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Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Opto-Electronic Science 2024年第3期3卷 33-46页

作者： Ruozhong Han Yuchan Zhang Qilin jiang Long Chen Kaiqiang Cao Shian Zhang Donghai Feng Zhenrong Sun tianqing jia State Key Laboratory of Precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 200241China Institute of Laser Manufacturing Henan Academy of SciencesZhengzhou 450046China Institute of Physics Chinese Acadamy of SciencesBeijing 100190China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China

Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few *** particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than the diffraction limit,making it a useful method for efficient ***,compared with the low-spatial-frequency LIPSS(LSFL),the structure size of the HSFL is smaller,and it is more easily ***,the formation mechanism of HSFL is complex and has always been a research hotspot in this *** this study,regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm,50 fs femtosecond *** ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging *** general,the evolution of the surface structure undergoes five sequential stages:the LSFL begins to split,becomes uniform HSFL,degenerates into an irregular LSFL,undergoes secondary splitting into a weakly uniform HSFL,and evolves into an irregular LSFL or is *** results indicate that the local enhancement of the submerged nanocavity,or the nanoplasma,in the prefabricated LSFL ridge led to the splitting of the LSFL,and the thermodynamic effect drove the homogenization of the splitting LSFL,which evolved into HSFL.

关键词： laser-induced periodic surface structures(LIPSS) local field enhancement collinear pump-probe imaging silicon high spatial frequency periodic structures

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Theoretical study on the lasing plasmon of a split ring for label-free detection of single molecules and single nanoparticles

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Chinese Physics B 2018年第5期27卷 504-512页

作者： Chunjie Zheng tianqing jia Hua Zhao Yingjie Xia Shian Zhang Zhenrong Sun State Key Laboratory of Precision Spectroscopy College of Physics and Materials East China Normal University Shanghai 200062 China

This paper reports the plasmonic lasing of a split ring filled with gain material in water. The lasing mode（1500 nm）is far from the pump mode（980 nm）, which can depress the detection noise from the pump light. The laser intensities of the two modes simultaneously increase by more than 10^3 in amplitude, which can intensify the absorption efficiency of the pumping light and enhance the plasmonic lasing. The plasmonic lasing is a sensitive sensor. When a single protein nanoparticle（n = 1.5, r = 1.25 nm） is trapped in the gap of the split ring, the lasing spectrum moves by 0.031 nm, which is much larger than the detection limit of 10^-5 nm. Moreover, the lasing intensity is also very sensitive to the trapped nanoparticle. It reduces to less than 1/600 when a protein nanoparticle（n = 1.5, r = 1.25 nm） is trapped in the gap.

关键词： label-free detection split-ring resonators plasmonic lasing single molecules and single nanoparticles

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Controlling multiphoton excited energy transfer from Tm^(3+) to Yb^(3+) ions by a phase-shaped femtosecond laser field

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Photonics Research 2019年第4期7卷 486-492页

作者： YE ZHENG LIANZHONG DENG jiaNPING LI tianqing jia jiaNRONG QIU ZHENRONG SUN SHIAN ZHANG State Key Laboratory of Precision Spectroscopy School of Physics and Materials Science East China Normal University State Key Laboratory of Silicon Materials Zhejiang University Collaborative Innovation Center of Extreme Optics Shanxi University

The ability to control the energy transfer in rare-earth ion-doped luminescent materials is very important for various related application areas such as color display, bio-labeling, and new light sources. Here, a phase-shaped femtosecond laser field is first proposed to control the transfer of multiphoton excited energy from Tm^(3+) to Yb^(3+) ions in co-doped glass ceramics. Tm^(3+) ions are first sensitized by femtosecond laser-induced multiphoton absorption, and then a highly efficient energy transfer occurs between the highly excited state Tm^(3+) sensitizers and the ground-state Yb^(3+) activators. The laser peak intensity and polarization dependences of the laser-induced luminescence intensities are shown to serve as proof of the multiphoton excited energy transfer *** efficiency of the multiphoton excited energy transfer can be efficiently enhanced or completely suppressed by optimizing the spectral phase of the femtosecond laser with a feedback control strategy based on a genetic algorithm. A(1+2) resonance-mediated three-photon excitation model is presented to explain the experimental observations. This study provides a new way to induce and control the energy transfer in rare-earth ion-doped luminescent materials, and should have a positive contribution to the development of related applications.

关键词： control the energy rare-earth ion-doped should have

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Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens

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Chinese Optics Letters 2020年第9期18卷 79-83页

作者： Kaiqiang Cao Long Chen Ke Cheng Zhenrong Sun tianqing jia State Key Laboratory of Precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 200241China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China

Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings(RUSNGs)on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors(including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.

