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Physical insights into trapping effects on vertical GaN-on-Si trench MOSFETs from TCAD

Journal of Semiconductors 2024年第3期45卷 45-52页

作者： NicolòZagni Manuel Fregolent Andrea Del Fiol Davide Favero Francesco Bergamin Giovanni Verzellesi Carlo De Santi Gaudenzio Meneghesso Enrico Zanoni Christian Huber Matteo Meneghini paolo pavan Department of Engineering“Enzo Ferrari” University of Modena and Reggio EmiliaModena 41125Italy Department of Information Engineering University of PadovaPadova 35131Italy Department of Sciences and Methods for Engineering(DISMI) University of Modena and Reggio EmiliaReggio Emilia 42122Italy EN&TECH Center University of Modena and Reggio EmiliaReggio Emilia 42122Italy Advanced Technologies and Micro Systems Department Robert Bosch GmbHRenningen 71272Germany

Vertical GaN power MOSFET is a novel technology that offers great potential for power switching *** still in an early development phase,vertical GaN devices are yet to be fully optimized and require careful studies to foster their *** this work,we report on the physical insights into device performance improvements obtained during the development of vertical GaN-on-Si trench MOSFETs(TMOS’s)provided by TCAD simulations,enhancing the dependability of the adopted process optimization ***,two different TMOS devices are compared in terms of transfer-curve hysteresis(H)and subthreshold slope(SS),showing a≈75%H reduction along with a≈30%SS *** allow attributing the achieved improvements to a decrease in the border and interface traps,respectively.A sensitivity analysis is also carried out,allowing to quantify the additional trap density reduction required to minimize both figures of merit.

关键词： vertical GaN trench MOSFET SiO_(2) interface traps border traps hysteresis BTI

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I COLEOTTERI DITISCIDI DELLA PROVINCIA DI BRESCIA

引用

Natural Disaster Reduction in China 1978年第1期 169-180页

作者： paolo MAZZOLDI Istitutodi Entomologia dell’Università di Pavia direttore Prof.Mario pavan:Centro Studi Naturalistici Bresciani.

L’*** un certo numero di Ditiscidi la cui presenza in provincia diBrescia è documentata,utilizzando sia ì dati reperibili in letteratura,siai risultati diricerchc che I’*** ha condotto in vari ambienti della provincia tra il 1974 e il *** ogni specie vengono fornite le Iocalità di cattura e alcune notizie di carattere ***-The *** a number of Dytiscidae whose presence in the province ofBrescia has been ascertained,using both the data found in the scientific literature and theresults of researches which the *** has carried out in various environments of theprovince in the years 1971 and *** each species the localities of capture and someecological information are given.

关键词： IX Pi 110 I COLEOTTERI DITISCIDI DELLA PROVINCIA DI BRESCIA La FR

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