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纳米压印光刻技术——下一代批量生产的光刻技术(英文)

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电子工业专用设备 2004年第7期33卷 3-9页

作者： R.Pelzer P.Lindner t.glinsner B.Vratzov C.Gourgon S.Landis P.Kettner C.Schaefer EV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingAMICA AMO GmbH Huysensweg 25 D-52074 AachenLaboratoire des Technologies de la Microelectronique-CNRS 17 R. des MartyrsF-38054 Grenoble CedexCEA-LETI17 R.des Martyrs F-38054 Grenoble CedexEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 Schaerding

纳米压印光刻技术已被证实是纳米尺寸大面积结构复制的最有前途的下一代技术之一。这种速度快、成本低的方法成为生物化学、μ级流化学、μ-tAS和通信器件制造以及纳米尺寸范围内广泛应用的一种日渐重要的方法,如生物医学、纳米流体学... 详细信息

纳米压印光刻技术已被证实是纳米尺寸大面积结构复制的最有前途的下一代技术之一。这种速度快、成本低的方法成为生物化学、μ级流化学、μ-tAS和通信器件制造以及纳米尺寸范围内广泛应用的一种日渐重要的方法,如生物医学、纳米流体学、纳米光学应用、数据存储等领域。由于标准光刻系统的波长限制、巨大的开发工作量、以及高昂的工艺和设备成本,纳米压印光刻技术可能成为主流IC产业中一种真正富有竞争性方法。对细小到亚10nm范围内的极小复制结构,纳米压印技术没有物理极限。从几种纳米压印光刻技术中选择两种前景广阔的方法——热压印光刻(HEL)和紫外压印光刻(UV-NIL)技术给予介绍。两种技术对各种各样的材料以及全部作图的衬底大批量生产提供了快速印制。重点介绍了HEL和UV-NIL两种技术的结果。全片压印尺寸达200mm直径,图形分辨力高,拓展到纳米尺寸范围。

关键词：纳米压印技术热压印紫外压印电铸光刻

the Evolution of Wafer Bonding Moving from the back-end further to the front-end

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电子工业专用设备 2009年第3期38卷 20-26页

作者： thomas glinsner Peter Hangweier Head of Product Management EV Group Product Manager EV Group

1 IntroductionAs the nanoscale era progresses, innovative new materials and processes continue to be developed and implemented as a means of keeping the industry

关键词：电子工业技术创新纳米技术晶片

transport mechanism in chemically reactive hybrid nanofluid flow containing gyrotactic micro-organisms over a curved oscillatory surface

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Applied Mathematics and Mechanics(English Edition) 2025年第1期46卷 177-192页

作者： M.NAVEED M.IMRAN t.ASGHAR Z.ABBAS Department of Mathematics Division of Science and TechnologyUniversity of Education Department of Mathematics The Islamia University of Bahawalpur

this paper examines the transport analysis, including both heat transfer and mass transfer, in hybrid nanofluid flow containing gyrotactic microorganisms towards a curved oscillatory surface. the influence of magnetic fields is also inspected in terms of their physical characteristics. to depict the phenomena of transport, modified versions of both Fick's and Fourier's laws are used. Additionally, the characteristics of both heterogeneous and homogeneous chemical reactions are also incorporated. Utilizing a curvilinear coordinate system, the flow problem is formulated as partial differential equations(PDEs)for momentum, concentration, microorganism field, and energy. An analytical solution to the obtained flow equations is achieved utilizing the homotopy analysis method(HAM).the effects of significant flow parameters on the pressure and microorganism fields, velocity, oscillation velocity, concentration, and temperature distributions are shown via graphs. Furthermore, the variations in skin friction, mass transfer rate, heat transfer rate, and local motile number due to different involved parameters are presented in tables and are analyzed in detail. Graphical results indicate that the curves of velocity and temperature fields are enhanced as the values of the solid volume fraction variables *** is also verified that the concentration rate field decreases as the values of the homogeneous reaction strength parameter and the radius of curvature parameter increase, and it increases with the Schmidt number and the heterogeneous reaction strength *** outcomes show a favorable response of the motile number to advanced values of the Peclet number, the Schmidt number, the microorganism difference parameter, and the bio-convective Lewis number.

