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Self-limiting laser crystallization and direct writing of 2D materials

International Journal of Extreme Manufacturing 2019年第1期1卷 139-144页

作者： Zabihollah Ahmadi Baha Yakupoglu Nurul Azam salah elafandi Masoud Mahjouri-Samani Electrical and Computer Engineering Department Auburn UniversityAuburnALUnited States of America

Direct growth and patterning of atomically thin two-dimensional(2D)materials on various substrates are essential steps towards enabling their potential for use in the next generation of electronic and optoelectronic *** conventional gas-phase growth techniques,however,are not compatible with direct patterning ***,the condensed-phase methods,based on metal oxide deposition and chalcogenization processes,require lengthy processing times and high ***,a novel self-limiting laser crystallization process for direct crystallization and patterning of 2D materials is *** takes advantage of significant differences between the optical properties of the amorphous and crystalline *** laser deposition is used to deposit a thin layer of stoichiometric amorphous molybdenum disulfide(MoS2)film(∼3 nm)onto the fused silica substrates.A tunable nanosecond infrared(IR)laser(1064 nm)is then employed to couple a precise amount of power and number of pulses into the amorphous materials for controlled crystallization and direct writing *** IR laser interaction with the amorphous layer results in fast heating,crystallization,and/or evaporation of the materials within a narrow processing ***,reduction of the midgap and defect states in the as crystallized layers decreases the laser coupling efficiency leading to higher tolerance to process *** deliberate design of such laser 2D material interactions allows the selflimiting crystallization phenomena to occur with increased quality and a much broader processing *** unique laser processing approach allows high-quality crystallization,direct writing,patterning,and the integration of various 2D materials into future functional devices.

关键词： 2D materials direct laser writing laser crystallization

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