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O-FIB:far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment

Light(Science & Applications) 2020年第1期9卷 1624-1630页

作者： Zhen-Ze Li Lei Wang Hua Fan Yan-Hao Yu qi-dai chen Saulius Juodkazis Hong-Bo Sun State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China Nanotechnology Facility Swinburne University of TechnologyJohn St.Hawthorn 3122 VicAustralia State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua UniversityBeijing 100084China

Nanoscale surface texturing,drilling,cutting,and spatial sculpturing,which are essential for applications,including thin-film solar cells,photonic chips,antireflection,wettability,and friction drag reduction,require not only high accuracy in material processing,but also the capability of manufacturing in an atmospheric *** used focused ion beam(FIB)technology offers nanoscale precision,but is limited by the vacuum-working conditions;therefore,it is not applicable to industrial-scale samples such as ship hulls or biomaterials,e.g.,cells and ***,we report an optical far-field-induced near-field breakdown(O-FIB)approach as an optical version of the conventional FIB technique,which allows direct nanowriting in *** writing is initiated from nanoholes created by femtosecondlaser-induced multiphoton absorption,and its cutting“knife edge”is sharpened by the far-field-regulated enhancement of the optical near field.A spatial resolution of less than 20 nm(λ/40,withλbeing the light wavelength)is readily achieved.O-FIB is empowered by the utilization of simple polarization control of the incident light to steer the nanogroove writing along the designed *** universality of near-field enhancement and localization makes O-FIB applicable to various materials,and enables a large-area printing mode that is superior to conventional FIB processing.

关键词： field printing friction

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Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing

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Light(Science & Applications) 2017年第1期6卷 335-341页

作者： Lei Wang qi-dai chen Xiao-Wen Cao Ričardas Buividas Xuewen Wang Saulius Juodkazis Hong-Bo Sun State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin University2699 Qianjin StreetChangchun 130012China Centre for Micro-Photonics Faculty of ScienceEngineering and TechnologySwinburne University of TechnologyHawthornVIC 3122Australia Melbourne Centre for Nanofabrication ANFF151 Wellington RoadClaytonVIC 3168Australia

The lossy nature of plasmonic wave due to absorption is shown to become an advantage for scaling-up a large area surface nanotexturing of transparent dielectrics and semiconductors by a self-organized sub-wavelength energy deposition leading to an ablation pattern—ripples—using this plasmonic *** nanoscale modifications are delivered by surface plasmon polariton(SPP)using:(i)fast scan and(ii)cylindrical focusing of femtosecond laser pulses for a high patterning *** mechanism of ripple formation on ZnS dielectric is experimentally proven to occur via surface wave at the substrate–plasma *** line focusing increase the ordering quality of ripples and facilitates fabrication over wafer-sized areas within a practical time *** using SPP is expected to open new applications in photo-catalysis,tribology,and solar light harvesting via localized energy deposition rather scattering used in photonic and sensing applications based on re-scattering of SPP modes into far-field modes.

关键词： deep-subwavelength structures laser induced periodic structures large-area fabrication plasmonic subwavelength structures

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Ultrafast optical spectroscopy of surface-modified silicon quantum dots: unraveling the underlying mechanism of the ultrabright and color-tunable photoluminescence

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Light(Science & Applications) 2015年第1期4卷 524-531页

作者： Lei Wang qi Li Hai-Yu Wang Jing-Chun Huang Ran Zhang qi-dai chen Huai-Liang Xu Wei Han Zheng-Zhong Shao Hong-Bo Sun State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China College of Physics Jilin UniversityChangchun 130012China State Key Laboratory of Molecular Engineering of Polymers Advanced Material LaboratoryDepartment of Macromolecular ScienceFudan UniversityShanghai 200433China

In this work,the fundamental mechanism of ultrabright fluorescence from surface-modified colloidal silicon quantum dots is investigated in depth using ultrafast *** underlying energy band structure corresponding to such highly efficient direct bandgap-like emissions in our surface-modified silicon quantum dots is unraveled by analyzing the transient optical spectrum,which demonstrates the significant effect of surface molecular *** is observed that special surface modification,which creates novel surface states,is responsible for the different emission wavelengths and the significant improvement in the photoluminescence quantum *** this essential understanding,surface-modified silicon quantum dots with deep blue to orange emission are successfully prepared without changing their sizes.

