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Hybrid 2D–3D optical devices for integrated optics by direct laser writing

Light(Science & Applications) 2014年第1期3卷 173-181页

作者： martin Schumann Tiemo Buckmann Nico Gruhler martin wegener Wolfram Pernice Institute of Applied Physics and DFG-Center for Functional Nanostructures(CFN) Karlsruhe Institute of Technology(KIT)76131 KarlsruheGermany Institute of Nanotechnology(INT) 76344 Eggenstein-LeopoldshafenGermany

Integrated optical chips have already been established for application in optical *** also offer interesting future perspectives for integrated quantum optics on a *** present,however,they are mostly fabricated using essentially planar fabrication approaches like electron-beam lithography or UV optical *** further design options would arise if one had complete fabrication freedom in regard to the third dimension normal to the chip without having to give up the virtues and the know-how of existing planar fabrication *** a step in this direction,we here use three-dimensional dip-in direct-laser-writing optical lithography to fabricate three-dimensional polymeric functional devices on pre-fabricated planar optical chips containing Si3N4 waveguides as well as grating couplers made by standard electron-beam *** first example is a polymeric dielectric rectangular-shaped waveguide which is connected to Si3N4 waveguides and that is adiabatically twisted along its axis to achieve geometrical rotation of linear polarization on the *** rotator’s broadband performance at around 1550 nm wavelength is verified by polarization-dependent grating *** polarization rotation on the optical chip cannot easily be achieved by other *** second example is a whispering-gallery-mode optical resonator connected to Si_(3)N_(4) waveguides on the chip via polymeric *** mechanically connecting the latter to the disk,we can control the coupling to the resonator and,at the same time,guarantee mechanical stability of the three-dimensional architecture on the chip.

关键词： direct laser writing integrated optics nanophotonic circuits polarization conversion

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A shoe-box-sized 3D laser nanoprinter based on two-step absorption

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Light(Advanced Manufacturing) 2024年第2期5卷 115-122页

作者： Tobias Messer Michael Hippe Jingya(Lilyn)Gao martin wegener Institute of Applied Physics(APH) Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Institute of Nanotechnology(INT) Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany

State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive ***,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 ***,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe *** shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a *** present a gallery of example 3D structures printed with this *** achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/***,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems.

关键词： Two-step absorption Direct laser writing 3D laser nanoprinters Micro-electro-mechanical-systems scanner 3D nanostructures

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具有类roton色散关系的立方对称声学超材料

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Acta Mechanica Sinica 2023年第7期39卷 28-34页

作者：王珂陈毅 Muamer Kadic 王长国 martin wegener National Key Laboratory of Science and Technology on Advanced Composites in Special Environments Harbin Institute of TechnologyHarbin150001China Institute of Applied Physics Karlsruhe Institute of Technology(KIT)Karlsruhe76128Germany Institute of Nanotechnology Karlsruhe Institute of Technology(KIT)Karlsruhe76128Germany Institut FEMTO-ST UMR 6174CNRSUniversitéde Franche-ComtéBesançon25030France

我们之前的工作表明,声学超材料中的非局部相互作用会导致极不寻常的类roton色散关系,即色散曲线存在局部极小值,与超流体液氦-4类似.然而,这种行为仅限于一个或两个声传播方向.在这里,我们设计了一种三维立方对称声学超材料,沿三个正... 详细信息

我们之前的工作表明,声学超材料中的非局部相互作用会导致极不寻常的类roton色散关系,即色散曲线存在局部极小值,与超流体液氦-4类似.然而,这种行为仅限于一个或两个声传播方向.在这里,我们设计了一种三维立方对称声学超材料,沿三个正交方向具有非局部相互作用.有限元计算表明超材料在三个正交方向具有类roton行为,但其行为远非各向同性.有限元结果与半解析模型结果吻合良好.相应的实验正在探索中,由于需要密集而复杂的三维声学管道,实验要求较高.

