabrication techniques in many scientific and industrial fields.

关键词： metrology becoming Japan

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Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

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Nanomanufacturing and Metrology 2021年第1期4卷 53-66页

作者： Hiraku Matsukuma Keisuke Adachi Takuma Sugawara yuki shimizu Wei Gao Eiji Niwa Yoshihiro Sasaki Department of Finemechanics Graduate School of EngineeringTohoku UniversityMiyagiSendai 980-8579Japan Research Institute for Electromagnetic Materials 9-5-1 NaritaMiyagiTomiya 981-3341.Japan

This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr-N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning.Closed-loop control is also carried out.The motion errors in six degrees of freedom are also investigated for this micro-stage.It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of microstage.The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated.Although the rotational motion error is successfully suppressed in the second prototype,a rotational motion error of more than 0.1°remains due to remaining torque and assembly error of the elastic hinges.Then,in order to reduce the rotational motion error,the prototype is designed in which the location of elastic hinges is single-layered.By designing a mechanical structure in which torque is suppressed,all rotational motion errors are successfully reduced to less than 0.05°in the prototype with single-layer hinges.

关键词： XYZ micro-stage Cr-N thin-film displacement sensor Closed-loop positioning Impact drive Friction drive

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Design and Construction of a Low-Force Stylus Probe for On-machlne Tool Cutting Edge Measurement

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Nanomanufacturing and Metrology 2020年第4期3卷 282-291页

作者： Hiraku Matsukuma Bo Wen Shinichi Osawa Sho Sekine yuki shimizu Wei Gao Department of Finemechanics Graduate School of EngineeringTohoku UniversitySendaiJapan

A new on-machine profiler employing a cantilever beam was proposed and developed to measure the sharp micro-cutting edges of precision cutting tools with low measuring force of 0.1 mN.The proposed profiler consists of a probe unit and a positioning unit.The probe unit employs a stylus mounted on the free end of a hollow triangular cantilever beam and a laser displacement sensor to detect the detlection of the cantilever beam.The positioning unit consists of two single-axis DC servo motor stages for precise positioning of the probe unit.The cantilever is designed with the assistance of the finite element method.In order to demonstrate the feasibility of the proposed measurement system,experiments are conducted and the measurement result for a micro-cutting edge is compared with that by a commercial profiler.Furthermore,a method to com-pensate for the measurement error caused by the lateral displacement of the cantilever beam is proposed.The compensated measurement results show good agreement within±2μm with those obtained by the commercial profler.

关键词： On-machine measurement Surface profiler Micro-cutting edge Low-force measurement Cantilever beam

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A Case of Orbital Lipoma That Occurred in the Lateral Canthal Region of the Tessier no. 8 Craniofacial Cleft

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Modern Plastic Surgery 2014年第2期4卷 32-34页

作者： Nobuhiro Sato Tomoaki Kuroki Yasuyoshi Tosa yuki shimizu Taro Kusano Shinya Yoshimoto Division of Plastic and Reconstructive Surgery Showa University Hospital Tokyo Japan

We report a case of a 37-year-old Japanese female. She had a Tessier no. 8 craniofacial cleft and an orbital lipoma in the lateral canthal region. Excisional surgery and pathological examination revealed a genuine lipoma. No other case has been reported in the literature. Here, we present our case of a rare genuine lipoma located in lateral canthal region of the Tessier no. 8 cleft.

关键词： Lipoma Tessier no. 8 Craniofacial Cleft

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Current and future trends in whole genome sequencing in cancer

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Cancer Biology & Medicine 2024年第1期21卷 16-20页

作者： yuki Katsuya Department of Experimental Therapeutics National Cancer Center Hospital5-1-1 TsukijiChuo-kuTokyo 104-0045Japan

Cancer remains a formidable global health challenge affecting millions of lives annually.For decades,conventional cancer treatments used a one-size-fits-all approach,overlooking the intricate genetic variations that drive tumors.The emergence of cancer genomics has ushered in a new era of personalized and targeted cancer therapies.The Human Genome Project,which was launched in 1990 and completed in 2003。

关键词： cancer Cancer annually

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Self-calibration and Compensation of Setting Errors for Surface Profile Measurement of a Microstructured Roll Workpiece

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Chinese Journal of Mechanical Engineering 2014年第1期27卷 14-22页

作者： GAO Wei XU Bin TAKEISHI Toshiki shimizu yuki ITO So Department of Nanomechanics Tohoku University School of Manufacturing Science and Engineering Sichuan University

Microstructured roll workpieces have been widely used as functional components in the precision industries. Current researches on quality control have focused on surface profile measurement of microstructured roll workpieces, and types of measurement systems and measurement methods have been developed. However, low measurement efficiency and low measurement accuracy caused by setting errors are the common disadvantages for surface profile measurement of microstructured roll workpieces. In order to shorten the measurement time and enhance the measurement accuracy, a method for self-calibration and compensation of setting errors is proposed for surface profile measurement of microstructured roll workpieces. A measurement system is constructed for the measurement, in which a precision spindle is employed to rotate the roll workpiece and an air-bearing displacement sensor with a micro-stylus probe is employed to scan the microstructured surface of the roll workpiece. The resolution of the displacement sensor is 0.14 nm and that of the rotary encoder of the spindle was 0.15r~. Geometrical and mathematical models are established for analyzing the influences of the setting errors of the roll workpiece and the displacement sensor with respect to the axis of the spindle, including the eccentric error of the roll workpiece, the offset error of the sensor axis and the zero point error of the sensor output. Measurement experiments are carded out on a roll workpiece on which periodic microstructures are a period of 133 i^m along the circumferential direction. Experimental results demonstrate the feasibility of the self-compensation method. The proposed method can be used to detect and compensate the setting errors without using any additional accurate artifact.

关键词： measurement profile setting error self-calibration compensation microstructure roll workpiece

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Optimization of body configuration and joint-driven attitude stabilization for transformable spacecraft under solar radiation pressure

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Astrodynamics 2024年第1期8卷 47-60页

作者： yuki Kubo Toshihiro Chujo Institute of Space and Astronautical Science Japan Aerospace Exploration AgencyKanagawa252-5210Japan Department of Mechanical Engineering Tokyo Institute of TechnologyTokyo152-8550Japan

The solar sail is one of the most promising space exploration systems due to its theoretically infinite specific impulse achieved through solar radiation pressure(SRP).Recently,researchers have proposed“transformable spacecraft”capable of actively reconfiguring their body configurations using actuatable joints.Transformable spacecraft,if used similarly to solar sails,are expected to significantly enhance orbit and attitude control capabilities owing to their high redundancy in control degrees of freedom.However,controlling them becomes challenging due to their large number of inputs,leading previous researchers to impose strong constraints to limit their potential control capabilities.This study focuses on novel attitude control techniques for transformable spacecraft under SRP.We developed two methods,namely,joint angle optimization to obtain arbitrary SRP force and torque,and momentum damping control driven by joint angle actuation.Our proposed methods are formulated in a general manner and can be applied to any transformable spacecraft comprising front faces that can predominantly receive the SRP on each body.The validity of our proposed method is confirmed through numerical simulations.Our study contributes to making most of the high control redundancy of transformable spacecraft without the need for expendable propellants,thus significantly enhancing the orbit and attitude control capabilities.

关键词： solar sail transformable spacecraft attitude-joint coupled motion attitudestabilization

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