关键词： quantum confinement silicon quantum dots surface molecular engineering ultrafast spectroscopy wave function modification

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Holographic laser fabrication of 3D artificial compound μ-eyes

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Light(Advanced Manufacturing) 2023年第4期4卷 1-9页

作者： Lei Wang Wei Gong Xiao-Wen Cao Yan-Hao Yu Saulius Juodkazis qi-dai chen Jilin University State Key Laboratory of Integrated OptoelectronicsCollege of Electronic Science and EngineeringChangchun130012China Optical Sciences Centre and ARC Training Centre in Surface Engineering for Advanced Materials(SEAM) School of ScienceSwinburne University of TechnologyHawthornVictoria 3122Australia Melbourne Centre for Nanofabrication 151 Wellington RoadClayton VIC3168Australia

The demand for fast optical image acquisition without movable optical elements(e.g.,for self-driving car technology)can be met using bioinspired 3D compound eyes.3D laser processing strategies enable designable 3D structuring but suffer from low fabrication efficiency,which significantly limits their applications in producing complex 3D optical ***,we demonstrate a versatile yet simple wet-etching-assisted holographic laser fabrication method for the development of 3D compound *** compoundμ-eyes can be readily fabricated by programming a 3D spot array for the parallel ablation of a curved fused silica surface,followed by controllable etching in a hydrofluoric(HF)acid solution.A 3D-concave-lens array made on a curved surface over an area of 100μm cross-section with each lenslet of 10μm radius was fabricated with high fidelity and excellent imaging/focusing *** resultant 3D-concave-lens can serve as a hard template for the mass production of soft compound eyes through soft ***,using a generative adversarial network(GAN)-based deep learning algorithm,image restoration was conducted for each lenslet,which retained a large field of view and significantly improved image *** method provides a simple solution to the requirements of compoundμ-eyes required by Industry 4.0.

关键词： Holographic laser fabrication Wet etching compound eye Micro-optics Fast imaging Imaging restoration

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Investigation of fluorescence resonance energy transfer ultrafast dynamics in electrostatically repulsed and attracted exciton-plasmon systems

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Chinese Physics B 2021年第2期30卷 529-534页

作者： Hong-Yu Tu Ji-Chao cheng Gen-Cai Pan Lu Han Bin Duan Hai-Yu Wang qi-dai chen Shu-Ping Xu Zhen-Wen dai Ling-Yun Pan State Key Laboratory of Superhard Materials College of PhysicsJilin UniversityChangchun 130012China State Key Laboratory on Integrated Optoelectronics College of ElectronicsScience and EngineeringJilin UniversityChangchun 130012China State Key Laboratory of Supramolecular Structure and Materials Jilin UniversityChangchun 130012China

Following the gradual maturation of synthetic techniques for nanomaterials,exciton-plasmon composites have become a research hot-spot due to their controllable energy transfer through electromagnetic fields on the ***,most reports ignore fluorescence resonance energy transfer(FRET)under electrostatic repulsion *** this study,the FRET process is investigated in both electrostatic attraction and electrostatic repulsion *** changing the Au:quantum dot ratio,local-field induced FRET can be observed with a lifetime of ns and a fast component of hundreds of *** results indicate that the intrinsic transfer process can only elucidated by considering both steady and transient state information.

关键词： fluorescence resonance energy transfer(FRET) quantum dots excitons-plasmon composites

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Terahertz flexible multiplexing chip enabled by synthetic topological phase transitions

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National Science Review 2024年第8期11卷 157-166页

作者： Hang Ren Su Xu Zhidong Lyu Yuanzhen Li Zuomin Yang Quan Xu Yong-Sen Yu Yanfeng Li Fei Gao Xianbin Yu Jiaguang Han qi-dai chen Hong-Bo Sun State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University College of Information Science and Electronic Engineering Zhejiang University Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering Key Laboratory of Optoelectronic Information Technology(Ministry of Education of China) Tianjin University Guangxi Key Laboratory of Optoelectronic Information Processing School of Optoelectronic Engineering Guilin University of Electronic Technology State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua University

Flexible multiplexing chips that permit reconfigurable multidimensional channel utilization are indispensable for revolutionary 6G terahertz communications,but the insufficient manipulation capability of terahertz waves prevents their practical ***,we propose the first experimental demonstration of a flexible multiplexing chip for terahertz communication by revealing the unique mechanism of topological phase(TP) transition and perseveration in a heterogeneously coupled bilayer valley Hall topological photonic *** synthetic and individual TPs operated in the coupled and decoupled states enable controllable on-chip modular TP transitions and subchannel *** time-frequency interleaved subchannels support 10-and 12-Gbit/s QAM-16 high-speed data streams along corresponding paths over carriers of 120 and 130 GHz with 2.5-and 3-GHz bandwidths,*** work unlocks interlayer heterogeneous TPs for inspiring ingenious on-chip terahertz-wave regulation,allowing functionality-reconfigurable,compactly integrated and CMOS-compatible chips.