关键词：色散关系色散曲线超材料半解析模型非各向同性超流体传播方向正交方向

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Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography

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Light(Advanced Manufacturing) 2022年第3期3卷 219-233页

作者： Roman Zvagelsky Frederik Mayer Dominik Beutel Carsten Rockstuhl Guillaume Gomard martin wegener Institute of Applied Physics(APH) Karlsruhe Institute of Technology(KIT)76131 KarlsruheGermany Institute of Theoretical Solid State Physics(TFP) Karlsruhe Institute of Technology(KIT)76131 KarlsruheGermany Institute of Nanotechnology(INT) Karlsruhe Institute of Technology(KIT)76344 Eggenstein-LeopoldshafenGermany Carl Zeiss AG Zeiss Innovation HubHermann-von-Helmholtz-Platz 676344 Eggenstein-LeopoldshafenGermany

In recent years,multi-photon 3D laser printing has become a widely used tool for the fabrication of micro-and nanostructures for a large variety of ***,thorough sample characterisation is key for an efficient optimisation of the printing *** date,three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures,that is,using ex-situ *** contrast,in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed *** these lines,we present and characterise a Fourier-domain optical coherence tomography(FD-OCT)system that can be readily integrated into an existing 3D laser lithography *** demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid *** such samples,local reflectivity arises from the(refractive-index)contrasts between the polymerised and non-polymerised ***,the refractive index of the printed material can be ***,we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after *** by transfer-matrix calculations,we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer ***,we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.

关键词： Multi-photon 3D laser printing Optical coherence tomography In-situ diagnostics

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Multi-material multi-photon 3D laser microand nanoprinting

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Light(Advanced Manufacturing) 2021年第3期2卷 14-30页

作者： Liang Yang Frederik Mayer Uwe H.F.Bunz Eva Blasco martin wegener Institute of Nanotechnology Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Institute of Applied Physics Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Institut für Organische Chemie Ruprecht-Karls-Universität HeidelbergIm Neuenheimer Feld 27069120 HeidelbergGermany Centre for Advanced Materials(CAM) Ruprecht-Karls-Universität HeidelbergIm Neuenheimer Feld 225 and 27069120 HeidelbergGermany

Three-dimensional(3D)laser micro-and nanoprinting based upon multi-photon absorption has made its way from early scientific discovery to industrial manufacturing processes,e.g.,for advanced microoptical ***,so far,most realized 3D architectures are composed of only a single polymeric ***,we review 3D printing of multi-materials on the nano-and *** start with material properties that have been realized,using multi-photon *** materials include bulk polymers,conductive polymers,metals,nanoporous polymers,silica glass,chalcogenide glasses,inorganic single crystals,natural polymers,stimuliresponsive materials,and polymer ***,we review manual and automated processes achieving dissimilar material properties in a single 3D structure by sequentially photo-exposing multiple photoresists as 3D analogs of 2D multicolor *** examples from biology,optics,mechanics,and electronics are *** emerging approach–without counterpart in 2D graphical printing–prints 3D structures combining dissimilar material properties in one 3D structure by using only a single photoresist.A controlled stimulus applied during the 3D printing process defines and determines material properties on the voxel *** of laser power and/or wavelength,or application of quasi-static electric fields allow for the seamless manipulation of desired materials properties.

关键词： properties sequentially struc

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A multi-photon(7×7)-focus 3D laser printer based on a 3D-printed diffractive optical element and a 3D-printed multi-lens array

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Light(Advanced Manufacturing) 2024年第1期5卷 26-39页

作者： Pascal Kiefer Vincent Hahn Sebastian Kalt Qing Sun Yolita M.Eggeler martin wegener DMM2O-Cluster of Excellence Karlsruhe Institute of Technology(KIT)and Heidelberg University76128 KarlsruheGermany Institute of Applied Physics(APH) Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Institute of Nanotechnology(INT) Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Laboratory for Electron Microscopy(LEM) Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany

One of the challenges in the field of multi-photon 3D laser printing lies in further increasing the print speed in terms of voxels/***,we present a setup based on a 7×7 focus array(rather than 3×3 in our previous work)and using a focus velocity of about 1 m/s(rather than 0.5 m/s in our previous work)at the diffraction limit(40×/NA1.4 microscope objective lens).Combined,this advance leads to a ten times increased print speed of about 108 voxels/*** demonstrate polymer printing of a chiral metamaterial containing more than 1.7×10^(12) voxels as well as millions of printed microparticles for potential pharmaceutical *** critical high-quality micro-optical components of the setup,namely a diffractive optical element generating the 7×7 beamlets and a 7×7 lens array,are manufactured by using a commercial two-photon grayscale 3D laser printer.

