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Scratch formation and its mechanism in chemical mechanical planarization (CMP)

Friction 2013年第4期1卷 279-305页

作者： Tae-Young KWON manivannan ramachandran Jin-Goo PARK Department of Materials Engineering Hanyang UniversityAnsan 426-791Korea

Chemical mechanical planarization(CMP)has become one of the most critical processes in semiconductor device fabrication to achieve global *** achieve an efficient global planarization for device node dimensions of less than 32 nm,a comprehensive understanding of the physical,chemical,and tribo-mechanical/chemical action at the interface between the pad and wafer in the presence of a slurry medium is *** the CMP process,some issues such as film delamination,scratching,dishing,erosion,and corrosion can generate defects which can adversely affect the yield and *** this article,an overview of material removal mechanism of CMP process,investigation of the scratch formation behavior based on polishing process conditions and consumables,scratch formation mechanism and the scratch inspection tools were extensively *** advantages of adopting the filtration unit and the jet spraying of water to reduce the scratch formation have been *** current research trends in the scratch formation,based on modeling perspective were also discussed.

关键词： Chemical mechanical planarization(CMP) defects,scratch post-CMP cleaning defect source

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A Novel Approach for Groundwater Budgeting Using GIS in a Part of Pondicherry Region, India

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Journal of Water Resource and Protection 2010年第6期2卷 585-591页

作者： Sivaraman Pethaperumal Sabarathinam Chidambaram Kandasamy Vijayaragavan Mohan Viswanathan Prasanna Kannan Anandavel Ulaganathan Karmegam ramachandran manivannan Paluchamy Anandhan Kesari Tirumalesh 不详

The over extraction of groundwater from the coastal aquifers, result in reduction of groundwater resource and lowering of water level. In general, the depletion of groundwater level enhances the landward migration of saltwater wedge. Pondicherry is one such region with recent alluvium as the major formation. Since the study area forms a part of the coastal aquifer system this behaves as a fragile ecosystem. The present study has been attempted to calculate the extraction of water and to estimate the amount of recharge into this alluvial aquifer by using groundwater level variations. The monthly water level fluctuation was observed during the study period (2000-2002) in eighteen locations. The maximum rise in groundwater level observed during 2000 was considered as the initial water level for the study and the subsequent decline in water level (draw down) was monitored monthly until the rising trend was noted. This indicates the fall in water level due to extraction. Later keeping the deepest draw down as the initial value increasing water level trend was studied until there was a notice of decline in groundwater level. This indicates as the rise in water level due to recharge. This method of observation carried out at a single location was adopted for all eighteen locations. The spatial representation of these data for eighteen locations were carried out by using GIS and the area occupied by different groundwater level contours were calculated and the amount of water withdrawn/re- charged was estimated. The maximum recharge was noted in the central and the northern part of the study area when compared to the other regions. Similarly, the maximum discharge was noted in the northern and the southern part of the study area during the study period.

关键词： Water Level Recharge Groundwater Budget GIS

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