关键词： terahertz technology topological phase transitions flexible multiplexing 6G communications silicon chips

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On-chip single-photon chirality encircling exceptional points

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Chip 2023年第4期2卷 71-77页

作者： Zhen-Nan Tian Feng Yu Xu-Lin Zhang Kai Ming Lau Li-cheng Wang Jensen Li C.T.Chan qi-dai chen State Key Laboratory of Integrated Optoelectronics College of Electronic Sci-ence and EngineeringJilin UniversityChangchun 130012China Department of Physics The Hong Kong University of Science and TechnologyClear Water BayHong Kong 999077China

Exceptional points(EPs),which are typically defined as the degener-acy points of a non-Hermitian Hamiltonian,have been investigated in various physical systems such as photonic *** particular,the intriguing topological structures around EPs have given rise to novel strategies for manipulating photons and the underlying mechanism is especially useful for on-chip photonic *** some on-chip experiments with the adoption of lasers have been reported,EP-based photonic chips working in the quantum regime largely re-main *** the current work,a single-photon experiment was proposed to dynamically encircle an EP in on-chip photonic waveg-uides possessing passive anti-parity-time *** coinci-dences measurement reveals a chiral feature of transporting single photons,which can act as a building block for on-chip quantum de-vices that require asymmetric *** findings in the cur-rent work pave the way for on-chip experimental study on the physics of EPs as well as inspiring applications for on-chip non-Hermitian quantum devices.

关键词： Non-Hermitian photonics Photonic chip Exceptional points Single photons

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Etching‐assisted femtosecond laser modification of hard materials

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Opto-Electronic Advances 2019年第9期2卷 1-14页

作者： Xue-qing Liu Ben-Feng Bai qi-dai chen Hong-Bo Sun State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua UniversityBeijing 100084China State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China

With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard materials. However, the low efficiency, low precision and high surface roughness are the main stumbling blocks for femtosecond laser processing of hard materials. So far, etching- assisted femtosecond laser modification has demonstrated to be the efficient strategy to solve the above problems when processing hard materials, including wet etching and dry etching. In this review, femtosecond laser modification that would influence the etching selectivity is introduced. The fundamental and recent applications of the two kinds of etching assisted femtosecond laser modification technologies are summarized. In addition, the challenges and application prospects of these technologies are discussed.

关键词： femtosecond laser hard materials wet etching dry etching

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Protein-based soft micro-optics fabricated by femtosecond laser direct writing

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Light(Science & Applications) 2014年第1期3卷 342-348页

作者： Yun-Lu Sun Wen-Fei Dong Li-Gang Niu Tong Jiang Dong-Xu Liu Lu Zhang Ying-Shuai Wang qi-dai chen Dong-Pyo Kim Hong-Bo Sun State Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China College of Physics Jilin UniversityChangchun 130023China National Center of Applied Microfluidic Chemistry Department of Chemical EngineeringPohang University of Science and TechnologyPohang 790-784Korea

In this work,we report a novel soft diffractive micro-optics,called‘microscale kinoform phase-type lens(micro-KPL)’,which is fabricated by femtosecond laser direct writing(FsLDW)using bovine serum albumin(BSA)as building blocks and flexible polydimethylsiloxane(PDMS)slices as *** carefully optimizing various process parameters of FsLDW(e.g.,average laser power density,scanning step,exposure time on a single point and protein concentration),the as-formed protein micro-KPLs exhibit excellent surface quality,well-defined three-dimensional(3D)geometry and distinctive optical properties,even in relatively harsh operation environments(for instance,in strong acid or base).Laser shaping,imaging and other optical performances can be easily *** importantly,micro-KPLs also have unique flexible and stretchable properties as well as good biocompatibility and ***,such protein hydrogel-based micro-optics may have great potential applications,such as in flexible and stretchable photonics and optics,soft integrated optical microsystems and bioimplantable devices.

关键词： femtosecond laser direct writing micro-optics protein soft

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Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

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Light(Advanced Manufacturing) 2023年第4期4卷 207-233页

作者： Long Huang Zhihan Hong qi-dai chen Yong-Lai Zhang Shaoqing Zhao Yongjun Dong Yu-qing Liu Hua Liu Center for Advanced Optoelectronic Functional Materials Research and Key Laboratory for UV-Emitting Materials and Technology of Ministry of EducationNational Demonstration Center for Experimental Physics EducationNortheast Normal University5268 Renmin StreetChangchun 130024China Wyant College of Optical Sciences The University of Arizona1630 E.University BlvdTucsonArizona 85721USA Key Laboratory on Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China

The development of modern information technology has led to significant demand for microoptical elements with complex surface profiles and nanoscale surface ***,various micro-and nanoprocessing techniques are used to fabricate microoptical elements and *** laser direct writing(FsLDW)uses ultrafast pulses and the ultraintense instantaneous energy of a femtosecond laser for micro-nano *** exhibits various excellent properties,including nonlinear multiphoton absorption,high-precision processing beyond the diffraction limit,and the universality of processable materials,demonstrating its unique advantages and potential applications in three-dimensional(3D)micro-nano *** has demonstrated its value in the fabrication of various microoptical *** study details three typical principles of FsLDW,several design considerations to improve processing performance,processable materials,imaging/nonimaging microoptical elements,and their stereoscopic ***,a summary and perspective on the future research directions for FsLDW-enabled microoptical elements and stereoscopic systems are provided.

关键词： Femtosecond laser direct writing Microoptical elements 3D printing Micro/nano fabrication

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