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Nano Research 2023年第5期16卷 7550-7558页

作者： Yongsong Luo Xiaoliang Chen Xiangming Li hongmiao tian Liang Wang Jinyou Shao Micro-and Nano-technology Research Center State Key Laboratory for Manufacturing Systems EngineeringXi’an Jiaotong UniversityXi’an 710049China Frontier Institute of Science and Technology(FIST) Xi’an Jiaotong UniversityXi’an 710049China

The integrated perception capable of detecting and monitoring varieties of activities is one of the ultimate purposes of wearable electronics and intelligent *** by the space occupation,it lacks practical feasibility to stack multiple types of single sensors on each ***,a high-sensitivity dual-function capacitive sensor with proximity sensing and pressure sensing is *** fringing electric field can be confined in the proximity-sensitive area by fibrous loop-patterned electrode,leading to more stolen charges when object approaching and thus a high proximity *** high-permittivity doped structured dielectric layer reduces the compressive stiffness and enhances the rate of compression-caused increase in the equivalent relative permittivity of the dielectric layer,resulting in a larger increase in capacitance and thus a high pressure *** electrodes and dielectric layer together compose the capacitor and act as the sensor without taking up additional *** decoupling of proximity-sensing and pressure-sensing modes can be achieved by decrease or increase in *** with array distribution and sequential scanning,the sensors can be used for detection of motion trajectory,contour recognition,pressure distribution.

关键词： capacitive proximity sensing pressure sensing fibrous microstructuring doping

Nanoimprint lithography for the manufacturing of flexible electronics

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Science China(Technological Sciences) 2019年第2期62卷 175-198页

作者： SHAO JinYou CHEN XiaoLiang LI XiangMing tian hongmiao WANG ChunHui LU BingHeng State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University

Flexible electronics have received considerable attention in academies and industries for their promising applications in enormous fields, such as flexible displays, wearable sensors, artificial skins, and flexible energy devices. Challenges remain in developing a flexible and scalable manufacturing method to facilitate the fabrication of multi-functional structures in a flexible electronic system. Nanoimprint lithography is a high resolution and low-cost approach to fabricate nanostructures over a large area. This paper reviews recent progress of nanoimprint lithography and its applications in flexible electronics. The basic principles, classification, research focus, and critical issues of nanoimprint lithography are elaborated. Then, the advantages of nanoimprint lithography are demonstrated in several typical applications related to flexible electronics, including conductive films, optoelectronic devices, flexible sensors, energy harvesting and storage devices, and bioinspired electronic devices. Finally,the challenges and perspectives of nanoimprint lithography in flexible electronic systems are discussed.

关键词： nanoimprint lithography manufacturing flexible electronics nanostructures sensors

Gecko-Inspired Slant Hierarchical Microstructure-Based Ultrasensitive Iontronic Pressure Sensor for Intelligent Interaction

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Research 2022年第4期2022卷 1-13页

作者： Yongsong Luo Xiaoliang Chen hongmiao tian Xiangming Li Yangtianyu Lu Yang Liu Jinyou Shao Micro-and Nano-Technology Research Center State Key Laboratory for Manufacturing Systems EngineeringXi'an JiaotongUniversityXi'an710049China Frontier Institute of Science and Technology(FIST) Xian Jiaotong UniversityXi'an 710049China

Highly sensitive flexible pressure sensors play an important role to ensure the safety and friendliness during the human-robot interaction *** the active layer has been shown to improve performance of pressure ***,the current structural strategy almost relying on axial compression deformation suffers structural stifening,and together with the limited area growth efficiency of conformal interface,essentially limiting the maximum ***,inspired by the interface contact behavior of gecko's feet,we design a slant hierarchical microstructure to act as an electrode contacting with an ionic gel layer,fundamentally eliminating the pressure resistance and maximizing functional interface expansion to achieving ultrasensitive *** a structuring strategy dramatically improves the relative capacitance change both in the low-and high-pressure region,thereby boosting the sensitivity up to 36000kPa^(-1) and effective measurement range up to *** verify the advantages of high sensitivity,the sensor is integrated with a soft magnetic robot to demonstrate a biomimetic Venus *** ability to perceive weak stimuli allows the sensor to be used as a sensory and feedback window,realizing the capture of small live insects and the transportation of fragile objects.