关键词： hybrid nanofluid oscillating curved stretchable sheet gyrotactic microorganism Cattaneo-Christov heat and mass flux chemical reaction analytical solution O368

the impact of alpha-fetoprotein (AFP), child-turcotte-pugh (CtP) score and disease staging on the survival of hepatocellular carcinoma (HCC) patients: a retrospective cohort from single oncology center

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Oncology research 2025年第1期33卷 149-160页

作者： Nasser Mulla Yousef Katib Asim M Almughamsi Duaa S Alkhayat Mohamed Mosaad Samir t Alfotih Rawan Alaofi Department of Internal Medicine Faculty of Medicine Taibah University Madinah 42278 Saudi Arabia. Department of Radiology Faculty of Medicine Taibah University Madinah 42278 Saudi Arabia. Department of Surgery Faculty of Medicine Taibah University Madinah 42278 Saudi Arabia. Department of Endemic and Infectious Diseases Suez Canal University Ismailia 41522 Egypt. King Salman bin Abdulaziz Medical City Madinah 42311 Saudi Arabia. Prince Mohammed Bin Abdulaziz Hospital Madinah 41511 Saudi Arabia.

Background:Hepatocellular carcinoma (HCC) is the most common cause of cancer-related death in Saudi Arabia. Our study aimed to investigate the patterns of HCC and the effect of tNM staging, Alfa-fetoprotein (AFP), and Child-turcotte Pugh (CtP) on patients' overall survival (OS).Methods:A retrospective analysis was conducted on 43 HCC patients at a single oncology center in Saudi Arabia from 2015 to 2020. All patients had to fulfill one of the following criteria: (a) a liver lesion reported as definitive HCC on dynamic imaging and/or (b) a biopsy-confirmed diagnosis.Results:the mean patient age of all HCC cases was 66.8 with a male-to-female ratio of 3.3:1. All patients were stratified into two groups: viral HCC (n = 22, 51%) and non-viral HCC (n = 21, 49%). Among viral-HCC patients, 55% were due to HBV and 45% due to HCV. Cirrhosis was diagnosed in 79% of cases. Age and sex did not significantly statistically differ in OS among viral and non-viral HCC patients (-value > 0.05). About 65% of patients had tumor size >5 cm during the diagnosis, with a significant statistical difference in OS (-value = 0.027). AFP was >400 ng/ml in 45% of the patients. there was a statistically significant difference in the OS in terms of AFP levels (-value = 0.021). A statistically significant difference was also observed between the CtP score and OS (-value = 0.02). CtP class B had the longest survival. BSC was the most common treatment provided to HCC patients followed by sorafenib therapy. there was a significant statistical difference in OS among viral and non-viral HCC patients (-value = 0.008).Conclusions:the most common predictors for OS were the underlying cause of HCC, AFP, and tumor size. Being having non-viral etiology, a tumor size >5 cm, an AFP > 400 ng/mL, and a CtP score class C were all negatively associated with OS.

关键词： Alpha-fetoprotein (AFP) Child-turcotte-pugh Hepatocellular carcinoma Pattern Progression free survival

Nanoimprint Lithography -A Next Generation High Volume Lithography technique

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半导体技术 2004年第7期29卷 86-91页

作者： R. Pelzer P. Lindner t. glinsner B.Vratzov C.Gourgon S.Landis P. Kettner C. Schaefer EV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingAMICA AMO GmbH Huysensweg 25 D-52074 AachenLaboratoire des Technologies de la Microelectronique CNRS 17 R. des MartyrsF- 3805Grenoble Cedex4CEA-LETI 17 R. des Martyrs F- 38054 Grenoble CedexEV Group DI Erich Thallner Strasse 1 A-4780 SchaerdingEV Group DI Erich Thallner Strasse 1 A-4780 Schaerding

Nanoimprint Lithography has been demon-strated to be one of the most promising next genera-tion techniques for large-area structure replicationin the nanometer scale. this fast and low costmethod becomes an increasingly important instru-ment for fabrication of biochemistry,m-fluidic, m-tAS and telecommunication devices, as well as for awide variety of fields in the nm range, like biomedical,nano-fluidics,nano-optical applications, datastorage, *** to the restrictions on wavelength and theenormous development works, linked to high pro-cess and equipment costs on standard lithographysystems, nanoimprint lithography might become areal competitive method in mainstream IC *** are no physical limitations encountered withimprinting techniques for much smaller replicatedstructures, down to the sub-10nm range [1]. Amongseveral Nanoimprint lithography techniques resultsof two promising methods, hot embossing lithogra-phy (HEL) and UV-nanoimprinting (UV-NIL) will bepresented. Both techniques allow rapid prototypingas well as high volume production of fully patternedsubstrates for a wide range of *** paper will present results on HE and UV-NIL, among them full wafer imprints up to 200mmwith high-resolution patterns down to nm range.