关键词： 3D laser printing Direct laser writing Multi-photon absorption Multi-focus optics Diffractive optical element Lens array

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Wuhan Optoelectronics Forum 72： Transformation physics： from fundamentals to applications

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Frontiers of Optoelectronics 2014年第1期7卷 116-116页

作者： martin wegener Karlsruhe Institute of Technology Germany

Transformation optics allows for mapping the geometry of space onto spatially inhomogeneous optical properties of metamaterials. Invisibility cloaks are a demanding benchmark example because they were believed impossible just a few years ago. For the fabrication of visible-frequency, broadband, polarization-independent, three-dimensional invisibility cloaks for the amplitude and phase of light, we use direct-laser-writing （DLW） optical lithography combined with stimulated-emission depletion （STED）, which breaks Abbe＇s diffraction limit. The transformation idea can also be translated to other areas such as mechanics （precisely, elastodynamics） and thermodynamics. Corresponding experiments will be discussed, too

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变换物理学——原理与应用

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光学与光电技术 2015年第1期13卷 1-4页

作者： martin wegener 卡尔斯鲁厄理工学院应用物理系

变换光学(Transformation Optics)可以使几何空间上的变化转移到非均匀光学超材料的光学参量的变化上。光学隐身就是其中典型的例子,就在几年前人们还认为这是不可能的。为了制备光频段、宽带、偏振不敏感、三维的光强、相位隐身材料,... 详细信息

变换光学(Transformation Optics)可以使几何空间上的变化转移到非均匀光学超材料的光学参量的变化上。光学隐身就是其中典型的例子,就在几年前人们还认为这是不可能的。为了制备光频段、宽带、偏振不敏感、三维的光强、相位隐身材料,利用激光直写结合受激辐射耗尽技术,可以突破传统的衍射极限。这种变换的思想同样可以应用到其他领域,如力学(确切地说,弹性动力学)和热力学。还讨论了相关的实验过程和研究结果。

关键词：超材料负折射率变换光学变换物理学

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定制材料

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科技纵览 2014年第2期 32-38页

作者： Joachim Fischer Michael Thiel martin wegener

一个多世纪以来，几乎所有的技术进步都依赖于我们制作和操控大自然赋予的海量材料的能力。这种依赖到处可见。在电子领域尤为明显。利用种类繁多的半导体、聚合物和金属，我们已能够创造出令人目不暇接的各类电路，这些电路几乎支撑着... 详细信息

一个多世纪以来，几乎所有的技术进步都依赖于我们制作和操控大自然赋予的海量材料的能力。这种依赖到处可见。在电子领域尤为明显。利用种类繁多的半导体、聚合物和金属，我们已能够创造出令人目不暇接的各类电路，这些电路几乎支撑着现代生活的方方面面。

关键词：材料定制技术进步电子领域现代生活大自然半导体聚合物

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Epitope mapping on wegener's granulomatosis autoantigen proteinase 3

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Chinese Medical Journal 2001年第7期114卷 88-91,110-111页

作者：黄真 martin Lockwood 北京大学第一医院物理医学康复科北京100034 Department of Medicine University of CambridgeSchool of Clinical MedicineAddenbrooke’s Hospital

Abstract:Objective To map the epitopes on wegener's granulomatosis autoantigen proteinase *** Antigenicity of proteinase 3 was studied with Western blot analysis in which proteinase 3 was prepared under reducing and non-reducing conditions. Two anti-proteinase 3 monoclonal antibodies, HZ1F12 and HZ1H3, were used to inhibit each other and to inhibit 22 anti-proteinase 3 positive sera from patients with wegener's granulomatosis in competitive inhibition enzyme-linked immunosorbent assays (ELISA) and Western blot analysis. Results All monoclonal antibodies and patient sera recognized proteinase 3 under non-reducing conditions in Western blot analysis. HZ1F12 was inhibited 74% by HZ1H3. 10/22 (46%) sera were completely or partially inhibited by HZ1F12; 9/22 (41%) sera were partially inhibited by HZ1H3; and 6/22 (27%) were inhibited by both monoclonal antibodies. In inhibition Western blot analysis, the binding of patient sera to proteinase 3 could be inhibited by HZ1F12. Conclusions The epitopes of wegener's granulomatosis autoantigen were conformational. Anti-proteinase 3 monoclonal HZ1F12 and HZ1H3 recognized similar or overlapping epitopes on the proteinase 3 molecule. Epitopes of proteinase 3 recognized by anti-proteinase 3 positive sera were not restricted.

关键词： vasculitis · wegener's granulomatosis · proteinase 3 · anti neutrophil cytoplasmic autoantibodies · epitope

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