关键词： subwavelength nanogratings two-beam interference surface plasmon polariton structural coloring

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Large area patterning of ultra-high thermal-stable structural colors in transparent solids

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Chinese Optics Letters 2022年第3期20卷 1-5页

作者： Jie Zhang Dezhi Tan Kaiqiang Cao tianqing jia jianrong Qiu State Key Laboratory of Modern Optical Instrumentation College of Optical Science and EngineeringZhejiang UniversityHangzhou 310027China Zhejiang Lab Hangzhou 311100China State Key Laboratory of Precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 2002A1China CAS Center for Excellence in Ultra-Intense Laser Science Chinese Academy of SciencesShanghai 201800China

Printing stable color with a lithography-free and environment-friendly technique is in high demand for *** report a facile strategy of ultrafast laser direct writing(ULDW)to produce large-scale embedded structural colors inside transparent *** diffraction effect of gratings enables effective generation of structural colors across the entire visible *** structural colors inside the fused silica glass have been demonstrated to exhibit excellent thermal stability under high temperature up to 1200℃, which promises that the written information can be stable for long time even with unlimited lifetime at room *** structural colors in the applications of coloring,anti-counterfeiting,and information storage are also *** studies indicate that the presented ULDW allows for fabricating large-scale and high thermal-stability structural colors with prospects of three-dimensional patterning,which will find various applications,especially under harsh conditions such as high temperature.

关键词： ultrafast laser direct writing structural color glass information storage

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Large-area straight,regular periodic surface structures produced on fused silica by the interference of two femtosecond laser beams through cylindrical lens

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Opto-Electronic Advances 2021年第12期4卷 34-42页

作者： Long Chen Kaiqiang Cao Yanli Li Jukun Liu Shian Zhang Donghai Feng Zhenrong Sun tianqing jia State Key Laboratory of Precision Spectroscopy School of Physics and Electronic ScienceEast China Normal UniversityShanghai 200062China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China.

Inhomogeneity and low efficiency are two important factors that limit the application of laser-induced periodic surface structures(LIPSSs),especially on glass *** this study,two-beam interference(TBI)of femtosecond lasers was used to produce large-area straight LIPSSs on fused silica using cylindrical *** with those produced us-ing a single circular or cylindrical lens,the LIPSSs produced by TBI are much straighter and more *** on the laser fluence and scanning velocity,LIPSSs with grating-like or spaced LIPSSs are produced on the fused silica *** structural colors are blue,green,and red,and only green and red,***-like LIPSS patterns oriented in different directions are obtained and exhibit bright and vivid colors,indicating potential applications in surface coloring and anti-counterfeiting logos.

关键词： laser-induced periodic surface structures two-beam interference structural coloring fused silica cylindrical lens

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飞秒激光脉冲序列烧蚀硅的孔型质量研究

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光子学报 2021年第6期50卷 108-117页

作者：陈天琦杨坚贾天卿华东师范大学精密光谱科学与技术国家重点实验室上海200241

为了改善高能流密度飞秒激光的烧蚀质量,使用法布里珀罗腔产生子脉冲间隔在1~3500 ps内连续可调的飞秒激光脉冲序列,系统探究了单个飞秒高斯脉冲与不同脉冲间隔的脉冲序列在硅上烧蚀的孔型质量。实验结果显示,子脉冲间隔在50~100 ps范... 详细信息

为了改善高能流密度飞秒激光的烧蚀质量,使用法布里珀罗腔产生子脉冲间隔在1~3500 ps内连续可调的飞秒激光脉冲序列,系统探究了单个飞秒高斯脉冲与不同脉冲间隔的脉冲序列在硅上烧蚀的孔型质量。实验结果显示,子脉冲间隔在50~100 ps范围内时,孔边缘的冠状重熔物大大减少,其厚度仅为单个飞秒高斯脉冲的40%,周围基底几乎没有粘连的粉尘或热损伤痕迹,孔型品质因子数值从单个飞秒脉冲的0.52提升至0.89。本文报道的飞秒激光脉冲序列,基于后续子脉冲与喷出物的二次烧蚀原理,子脉冲间隔在50~100 ps范围内时,后续子脉冲能够最大程度的雾化喷出物,从而减少冠状重熔物与高温粉尘污染损伤,烧蚀质量得到改善。

关键词：飞秒激光高能流密度脉冲序列法布里珀罗腔硅激光烧蚀加工质量重熔粉尘

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Extremely regular periodic surface structures in a large area efficiently induced on silicon by temporally shaped femtosecond laser

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Photonics Research 2021年第5期9卷 839-847页

作者： YUCHAN ZHANG QILIN jiaNG KAIQIANG CAO TIANQI CHEN KE CHENG SHIAN ZHANG DONGHAI FENG tianqing jia ZHENRONG SUN jiaNRONG QIU State Key Laboratory of Precision Spectroscopy School of Physics and Materials ScienceEast China Normal UniversityShanghai 200062China Collaborative Innovation Center of Extreme Optics Shanxi UniversityTaiyuan 030006China State Key Laboratory of Optical Instrumentation Zhejiang UniversityHangzhou 310027China