关键词：光刻 HEL UV-NIL MCP 光对准

Free vibration and transient response of double curved beams connected by intermediate straight beams

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Applied Mathematics and Mechanics(English Edition) 2025年第1期46卷 37-62页

作者： R.A.JAFARI-tALOOKOLAEI H.GHANDVAR E.JUMAEV S.KHAtIR t.CUONG-LE School of Mechanical Engineering Babol Noshirvani University of Technology Department of Mechanical Engineering Faculty of Engineering New Uzbekistan University University of Business and Science Center for Engineering Application and technology Solutions Ho Chi Minh City Open University

this paper investigates the free vibration and transient response of interconnected structures including double curved beams and intermediate straight beams,which are all constructed from functionally graded porous(FGP) materials. the strain potential and kinetic energies of each beam along with the work done by the external force are calculated. Additionally, a higher-order beam element is introduced to derive stiffness and mass matrices, along with the force vector. the curved and straight beams are discretized, and their assembled stiffness, mass matrices, and force vectors, are *** conditions at the joints are used to derive the total matrices of the entire structure. Subsequently, the natural frequencies and transient response of the system are determined. the accuracy of the mathematical model and the self-developed computer program is validated through the comparison of the obtained results with those of the existing literature and commercial software ANSYS, demonstrating excellent ***, a comprehensive study is conducted to investigate the effects of various parameters on the free vibration and transient response of the considered structure.

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Metal-organic frameworks (MOFs) in aqueous batteries (ABs):unlocking potential through innovative materials design

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Science China Chemistry 2025年

作者： Bo Han Erhai Hu Bei-Er Jia Ziyang Liu Shuen tso Afriyanti Sumboja Ivandini t.Anggraningrum Anne Zulfia Syahrial Qingyu Yan SCARCE Laboratory Energy Research Institute NTU (ERIN) Nanyang Technological University School of Materials Science and Engineering Nanyang Technological University Material Science and Engineering Research Group Faculty of Mechanical and Aerospace Engineering Institut Teknologi Bandung Department of Chemistry University of Indonesia Metallurgical & Materials Engineering Department Fakultas Teknik Universitas Indonesia

Metal-organic frameworks (MOFs) represent a revolutionary class of materials in the field of energy storage,particularly for aqueous batteries (ABs).Distinguished by their large surface area,tuneable porosity,and adaptable chemical activity,MOFs offer significant advantages over conventional materials in battery *** article provides a thorough analysis of the crucial role that MOFs play in improving the efficiency of *** includes a concise review of the current research progress,emphasizing the fundamental processes by which MOFs enhance electrochemical ***,the review examines the synthesis and design strategies for the structure of MOFs to maximize ion transport,improve conductivity,and enhance *** structural advantages,chemical versatility,stability,durability and functionalization potential of MOFs are comprehensively ***,we explore the distinct advantages of MOFs in overcoming common challenges encountered in ABs,such as declining capacity,inadequate cycling stability,and limited energy *** paper also highlights the future research directions needed to fully harness their *** goal is to develop a fundamental understanding and stimulate further progress in the use of MOFs for advanced energy storage solutions.

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Leveraging ROtI map derived from Indonesian GNSS receiver network for advancing study of Equatorial Plasma Bubble in Southeast/East Asia

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Earth and Planetary Physics 2025年第1期9卷 101-116页

作者： Prayitno Abadi Ihsan N.Muafiry teguh N.Pratama Angga Y.Putra Suraina Gatot H.Pramono Sidik t.Wibowo Febrylian F.Chabibi Umar A.Ahmad Wildan P.tresna Asnawi Research Center for Climate and Atmosphere Indonesian National Research and Innovation Agency(BRIN)BandungIndonesia School of Electrical Engineering Telkom UniversityBandungIndonesia Directorate of Laboratory Management Facilities and Science and technology Park Indonesian National Research and Innovation Agency(BRIN)PontianakIndonesia Geophysics Laboratory Master Program in PhysicsUniversitas Gadjah Mada(UGM)YogyakartaIndonesia Research Center for Space Indonesian National Research and Innovation Agency(BRIN)BandungIndonesia Indonesian Geospatial Information Agency(BIG) JakartaIndonesia Research Center for Photonics Indonesian National Research and Innovation Agency(BRIN)Tangerang SelatanIndonesia Department of Earth and Planetary Sciences Hokkaido UniversitySapporoJapan