关键词： robot boosting interface

Piezoelectric Drop-on-Demand Inkjet Printing with Ultra-High Droplet Velocity

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Research 2024年第3期2023卷 123-137页

作者： Zhengjie Yang hongmiao tian Chunhui Wang Xiangming Li Xiaoliang Chen Xiaoming Chen Jinyou Shao State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’anShaanxi 710049China Frontier Institute of Science and Technology(FIST) Xi’an Jiaotong UniversityXi’anShaanxi 710049China.

Improving droplet velocity as much as possible is considered as the key to improving both printing speed and printing distance of the piezoelectric drop-on-demand inkjet printing *** are 3 tough and contradictory issues that need to be addressed simultaneously,namely,the actuation pressure of the piezoelectric printhead,satellite droplets,and the air resistance,which seems almost impossible to achieve with classical ***,a novel solution is *** modulating the positive crosstalk effect inside and outside the printhead,self-tuning can be achieved,including self-reinforcing of the actuation pressure,self-restraining of satellite droplets,and self-weakening of the air resistance,thereby greatly improving droplet *** on these mechanisms,waveform design methods for different inks and printheads are *** results demonstrate that monodisperse droplet jetting with a maximum velocity of 27.53 m/s can be achieved,reaching 3 to 5 times that of the classical method(5 to 8 m/s).Correspondingly,the printing speed and distance can be simultaneously increased by almost 10 times,demonstrating an ability of direct printing on irregular ***,the compatibility of ink materials is expanded,as the Ohnesorge number and the viscosity of printable inks for the printhead used are increased from 0.36–0.72 to 0.03–1.18 and from 10–12 cp to 1–40.3 cp,respectively,even breaking the traditional limitations of the piezoelectric printing technology(Ohnesorge number of 0.1 to 1;viscosity of 1 to 25 cp).All the above provide a new perspective for improving droplet velocity and may even offer a game-changing choice for expanding the boundaries of the piezoelectric drop-on-demand inkjet printing technology.

关键词： piezoelectric viscosity thereby

Discretely-supported nanoimprint lithography for patterning the high-spatial-frequency stepped surface

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Nano Research 2021年第8期14卷 2606-2612页

作者： Chunhui Wang Yu Fan Jinyou Shao Zhengjie Yang Jiaxing Sun hongmiao tian Xiangming Li Micro-and Nano-technology Research Center State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China

Non-planar morphology is a common feature of devices applied in various physical fields,such as light or fluid,which pose a great challenge for surface nano-patterning to improve their *** present study proposes a discretely-supported ***(NIL)technique to fabricate nanostructures on the extremely non-planar surface,namely high-spatial-frequency stepped *** designed discretely imprinting template implanted a discretely-supported intermediate buffer layer made of sparse pillars *** allowed the simultaneous generation of air-cushion-like buffer and reliable support to the thin structured layer in the *** resulting low bending stiffness and distributed concentrated load of the template jointly overcome the contact difficulty with a stepped surface,and enable the template to encase the stepped protrusion as tight as *** on the proposed discretely-supported NIL,nanostructures were fabricated on the luminous interface of light emitting diodes chips that covered with micrometer step electrodes *** 96%of the utilized indium tin oxide transparent current spreading layer surface on top of the light emitting diode(LED)chips was coated with nanoholes array,with an increase by more than 40%in the optical output *** excellent ability of nanopatterning a non-planar substrate could potentially lead innovate design and development of high performance device based on discretely-supported NIL.

