A one-step,tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces

作     者：Joel Y.Y.Loh Ali Zeineddine Moein Shayegannia Robyn McNeil Liam McRae Nazir P.Kherani Joel Y.Y.Loh;Ali Zeineddine;Moein Shayegannia;Robyn McNeil;Liam McRae;Nazir P.Kherani

作者机构：Department of Electrical and Computing EngineeringUniversity of TorontoTorontoON M5S 3G4Canada Department of Material Science and EngineeringUniversity of TorontoTorontoON M5S 3E4Canada 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2022年第8卷第4期

页      面：221-231页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：CMC Microsystems, CMC Ontario Research Foundation, ORF Natural Sciences and Engineering Research Council of Canada, NSERC University of Toronto, U of T 

主　　题：silver reactive film 

摘      要：The wrinkle period and morphology of a metal thin film on an elastic substrate is typically controlled by modifying the substrate before carrying out additional metal deposition ***,we show that a simultaneously selective and reactive sputtering plasma that modifies the surface of a polydimethylsiloxane(PDMS)substrate while not reacting with the metal during the deposition process decreases the wrinkle wavelength and induces additional wrinkling components and features such as ripples or *** selective reaction of the nitrogen plasma with PDMS functionalizes the siloxane surface into silicon *** hardens the immediate surface of PDMS,with a quadratic increase in the Young’s modulus as a function of the sputtering flow *** increase in the critical strain mismatch and the corresponding presence of folds in the nitrogen-modified wrinkled silver film form a suitable plasmonic platform for surface-enhanced Raman spectroscopy(SERS),yielding an enhancement factor of 4.8×105 for detecting *** enhancement is linked to the emergence of electromagnetic hotspots from surface plasmon polariton coupling between the folds/wrinkles,which in turn enables the detection of low concentrations of organics using ***,when strained,the nitrogen-modified wrinkles enhance electrical conductivity by a factor of 12 compared with unmodified ***,the optical properties of the substrate can be tuned by altering the N2 *** simple addition of nonreactive nitrogen to silver sputtering enables simultaneous PDMS hardening and growth of the silver film and together provide a new avenue for tuning wrinkling parameters and enhancing the electrical conductivity of pliable surfaces.