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Opto-Electronic Science 2024年第6期3卷 20-29页

作者： Kotaro Obata Shota Kawabata Yasutaka Hanada Godai Miyaji koji sugioka RIKEN Center for Advanced Photonics(RAP) Wako-shiSaitama 351-0198Japan Faculty of Engineering Tokyo University of Agriculture and TechnologyKoganeiTokyo 184-8588Japan Graduate School of Science and Technology Hirosaki UniversityHirosakiAomori 036-8561Japan

GHz burst-mode femtosecond(fs)laser,which emits a series of pulse trains with extremely short intervals of several hundred picoseconds,provides distinct characteristics in materials processing as compared with the conventional irradiation scheme of fs laser(single-pulse mode).In this paper,we take advantage of the moderate pulse interval of 205 ps(4.88 GHz)in the burst pulse for high-quality and high-efficiency micromachining of single crystalline sapphire by laser induced plasma assisted ablation(LIPAA).Specifically,the preceding pulses in the burst generate plasma by ablation of copper placed behind the sapphire substrate,which interacts with the subsequent pulses to induce ablation at the rear surface of sapphire *** a result,not only the ablation quality but also the ablation efficiency and the fabrication resolution are greatly improved compared to the other schemes including single-pulse mode fs laser direct ablation,single-pulse mode fs-LIPAA,and nanosecond-LIPAA.

关键词： femtosecond laser GHz burst mode ablation LIPAA laser induced plasma assisted ablation sapphire

Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst)

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International Journal of Extreme Manufacturing 2022年第1期4卷 75-83页

作者： Francesc Caballero-Lucas Kotaro Obata koji sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWako-shiSaitama 351-0198Japan

Ultrashort laser pulses confine material processing to the laser-irradiated area by suppressing heat diffusion,resulting in precise ablation in diverse ***,challenges occur when high speed material removal and higher ablation efficiencies are *** burst mode laser ablation has been proposed as a successful method to overcome these *** this approach,we studied the influence of combining GHz bursts in MHz bursts,known as Bi Burst mode,on ablation efficiency of *** Burst mode used in this study consists of multiple bursts happening at a repetition rate of 64 MHz,each of which contains multiple pulses with a repetition rate of 5 *** obtained results show differences between Bi Burst mode and conventional single pulse mode laser ablation,with a remarkable increase in ablation efficiency for the Bi Burst mode,which under optimal conditions can ablate a volume4.5 times larger than the single pulse mode ablation while delivering the same total energy in the process.

关键词： BiBurst mode GHz burst laser ablation surface microfabrication

Label-free trace detection of bio-molecules by liquid-interface assisted surface-enhanced Raman scattering using a microfluidic chip

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Opto-Electronic Advances 2022年第10期5卷 12-21页

作者： Shi Bai Xueli Ren Kotaro Obata Yoshihiro Ito koji sugioka Advanced Laser Processing Research Team RIKEN Center for Advanced Photonics2-1 HirosawaWakoSaitama 351-0198Japan Nano Medical Engineering Laboratory RIKEN Cluster for Pioneering Research2-1 HirosawaWakoSaitama 351-0198Japan

Surface-enhanced Raman scattering(SERS),owing to its high sensitivity based on localized surface plasmon resonance of nanostructured metals,is recently attracting much attention to be used for biotechnology,such as cell imaging and tumor *** the other hand,the trace detection of bio-molecules with large molecular weight is still challenging because the troublesome treatment of SERS substrate using coupling or cross-linking agents is *** this paper,we apply liquid interface assisted SERS(LI-SERS)method,which provides unique features of collection and self-immobilization of analyte molecules on the SERS substrate,to realize the label-free trace detection of bio-molecules with detection limits of pM~***,deoxyribonucleic acid(DNA)discrimination and quantitative detection ofβ-Amyloid(Aβ)in trace-concentration are demonstrated to illustrate the ultrahigh sensitivity and versatility of the LI-SERS *** results suggest LI-SERS is promising for the early-stage diagnosis of diseases such as virus infection and Alzheimer's disease.

