Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens

作     者：Kaiqiang Cao Long Chen Ke Cheng Zhenrong Sun Tianqing Jia 曹凯强;陈龙;程可;孙真荣;贾天卿

作者机构：State Key Laboratory of Precision SpectroscopySchool of Physics and Electronic ScienceEast China Normal UniversityShanghai 200241China Collaborative Innovation Center of Extreme OpticsShanxi UniversityTaiyuan 030006China 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2020年第18卷第9期

页      面：79-83页

核心收录：

学科分类：080901[工学-物理电子学] 070207[理学-光学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：supported by the National Natural Science Foundation of China (Nos. 91950112,11474097,91950112) the Science and Technology Commission of Shanghai Municipality (No. 19ZR1414500) the Open Fund of the State Key Laboratory of High Field Laser Physics (Shanghai Institute of Optics and Fine Mechanics) 

主　　题：subwavelength nanogratings two-beam interference surface plasmon polariton structural coloring 

摘      要：Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings(RUSNGs)on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors(including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.