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A one-step,tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces

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Microsystems & Nanoengineering 2022年第4期8卷 221-231页

作者： Joel Y.Y.Loh Ali Zeineddine moein shayegannia Robyn McNeil Liam McRae Nazir P.Kherani Department of Electrical and Computing Engineering University of TorontoTorontoON M5S 3G4Canada Department of Material Science and Engineering University of TorontoTorontoON M5S 3E4Canada

The wrinkle period and morphology of a metal thin film on an elastic substrate is typically controlled by modifying the substrate before carrying out additional metal deposition ***,we show that a simultaneously selective and reactive sputtering plasma that modifies the surface of a polydimethylsiloxane(PDMS)substrate while not reacting with the metal during the deposition process decreases the wrinkle wavelength and induces additional wrinkling components and features such as ripples or *** selective reaction of the nitrogen plasma with PDMS functionalizes the siloxane surface into silicon *** hardens the immediate surface of PDMS,with a quadratic increase in the Young’s modulus as a function of the sputtering flow *** increase in the critical strain mismatch and the corresponding presence of folds in the nitrogen-modified wrinkled silver film form a suitable plasmonic platform for surface-enhanced Raman spectroscopy(SERS),yielding an enhancement factor of 4.8×105 for detecting *** enhancement is linked to the emergence of electromagnetic hotspots from surface plasmon polariton coupling between the folds/wrinkles,which in turn enables the detection of low concentrations of organics using ***,when strained,the nitrogen-modified wrinkles enhance electrical conductivity by a factor of 12 compared with unmodified ***,the optical properties of the substrate can be tuned by altering the N2 *** simple addition of nonreactive nitrogen to silver sputtering enables simultaneous PDMS hardening and growth of the silver film and together provide a new avenue for tuning wrinkling parameters and enhancing the electrical conductivity of pliable surfaces.

关键词： silver reactive film

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Tunable rainbow light trapping in ultrathin resonator arrays

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Light(Science & Applications) 2020年第1期9卷 113-121页

作者： Katelyn Dixon Arthur O.Montazeri moein shayegannia Edward S.Barnard Stefano Cabrini Naomi Matsuura Hoi-Ying Holman Nazir P.Kherani Department of Electrical&Computer Engineering University of TorontoTorontoOntario M5S 3G4Canada Lawrence Berkeley National Laboratory 1 Cyclotron Rd.BerkeleyCA 94720USA Department of Materials Science&Engineering University of TorontoTorontoOntario M5S 3G4Canada

Rainbow light trapping in plasmonic devices allows for field enhancement of multiple wavelengths within a single ***,many of these devices lack precise control over spatial and spectral enhancement profiles and cannot provide extremely high localised field *** we present a versatile,analytical design paradigm for rainbow trapping in nanogroove arrays by utilising both the groove-width and groove-length as tuning *** couple this design technique with fabrication through multilayer thin-film deposition and focused ion beam milling,which enables the realisation of unprecedented feature sizes down to 5 nm and corresponding extreme normalised local field enhancements up to *** demonstrate rainbow trapping within the devices through hyperspectral microscopy and show agreement between the experimental results and *** combination of expeditious design and precise fabrication underpins the implementation of these nanogroove arrays for manifold applications in sensing and nanoscale optics.

关键词： rainbow trapping arrays

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