Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors
作者机构：Department of FinemechanicsGraduate School of EngineeringTohoku UniversityMiyagiSendai 980-8579Japan Research Institute for Electromagnetic Materials9-5-1 NaritaMiyagiTomiya 981-3341.Japan
出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)
年 卷 期：2021年第4卷第1期
页 面：53-66页
核心收录：
学科分类：07[理学] 0817[工学-化学工程与技术] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 070202[理学-粒子物理与原子核物理] 0811[工学-控制科学与工程] 0702[理学-物理学] 0801[工学-力学（可授工学、理学学位）]
基 金：supported by JSPS KAKENHI Grant Numbers JP 15H05759 and JP 20H00211。
主 题：XYZ micro-stage Cr-N thin-film displacement sensor Closed-loop positioning Impact drive Friction drive
摘 要：This paper presents a compact XYZ micro-stage driven by an impact driving mechanism.A moving body is translationally actuated along the X-,Y-,and Z-axes in millimeter-scale range and with nanometer-scale resolution.Cr-N thin-film strain sensors are integrated into the micro-stage for closed-loop positioning.Closed-loop control is also carried out.The motion errors in six degrees of freedom are also investigated for this micro-stage.It is clarified by analysis of finite element method that rotational motion errors around the driving axis are caused by torques due to tensions from the elastic hinges of microstage.The mechanical structure of XYZ micro-stage to cancel out the torque generated is proposed and the second prototype is fabricated.Although the rotational motion error is successfully suppressed in the second prototype,a rotational motion error of more than 0.1°remains due to remaining torque and assembly error of the elastic hinges.Then,in order to reduce the rotational motion error,the prototype is designed in which the location of elastic hinges is single-layered.By designing a mechanical structure in which torque is suppressed,all rotational motion errors are successfully reduced to less than 0.05°in the prototype with single-layer hinges.
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