A shoe-box-sized 3D laser nanoprinter based on two-step absorption
作者机构：Institute of Applied Physics(APH)Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany Institute of Nanotechnology(INT)Karlsruhe Institute of Technology(KIT)76128 KarlsruheGermany
出 版 物：《Light(Advanced Manufacturing)》 (光（先进制造）（英文）)
年 卷 期：2024年第5卷第2期
页 面：115-122页
学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程]
基 金：We thank Vincent Hahn,Michael Thiel(Nanoscribe),and Matthias Blaicher(Nanoscribe)for discussions.We acknowledge funding by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy for the Excellence Cluster“3D Matter Made to Order”(2082/1-390761711) by the Carl Zeiss Foundation,by the Helmholtz program“Science and Technology of Nanosystems”,by the Karlsruhe School of Optics and Photonics(KSOP),by the Max Planck School of Photonics(MPSP) by Nanoscribe-A BICO company
主 题：Two-step absorption Direct laser writing 3D laser nanoprinters Micro-electro-mechanical-systems scanner 3D nanostructures
摘 要：State-of-the-art commercially available 3D laser micro-and nanoprinters using polymeric photoresists based on two-or multi-photon absorption rely on high-power pico-or femtosecond lasers,leading to fairly large and expensive ***,we have introduced photoresists based on two-step absorption instead of two-photon absorption,allowing for the use of small and inexpensive continuous-wave 405 nm wavelength GaN semiconductor laser diodes with light-output powers below 1 ***,using the identical photoresist system and similar laser diodes,we report on the design,construction,and characterization of a 3D laser nanoprinter that fits into a shoe *** shoe box contains all optical components,namely the mounted laser,the collimation-and beam-shaping optics,a miniature MEMS xy-scanner,a tube lens,the focusing microscope objective lens(NA=1.4,100×magnification),a piezo slip-stick z-stage,the sample holder,a camera monitoring system,LED sample illumination,as well as the miniaturized control electronics employing a *** present a gallery of example 3D structures printed with this *** achieve about 100 nm lateral spatial resolution and focus scan speeds of about 1 mm/***,our shoe-box-sized system can be made orders of magnitude less expensive than today’s commercial systems.
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