关键词： nanoimprint lithography non-planar surface discretely-supported template nanopatterning semiconductor light emitting devices

Electric-driven flexible-roller nanoimprint lithography on the stress-sensitive warped wafer

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International Journal of Extreme Manufacturing 2023年第3期5卷 608-618页

作者： Yu Fan Chunhui Wang Jiaxing Sun Xiaogang Peng hongmiao tian Xiangming Li Xiaoliang Chen Xiaoming Chen Jinyou Shao Micro-and Nano-technology Research Center State Key Laboratory for Manufacturing Systems EngineeringXi'an Jiaotong UniversityXi’an 710049People’s Republic of China Frontier Institute of Science and Technology(FIST) Xi'an Jiaotong UniversityXi’an710049People’s Republic of China

Surface nanopatterning of semiconductor optoelectronic devices is a powerful way to improve their quality and ***,photoelectric devices’inherent stress sensitivity and inevitable warpage pose a huge challenge on fabricating nanostructures ***-driven flexible-roller nanoimprint lithography for nanopatterning the optoelectronic wafer is proposed in this *** flexible nanoimprint template twining around a roller is continuously released and recovered,controlled by the roller’s simple *** electric field applied to the template and substrate provides the driving *** contact line of the template and the substrate gradually moves with the roller to enable scanning and adapting to the entire warped substrate,under the electric *** addition,the driving force generated from electric field is applied to the surface of substrate,so that the substrate is free from external ***,liquid resist completely fills in microcavities on the template by powerful electric field force,to ensure the fidelity of the *** proposed nanoimprint technology is validated on the ***,nano-grating structures are fabricated on a gallium nitride light-emitting diode chip adopting the solution,achieving polarization of the light source.

关键词： nanoimprinting electric-driven flexible-roller warped stress-sensitive

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电渗驱动纳米压印聚合物流变填充机理研究

中国科学：技术科学 2016年第6期46卷 615-624页

作者：宋晓兰红波田洪淼青岛理工大学纳米制造与纳米电子实验室青岛266033 西安交通大学机械制造系统工程国家重点实验室西安710049

电渗驱动纳米压印是一种新型的纳米压印工艺,它在大面积纳米压印、高深宽比微纳结构制造,尤其是在易碎衬底大面积图形化方面具有非常突出的潜能和优势.但是,电渗驱动纳米压印不同于现有的'压力驱动'纳米压印和'电毛细力驱动'纳米压印,... 详细信息

电渗驱动纳米压印是一种新型的纳米压印工艺,它在大面积纳米压印、高深宽比微纳结构制造,尤其是在易碎衬底大面积图形化方面具有非常突出的潜能和优势.但是,电渗驱动纳米压印不同于现有的'压力驱动'纳米压印和'电毛细力驱动'纳米压印,已有的纳米压印聚合物流变填充基础理论和相关研究结果不再适用.本文开展了电渗驱动纳米压印聚合物流变填充机理、影响因素和规律的研究.基于微流体电渗驱动原理,建立了电渗驱动纳米压印驱动力体积力、填充速度以及填充时间的理论模型.利用COMSOL Multiphysics多物理场模拟软件,揭示了液态聚合物在模具型腔动态填充的过程,工艺参数、模具几何特征、聚合物材料特性等因素对于纳米压印流变填充的影响及其规律.本研究为电渗驱动纳米压印技术奠定了理论基础,并为电渗驱动纳米压印工艺优化和和压印装备开发与性能的改进提供了重要理论支撑和方向性指导.

关键词：纳米压印电渗驱动电渗流流变填充微纳制造

基于铌酸锂的高阶可调谐布拉格波导光栅特性分析

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激光与光电子学进展 2017年第6期54卷 61-67页

作者：王钊张爱玲田红苗李青青天津理工大学电气电子工程学院天津300384 光电器件与通信技术教育部工程研究中心天津300384

提出了一种可在铌酸锂上利用光刻及钛扩散方法实现高阶可调谐的布拉格波导光栅结构,并对其相关特性进行了分析。分析了占空比、光栅阶数、波导宽度差及外加电压对高阶布拉格波导光栅反射谱特性的影响。结果表明,折射率调制度、最大反射... 详细信息

