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Exploring new avenues in high repetition rate table-top coherent extreme ultraviolet sources

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Light(Science & Applications) 2015年第1期4卷 231-236页

作者： Steffen Hadrich Manuel Krebs Armin Hoffmann Arno Klenke Jan rothhardt Jens Limpert Andreas Tunnermann Friedrich-Schiller-Universitat Jena Institute of Applied PhysicsAbbe Center of PhotonicsAlbert-Einstein-Straße 1507745 JenaGermany Helmholtz-Institute Jena Frobelstieg 307743 JenaGermany Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Straße 707745 JenaGermany

The process of high harmonic generation(HHG)enables the development of table-top sources of coherent extreme ultraviolet(XUV)*** these are now matured sources,they still mostly rely on bulk laser technology that limits the attainable repetition rate to the low kilohertz ***,many of the emerging applications of such light sources(e.g.,photoelectron spectroscopy and microscopy,coherent diffractive imaging,or frequency metrology in the XUV spectral region)require an increase in the repetition ***,these sources are operated with a multi-MHz repetition rate and deliver a high photon flux *** far,this regime has been solely addressed using passive enhancement cavities together with low energy and high repetition rate ***,a novel route with significantly reduced complexity(omitting the requirement of an external actively stabilized resonator)is demonstrated that achieves the previously mentioned demanding parameters.A krypton-filled Kagome photonic crystal fiber is used for efficient nonlinear compression of 9 μJ,250 fs pulses leading to,7 μJ,31 fs pulses at 10.7 MHz repetition *** compressed pulses are used for HHG in a gas *** attention is devoted to achieving phase-matched(transiently)generation yielding.10^(13) photons s^(-1)(.50 μW)at 27.7 *** new spatially coherent XUV source improved the photon flux by four orders of magnitude for direct multi-MHZ experiments,thus demonstrating the considerable potential of this source.

关键词： coherent extreme ultraviolet sources high average power high harmonic generation nonlinear compression ultrafast laser

Material-specific high-resolution table-top extreme ultraviolet microscopy

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Light(Science & Applications) 2022年第5期11卷 991-1000页

作者： Wilhelm Eschen Lars Loetgering Vittoria Schuster Robert Klas Alexander Kirsche Lutz Berthold Michael Steinert Thomas Pertsch Herbert Gross Michael Krause Jens Limpert Jan rothhardt Institute of Applied Physics Abbe Center of PhotonicsFriedrich-SchillerUniversität JenaAlbert-Einstein-Str.1507745 JenaGermany HelmholtzInstitute Jena Fröbelstieg 307743 JenaGermany Leibniz Institute of Photonic Technology Albert-Einstein-Straße 907745 JenaGermany Fraunhofer Institute for Microstructure of Materials and Systems IMWS WalterHülse-Str.106120 HalleGermany Fraunhofer Institute for Applied Optics and Precision Engineering IOF Albert-Einstein-Str.707745 JenaGermany

Microscopy with extreme ultraviolet(EUV)radiation holds promise for high-resolution imaging with excellent material contrast,due to the short wavelength and numerous element-specific absorption edges available in this spectral *** the same time,EUV radiation has significantly larger penetration depths than *** thus enables a nano-scale view into complex three-dimensional structures that are important for material science,semiconductor metrology,and next-generation ***,we present high-resolution and material-specific microscopy at 13.5 nm *** combine a highly stable,high photon-flux,table-top EUV source with an interferometrically stabilized ptychography *** utilizing structured EUV illumination,we overcome the limitations of conventional EUV focusing optics and demonstrate high-resolution microscopy at a half-pitch lateral resolution of 16 ***,we propose mixed-state orthogonal probe relaxation ptychography,enabling robust phase-contrast imaging over wide fields of view and long acquisition *** this way,the complex transmission of an integrated circuit is precisely reconstructed,allowing for the classification of the material composition of mesoscopic semiconductor systems.

关键词： resolution ultraviolet extreme

Micro-Structured Fiber Interferometer as Sensitive Temperature Sensor

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Photonic Sensors 2013年第3期3卷 208-213页

作者： F. C. FAVERO M. BECKER, R. SPITTEL M. rothhardt J. KOBELKE H. BARTELT Institute of Photonic Technology (IPHT) Albert-Einstein-Strafle-9 07745 Jena Germany

We report on a fast and sensitive temperature sensor using a micro-structured or photonic crystal fiber interferometer with a high germanium doped fiber core. The wavelength sensitivity for temperature variation was as high as △λ/△T= 78 pm/℃ up to 500℃, which was 6 times more sensitive than the fiber Bragg grating temperature sensitivity of △λ/△TT= 13pm/℃ at 1550nm. The sensor device was investigated conceming the sensitivity characteristics and response time.

关键词： Micro-structured optical fiber fiber interferometer fiber temperature sensor

Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source

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PhotoniX 2021年第1期2卷 439-446页

作者： Robert Klas Alexander Kirsche Martin Gebhardt Joachim Buldt Henning Stark Steffen Hädrich Jan rothhardt Jens Limpert Institute of Applied Physics Abbe Center of PhotonicsFriedrich-Schiller-University JenaAlbert-Einstein-Str.1507745 JenaGermany Helmholtz-Institute Jena Fröbelstieg 307743 JenaGermany Active Fiber Systems GmbH Ernst-Ruska-Ring 1707745 JenaGermany. Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Str.707745 JenaGermany.