this paper highlights the crucial role of Indonesia’s GNSS receiver network in advancing Equatorial Plasma Bubble(EPB)studies in Southeast and East Asia,as ionospheric irregularities within EPB can disrupt GNSS signals and degrade positioning *** by the Indonesian Geospatial Information Agency(BIG),the Indonesia Continuously Operating Reference Station(Ina-CORS)network comprises over 300 GNSS receivers spanning equatorial to southern low-latitude ***-CORS is uniquely situated to monitor EPB generation,zonal drift,and dissipation across Southeast *** provide a practical tool for EPB research,by sharing two-dimensional rate of total Electron Content(tEC)change index(ROtI)derived from this *** generate ROtI maps with a 10-minute resolution,and samples from May 2024 are publicly available for further scientific *** preliminary findings from the ROtI maps of Ina-CORS are ***,the Ina-CORS ROtI maps reveal that the irregularities within a broader EPB structure persist longer,increasing the potential for these irregularities to migrate farther ***,we demonstrate that combined ROtI maps from Ina-CORS and GNSS receivers in East Asia and Australia can be used to monitor the development of ionospheric irregularities in Southeast and East *** have demonstrated the combined ROtI maps to capture the development of ionospheric irregularities in the Southeast/East Asian sector during the G5 Geomagnetic Storm on May 11,*** observed simultaneous ionospheric irregularities in Japan and Australia,respectively propagating northwestward and southwestward,before midnight,whereas Southeast Asia’s equatorial and low-latitude regions exhibited irregularities *** sharing ROtI maps from Indonesia and integrating them with regional GNSS networks,researchers can conduct comprehensive EPB studies,enhancing the understanding of EPB behavior across Southeast and East Asia and contributing significantly to ionosphe

关键词： Equatorial Plasma Bubble(EPB) GNSS receivers’network Indonesia Continuously Operating Reference Station(Ina-CORS) ionospheric map Rate of tEC change index(ROtI)map

用于聚合物基微流体MEMS的等离子体活性晶圆键合技术(英文)

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电子工业专用设备 2006年第1期35卷 46-51页

作者： Dr. Sharon Farrens Paul Kettner thomas glinsner EV Group DI Erich Thallner Strasse 1 4782 St. Florian / Inn Austria

Lab-on-chip或μ-tAS（micro—total arialysis systems）结合流体处理、检测及数据分析，是一种便携式的低成本高效器件。在微流体应用中，聚合物具有比硅或玻璃器件更明显的优势，它包括：宽泛的材料选择性，成本低、效率高，使用任... 详细信息

Lab-on-chip或μ-tAS（micro—total arialysis systems）结合流体处理、检测及数据分析，是一种便携式的低成本高效器件。在微流体应用中，聚合物具有比硅或玻璃器件更明显的优势，它包括：宽泛的材料选择性，成本低、效率高，使用任意性，生物兼容性，抗化学品和工艺灵活性。为了实现采用这类材料制备小型集成化系统，我们发展了新的制备与封装技术。这项工作着眼于运用等离子体活化低温直接键合技术实现纳／微结构聚合物在低温条件下进行封装。由纳米压印光刻制作的纳／微结构的聚合物器件，可能是异质（聚合物与玻璃或硅）或同质（聚合物与聚合物）键合。为了改进键合材料的物理和化学熔合，键合工序通常在接近聚合物的玻璃化转变温度的高温下进行。但遗憾的是，高温损伤了微细图形，特别是对于高深宽比结构。在EVG 810Lt等离子体反应室里，我们采用软射频频率等离子体表面处理，来进行聚合物的等离子体活化，它能在不改变聚合物体特性的前提下清洗和活化聚合物顶层。最终结果是，在EVG 501晶圆键合机上，两个活化的表面在低温下通过施加一个适中的、均匀的接触压力而连接在一起，保证了空腔密封并防止了小结构的破坏和变形。键合工艺条件为：真空条件为从大气到200～1000Pa、接触压力为2～5kN、温度从室温到80℃。

关键词：纳米压印光刻热压印干法活化等离子体活化聚合物键合