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Laser additive manufacturing of Si/ZrO_(2)tunable crystalline phase 3D nanostructures

Opto-Electronic Advances 2022年第5期5卷 22-32页

作者： Greta Merkininkaitė Edvinas Aleksandravičius mangirdas malinauskas Darius Gailevičius SimasŠakirzanovas Faculty of Chemistry and Geosciences Vilnius UniversityNaugarduko Str.24Vilnius LT-03225Lithuania Femtika Sauletekio Ave.15Vilnius LT-10224Lithuania Laser Research Center Physics FacultyVilnius UniversitySauletekio Ave.10Vilnius LT-10223Lithuania Department of Chemical Engineering and Technology Center for Physical Sciences and TechnologySauletekio Ave.3Vilnius LT-10257Lithuania

The current study is directed to the rapidly developing field of inorganic material 3D object production at nano-/micro *** fabrication method includes laser lithography of hybrid organic-inorganic materials with subsequent heat treatment leading to a variety of crystalline phases in 3D *** this work,it was examined a series of organometallic polymer precursors with different silicon(Si)and zirconium(Zr)molar ratios,ranging from 9:1 to 5:5,prepared via sol-gel *** mixtures were examined for perspective to be used in 3D laser manufacturing by fabricating nano-and micro-feature sized *** spatial downscaling and surface morphology were evaluated depending on chemical composition and crystallographic *** appearance of a crystalline phase was proven using single-crystal X-ray diffraction analysis,which revealed a lower crystallization temperature for microstructures compared to bulk *** 3D objects retained a complex geometry without any distortion after heat treatment up to 1400℃.Under the proper conditions,a wide variety of crystalline phases as well as zircon(ZrSiO_(4)-a highly stable material)can be *** addition,the highest new record of achieved resolution below 60 nm has been *** proposed preparation protocol can be used to manufacture micro/nano-devices with high precision and resistance to high temperature and aggressive environment.

关键词： 3D nanostructures additive manufacturing crystalline phases laser lithography 3D printing high resilience inorganic materials SZ2080^(TM)

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Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator

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Journal of Central South University 2022年第10期29卷 3270-3276页

作者： Antanas BUTKUS Edvinas SKLIUTAS Darius GAILEVIČIUS mangirdas malinauskas Laser Research Center Faculty of PhysicsVilnius UniversityVilnius LT-10223Lithuania

Here we report a femtosecond laser direct writing(a precise 3D printing also known as two-photon polymerization lithography) of hybrid organic-inorganic SZ2080^(TM)pre-polymer without using any photo-initiator and applying ~100 fs oscillator operating at 517 nm wavelength and 76 MHz repetition rate. The proof of concept was experimentally demonstrated and benchmarking 3D woodpile nanostructures, micro-scaffolds, free-form micro-object “Benchy” and bulk micro-cubes are successfully produced. The essential novelty underlies the fact that non-amplified laser systems delivering just 40-500 p J individual pulses are sufficient for inducing localized cross-linking reactions within hundreds of nanometers in cross sections. And it is opposed to the prejudice that higher pulse energies and lower repetition rates of amplified lasers are necessary for structuring non-photosensitized polymers. The experimental work is of high importance for fundamental understanding of laser enabled nanoscale 3D additive manufacturing and widens technology’ s field of applications where the avoidance of photo-initiator is preferable or is even a necessity, such as micro-optics, nano-photonics, and biomedicine.

关键词： laser direct writing two-photon polymerization multi-photon lithography 3D printing additive manufacturing SZ2080TM microstructures nanotechnology

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Ultrafast laser processing of materials: from science to industry

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Light(Science & Applications) 2016年第1期5卷 548-561页

作者： mangirdas malinauskas Albertas Žukauskas Satoshi Hasegawa Yoshio Hayasaki Vygantas Mizeikis Ričardas Buividas Saulius Juodkazis Laser Research Centre Department of Quantum ElectronicsPhysics FacultyVilnius UniversitySaulėtekio Ave.10LT-10223 VilniusLithuania Center for Optical Research and Education(CORE) Utsunomiya University7-1-2 YotoUtsunomiya 321-8585Japan Research Institute of Electronics Shizuoka University3-5-3-1 JohokuNaka-kuHamamatsu 432-8561Japan Centre for Micro-Photonics Faculty of ScienceEngineering and TechnologySwinburne University of TechnologyHawthornVIC 3122Australia Melbourne Centre for Nanofabrication ANFF151 Wellington RoadClaytonVIC 3168Australia Center of Nanotechnology King Abdulaziz UniversityJeddah 21589Saudi Arabia

Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial *** ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice *** of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been ***-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring *** pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter *** opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab *** key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication *** biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.

关键词： biomedical applications direct laser writing functional microdevices material processing nonlinear light–matter interaction 3D structuring ultrashort laser pulses

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