High harmonic generation(HHG)enables coherent extreme-ultraviolet(XUV)radiation with ultra-short pulse duration in a table-top *** has already enabled a plethora of *** all of these applications would benefit from a high photon flux to increase the signal-to-noise ratio and decrease measurement *** addition,shortest pulses are desired to investigate fastest dynamics in fields as diverse as physics,biology,chemistry and material *** this work,the up-to-date most powerful table-top XUV source with 12.9±3.9mW in a single harmonic line at 26.5 eV is demonstrated via HHG of a frequency-doubled and post-compressed fibre *** the same time the spectrum supports a Fourier-limited pulse duration of sub-6 fs in the XUV,which allows accessing ultrafast dynamics with an order of magnitude higher photon flux than previously *** concept will greatly advance and facilitate applications of XUV radiation in science and technology and enable photonhungry ultrafast studies.

关键词： ultraviolet extreme coherent

Bright,high-repetition-rate water window soft X-ray source enabled by nonlinear pulse self-compression in an antiresonant hollow-core fibre

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Light(Science & Applications) 2021年第3期10卷 313-319页

作者： M.Gebhardt T.Heuermann R.Klas C.Liu A.Kirsche M.Lenski Z.Wang C.Gaida J.E.Antonio-Lopez A.Schülzgen R.Amezcua-Correa J.rothhardt J.Limpert Institute of Applied Physics Abbe Center of PhotonicsFriedrich-Schiller-Universitat JenaAlbert-Einstein-Str.1507745 JenaGermany Helmholtz-Institute Jena Frobelstieg 307743 JenaGermany CREOL College of Optics and PhotonicsUniversity of Central FloridaOrlandoFL 32816USA Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Str.707745 JenaGermany Active Fiber Systems GmbH Ernst-Ruska-Ring 1707745 JenaGermany

Bright,coherent soft X-ray radiation is essential to a variety of applications in fundamental research and life *** date,a high photon flux in this spectral region can only be delivered by synchrotrons,free-electron lasers or high-order harmonic generation sources,which are driven by kHz-class repetition rate lasers with very high peak ***,we establish a novel route toward powerful and easy-to-use SXR sources by presenting a compact experimentin which nonlinear pulse self-compression to the few-cycle regime is combined with phase-matched high-orderharmonic generation in a single,helium-illed antiresonant hollow-core *** enables the first 100 kHz-classrepetition rate,table-top soft X-ray source that delivers an application-relevant flux of 2.8×10^6 photon s^-1 eV^-1 around 300 *** fibre integration of temporal pulse self-compression(leading to the formation of the necessarystrong-field waveforms)and pressure-controlled phase matching will allow compact,high-repetition-rate lasertechnology,including commercially available systems,to drive simple and cost-effective,coherent high-flux softX-ray sources.

关键词： pulse repetition fibre

Visualizing the ultra-structure of microorganisms using table-top extreme ultraviolet imaging

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PhotoniX 2023年第1期4卷 605-619页

作者： Chang Liu Wilhelm Eschen Lars Loetgering Daniel S.Penagos Molina Robert Klas Alexander Iliou Michael Steinert Sebastian Herkersdorf Alexander Kirsche Thomas Pertsch Falk Hillmann Jens Limpert Jan rothhardt Institute of Applied Physics Abbe Center of PhotonicsFriedrich-Schiller-University JenaAlbert-Einstein-Straße 1507745 JenaGermany Helmholtz-Institute Jena Fröbelstieg 307743 JenaGermany GSI Helmholtzzentrum für Schwerionenforschung Planckstraße 164291 DarmstadtGermany Present address:Carl Zeiss AG Carl-Zeiss-Promenade 1007745 JenaGermany Leibniz Institute for Natural Product Research and Infection Biology Hans Knöll Institute(Leibniz-HKI)Adolf-Reichwein-Str.2307745 JenaGermany Department of Pharmaceutical Microbiology Hans Knöll Institute(HKI)Friedrich-Schiller-University JenaWinzerlaer Straße 207745 JenaGermany Fraunhofer Institute for Applied Optics and Precision Engineering Albert-Einstein-Str.707745 JenaGermany Present address:Biochemistry/Biotechnology Faculty of EngineeringHochschule Wismar University of Applied Sciences TechnologyBusiness and DesignPhilipp-Müller-Str.1423966 WismarGermany

Table-top extreme ultraviolet(EUV)microscopy offers unique opportunities for label-free investigation of biological ***,we demonstrate ptychographic EUV imaging of two dried,unstained model specimens:germlings of a fungus(Aspergillus nidulans),and bacteria(Escherichia coli)cells at 13.5 nm *** find that the EUV spectral region,which to date has not received much attention for biological imaging,offers sufficient penetration depths for the identification of intracellular *** implementing a position-correlated ptychography approach,we demonstrate a millimeter-squared field of view enabled by infrared illumination combined with sub-60 nm spatial resolution achieved with EUV illumination on selected regions of *** strong element contrast at 13.5 nm wavelength enables the identification of the nanoscale material composition inside the *** work will advance and facilitate EUV imaging applications and enable further possibilities in life science.

关键词： EUV Ptychography Microorganism HHG