Ultrafast laser processing of materials: from science to industry

作     者：Mangirdas Malinauskas Albertas Žukauskas Satoshi Hasegawa Yoshio Hayasaki Vygantas Mizeikis Ričardas Buividas Saulius Juodkazis 

作者机构：Laser Research CentreDepartment of Quantum ElectronicsPhysics FacultyVilnius UniversitySaulėtekio Ave.10LT-10223 VilniusLithuania Center for Optical Research and Education(CORE)Utsunomiya University7-1-2 YotoUtsunomiya 321-8585Japan Research Institute of ElectronicsShizuoka University3-5-3-1 JohokuNaka-kuHamamatsu 432-8561Japan Centre for Micro-PhotonicsFaculty of ScienceEngineering and TechnologySwinburne University of TechnologyHawthornVIC 3122Australia Melbourne Centre for NanofabricationANFF151 Wellington RoadClaytonVIC 3168Australia Center of NanotechnologyKing Abdulaziz UniversityJeddah 21589Saudi Arabia 

出 版 物：《Light(Science & Applications)》 (光（科学与应用)（英文版）)

年 卷 期：2016年第5卷第1期

页      面：548-561页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程] 

基　　金：support by a project‘ReSoft’(SEN-13/2015)from the Research Council of Lithuania support by JSPS Kakenhi Grant No.15K04637 support via ARC Discovery DP120102980 Gintas Šlekys for the partnership project with Altechna Ltd on industrial fs-laser fabrication 

主　　题：biomedical applications direct laser writing functional microdevices material processing nonlinear light–matter interaction 3D structuring ultrashort laser pulses 

摘      要：Processing of materials by ultrashort laser pulses has evolved significantly over the last decade and is starting to reveal its scientific,technological and industrial *** ultrafast laser manufacturing,optical energy of tightly focused femtosecond or picosecond laser pulses can be delivered to precisely defined positions in the bulk of materials via two-/multi-photon excitation on a timescale much faster than thermal energy exchange between photoexcited electrons and lattice *** of photoionization and thermal processes with the highest precision,inducing local photomodification in sub-100-nm-sized regions has been ***-of-the-art ultrashort laser processing techniques exploit high 0.1–1μm spatial resolution and almost unrestricted three-dimensional structuring *** pulse duration,spatiotemporal chirp,phase front tilt and polarization allow control of photomodification via uniquely wide parameter *** opto-electrical/mechanical technologies have enabled laser processing speeds approaching meters-per-second,leading to a fast lab-to-fab *** key aspects and latest achievements are reviewed with an emphasis on the fundamental relation between spatial resolution and total fabrication *** biomedical applications implementing micrometer feature precision over centimeter-scale scaffolds and photonic wire bonding in telecommunications are highlighted.