Femtosecond laser-induced periodic surface structures(LIPSS) have several applications in surface structuring and functionalization. Three major challenges exist in the fabrication of regular and uniform LIPSS: enhancing the periodic energy deposition, reducing the residual heat, and avoiding the deposited debris. Herein, we fabricate an extremely regular low-spatial-frequency LIPSS(LSFL) on a silicon surface by a temporally shaped femtosecond laser. Based on a 4 f configuration zero-dispersion pulse shaping system, a Fourier transform limit(FTL) pulse is shaped into a pulse train with varying intervals in the range of 0.25–16.2 ps using periodic π-phase step modulation. Under the irradiation of the shaped pulse with an interval of 16.2 ps, extremely regular LSFLs are efficiently fabricated on silicon. The scan velocity for fabricating regular LSFL is 2.3 times faster, while the LSFL depth is 2 times deeper, and the diffraction efficiency is 3 times higher than those of LSFL using the FTL *** formation mechanisms of regular LSFL have been studied experimentally and theoretically. The results show that the temporally shaped pulse enhances the excitation of surface plasmon polaritons and the periodic energy deposition while reducing the residual thermal effects and avoiding the deposition of the ejected debris, eventually resulting in regular and deeper LSFL on the silicon surface.

关键词： laser shaped periodic

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Valence state manipulation of Sm3＋ ions via a phase-shaped femtosecond laser field

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Photonics Research 2018年第2期6卷 144-148页

作者： YE ZHENG YUNHUA YAO LIANZHONG DENG WENJING CHENG jiaNPING LI tianqing jia jiaNRONG QIU ZHENRONG SUN SHIAN ZHANG State Key Laboratory of Precision Spectroscopy East China Normal University Shanghai 200062 China School of Electronic & Electrical Engineering Shangqiu Normal University Shangqiu 476000 China State Key Laboratory of Silicon Materials Zhejiang University Hangzhou 310027 China Collaborative Innovation Center of Extreme Optics Shanxi University Taiyuan 030006 China

The ability to manipulate the valence state conversion of rare-earth ions is crudal for their applications in color displays, optoelectronic devices, laser sources, and optical memory. The conventional femtosecond laser pulse has been shown to be a well-established tool for realizing the valence state conversion of rare-earth ions, although the valence state conversion efficiency is relatively low. Here, we first propose a femtosecond laser pulse shaping tech- nique for improving the valence state conversion effidency of rare-earth ions. Our experimental results demonstrate that the photoreduction emciency from Sm3＋ to Sm2＋ in Sm3＋-doped sodium aluminoborate glass using a zt phase step modulation can be comparable to that using a transform-limited femtosecond laser field, while the peak laser intensity is decreased by about 63%, which is very beneficial for improving the valence state conversion efficiency under the laser-induced damage threshold of the glass sample. Furthermore, we also theoretically develop a （2 ＋ 1） resonance-mediated three-photon absorption model to explain the modulation of the photoreduction efficiency from Sm3＋ to Sm2＋ under the π-shaped femtosecond laser field.

关键词： (320.5540) Pulse shaping (320.2250) Femtosecond phenomena (190.4400) Nonlinear optics, materials (160.4670)Optical materials.

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对基于时空干涉的空间整形的畸变与光强校正

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激光与光电子学进展 2021年第3期58卷 203-211页

作者：林御寒石惠贾天卿华东师范大学精密光谱科学与技术国家重点实验室上海200241

时空干涉的飞秒激光空间整形技术是一种新型图形化激光加工方法,相比传统技术更加简单灵活并有更高的效率。然而此技术中的缩束系统造成的成像畸变严重影响了加工的准确性。本文模拟并分析了该系统中的畸变现象,利用空间光调制器的相位... 详细信息

时空干涉的飞秒激光空间整形技术是一种新型图形化激光加工方法,相比传统技术更加简单灵活并有更高的效率。然而此技术中的缩束系统造成的成像畸变严重影响了加工的准确性。本文模拟并分析了该系统中的畸变现象,利用空间光调制器的相位全息图补偿畸变引起的空间光场的位置变化和光强分布不均。此方法可使曝光处干涉图案的最大偏移量由10.66μm趋近于0,在实验中将相对最大偏差由60.42%降至8%以下,并使该处二维光强分布趋近于平顶光。该算法降低了时空干涉的飞秒激光空间整形技术对于缩束成像系统的设计需求,节省了成本与时间。基于以上方法,在不锈钢表面拼接加工出了1.5 mm×1.5 mm的具备多级别防伪能力的二维码图案。

关键词：激光器飞秒激光整形时空干涉畸变校正平顶光整形微纳加工

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