检索结果-南通市图书馆

FEM-based modeling of microsphereenhanced interferometry

Light(Advanced Manufacturing) 2022年第4期3卷 73-85页

作者： Tobias Pahl Lucie Hüser sebastian hagemeier Peter Lehmann Measurement Technology Group Faculty of Electrical Engineering and Computer ScienceUniversity of KasselWilhelmshöher Allee 7134121 KasselGermany

To improve the lateral resolution in microscopic imaging,microspheres are placed close to the object’s surface in order to support the imaging process by optical near-field *** microsphere-assisted measurements are part of various recent studies,no generally accepted explanation for the effect of microspheres *** nanojets,enhancement of the numerical aperture,whispering-gallery modes and evanescent waves are usually named reasons in context with microspheres,though none of these effects is proven to be decisive for the resolution *** present a simulation model of the complete microscopic imaging process of microsphere-enhanced interference microscopy including a rigorous treatment of the light scattering process at the surface of the *** model consideres objective lenses of high numerical aperture providing 3D conical illumination and *** enhanced resolution and magnification by the microsphere is analyzed with respect to the numerical aperture of the objective ***,we give a criterion for the achievable resolution and demonstrate that a local enhancement of the numerical aperture is the most likely reason for the resolution enhancement.

关键词： Electromagnetic modeling Microsphere-assisted microscopy Interference microscopy Coherence scanning interferometry Simulation Finite element method

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

Electromagnetic modeling of interference,confocal,and focus variation microscopy

引用

Advanced Photonics Nexus 2024年第1期3卷 104-116页

作者： Tobias Pahl Felix Rosenthal Johannes Breidenbach Corvin Danzglock sebastian hagemeier Xin Xu Marco Künne Peter Lehmann University of Kassel Faculty of Electrical Engineering and Computer ScienceMeasurement Technology GroupKasselGermany

We present a unified electromagnetic modeling of coherence scanning interferometry,confocal microscopy,and focus variation microscopy as the most common techniques for surface topography inspection with micro-and nanometer *** model aims at analyzing the instrument response and predicting systematic *** the main focus lies on the modeling of the microscopes,the light–surface interaction is considered,based on the Kirchhoff approximation extended to vectorial imaging ***,it can be replaced by rigorous methods without changing the microscope *** demonstrate that all of the measuring instruments mentioned above can be modeled using the same theory with some adaption to the respective *** validation,simulated results are confirmed by comparison with measurement results.

关键词： interference microscopy coherence scanning interferometry confocal microscopy focus variation microscopy electromagnetic modeling surface topography measurement

来源：

维普期刊数据库评论

在线全文

维普期刊数据库

学校读者我要写书评

暂无评论

欢迎您,

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案：

请选择收藏分类：

通借通还

欢迎您,

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

在线全文

在线全文

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：