提出了一种可在铌酸锂上利用光刻及钛扩散方法实现高阶可调谐的布拉格波导光栅结构,并对其相关特性进行了分析。分析了占空比、光栅阶数、波导宽度差及外加电压对高阶布拉格波导光栅反射谱特性的影响。结果表明,折射率调制度、最大反射率与零值带宽均随占空比呈周期性变化,中心波长随占空比的增加向长波方向漂移。在各阶光栅均取最佳占空比时,折射率调制度最大;随着光栅长度的增大,最大反射率增大而零值带宽减小。随着波导宽度差的增大,最大反射率及零值带宽均增大,中心波长向长波方向漂移。当外加电压增加时,反射谱谱线形状几乎不变化,中心波长会向长波方向漂移,且呈线性增长趋势。

关键词：光栅光通信高阶可调谐布拉格波导光栅光刻钛扩散铌酸锂

电驱动微纳米模塑技术的成形机理及工艺参数影响研究

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机械工程学报 2013年第6期49卷 145-152页

作者：丁玉成田洪淼邵金友李祥明西安交通大学机械制造系统工程国家重点实验室西安710049

电驱动微纳米模塑技术较之常规压印光刻技术具有其独特的优势,其利用电场产生的Maxwell压强替代外部机械压力,实现对聚合物薄膜流变的有效驱动,可以避免压印光刻技术中机械压力引发的结构变形等问题,实现微纳米结构的保真复形。针对电... 详细信息

电驱动微纳米模塑技术较之常规压印光刻技术具有其独特的优势,其利用电场产生的Maxwell压强替代外部机械压力,实现对聚合物薄膜流变的有效驱动,可以避免压印光刻技术中机械压力引发的结构变形等问题,实现微纳米结构的保真复形。针对电驱动微纳米模塑技术中电场施加方式以及模具几何约束的差异,提出非接触式与接触式两种电驱动模塑成形方法,并采用理论分析、数值仿真以及试验等手段探究电场作用下聚合物的流变成形机理,分析电压、空气间隙和膜厚等工艺参数对复形模塑结构的影响,探讨非接触式与接触式两种电驱动微纳米结构成形方法的异同。研究结果表明,两种电驱动模塑技术都能有效避免常规压印光刻技术的不足之处,在无机械压力条件下实现微纳米结构的模板图案完整复型,但接触式电驱动微纳米模塑方式在图形复制精确性、成形效率和工艺可控性等方面更具优势,是一种具有广阔应用潜力的纳米结构图形化方法。

关键词：微纳制造图形转移纳米压印电驱动微纳结构模塑麦克斯韦应力

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基于相位掩模法的高阶布拉格波导光栅特性

激光与光电子学进展 2017年第1期54卷 76-82页

作者：张爱玲田红苗李青青王钊天津理工大学计算机与通信工程学院天津市薄膜电子与通信器件重点实验室教育部通信器件与技术工程研究中心天津300384

对基于相位掩模法的高阶布拉格(Bragg)波导光栅的特性进行了研究,不同阶数Bragg波导光栅的谐振波长均随饱和系数的增大而增大。综合考虑光栅阶数、相位掩模板衍射效率及饱和系数对Bragg波导光栅折射率调制幅度的影响,当Bragg波导光栅阶... 详细信息

对基于相位掩模法的高阶布拉格(Bragg)波导光栅的特性进行了研究,不同阶数Bragg波导光栅的谐振波长均随饱和系数的增大而增大。综合考虑光栅阶数、相位掩模板衍射效率及饱和系数对Bragg波导光栅折射率调制幅度的影响,当Bragg波导光栅阶数为2,且饱和系数为0.67时折射率调制幅度达到最大,此时Bragg波导光栅的最大反射率最大,零值带宽最大。随着光栅长度的增大,最大反射率增大,零值带宽减小。波导光栅的饱和系数随写入光强与刻写时间乘积的增大而增大,当此乘积为160s·W/cm2时饱和系数为0.67,因此可以通过控制写入光强与刻写时间使饱和系数达到最优。

关键词：光通信高阶布拉格波导光栅相位掩模法饱和系数