关键词： femtosecond laser processing LI-SERS microfluidic chip DNA β-Amyloid

Liquid vortexes and flows induced by femtosecond laser ablation in liquid governing formation of circular and crisscross LIPSS

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Opto-Electronic Advances 2022年第2期5卷 1-12页

作者： Dongshi Zhang Xinzhuo Li Yao Fu Qinghe Yao Zhuguo Li koji sugioka Shanghai Key Laboratory of Materials Laser Processing and Modification School of Materials Science and EngineeringShanghai Jiao Tong UniversityShanghai 200240China RIKEN Center for Advanced Photonics 2-1 HirosawaWakoSaitama 351-0198Japan School of Aeronautics and Astronautics Sun Yat-sen UniversityGuangzhou 510275China State Key Lab of Metal Matrix Composites School of Materials Science and EngineeringShanghai Jiao Tong UniversityShanghai 200240China

Orientations of laser induced periodic surface structures(LIPSS)are usually considered to be governed by the laser polarization *** this work,we unveil that fluid dynamics induced by femtosecond(fs)laser ablation in liquid(fs-LAL)can easily break this polarization restriction to produce irregular circular-LIPSS(CLIPPS)and crisscross-LIPSS(CCLIPSS).Fs laser ablation of silicon in water shows formation of diverse LIPSS depending on ablation *** a high power of 700 mW(repetition rate of 100 kHz,pulse duration of 457 fs and wavelength of 1045 nm),single/twin CLIPSS are produced at the bottom of macropores of several microns in diameter due to the formation of strong liquid vortexes and occurrence of the vortex shedding *** simulations validate our speculation about the formation of liquid vortex with an ultrahigh static pressure,which can induce the microstructure trenches and cracks at the sidewalls for fs-LAL of Si and tungsten(W)in water,*** a low power of 50 mW,weak liquid vortexes are produced,which only give birth to curved LIPSS in the valleys of ***,it is deduced that liquid vortex plays a crucial role in the formation of ***-like microstructures induce complex fluid dynamics which can cause the formation of CCLIPSS on *** is believed that liquid vortexes and fluid dynamics presented in this work open up new possibilities to diversify the morphologies of LIPSS formed by fs-LAL.

关键词： circular LIPSS crisscross LIPSS laser ablation in liquid femtosecond laser ablation in water liquid vortex vortex shedding

Hybrid femtosecond laser three-dimensional micro-and nanoprocessing:a review

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International Journal of Extreme Manufacturing 2019年第1期1卷 52-63页

作者： koji sugioka RIKEN Center for Advanced Photonics WakoSaitama 351-0198Japan

The extremely high peak intensity associated with ultrashort pulse width of femtosecond(fs)lasers enabled inducing nonlinear multiphoton absorption in materials that are transparent to the laser *** importantly,focusing the fs laser beam inside the transparent materials confined the nonlinear interaction to within the focal volume only,realizing three-dimensional(3D)micro/*** 3D capability offers three different processing schemes for use in fabrication:undeformative,subtractive,and ***,a hybrid approach of different schemes can create much more complex 3D structures and thereby promises to enhance the functionality of the structures ***,hybrid fs laser 3D microprocessing opens a new door for material *** paper comprehensively reviews different types of hybrid fs laser 3D micro/nanoprocessing for diverse applications including fabrication of functional micro/nanodevices.

关键词： femtosecond laser 3D processing hybrid processing microdevice nanodevice

Will GHz burst mode create a new path to femtosecond laser processing?

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International Journal of Extreme Manufacturing 2021年第4期3卷 56-59页

作者： koji sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWako-shiSaitama 351-0198Japan

The GHz burst mode of femtosecond laser pulses can significantly improve ablation efficiency without deteriorating ablation ***,various parameters involved in GHz burst mode make it difficult to optimize the processing for practical *** this Perspective,the author gives the history,current status,and future challenges and prospects of this new strategy to answer the question,'will GHz burst mode create a new path to femtosecond laser processing?'

关键词： laser femtosecond mode

Hierarchical microstructures with high spatial frequency laser induced periodic surface structures possessing different orientations created by femtosecond laser ablation of silicon in liquids

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Opto-Electronic Advances 2019年第3期2卷 1-18页

作者： Dongshi Zhang koji sugioka RIKEN Center for Advanced Photonics WakoSaitama 351-0198Japan

High spatial frequency laser induced periodic surface structures(HSFLs)on silicon substrates are often developed on flat surfaces at low fluences near ablation threshold of 0.1 J/cm2,seldom on microstructures or microgrooves at relatively higher fluences above 1 J/cm^*** work aims to enrich the variety of HSFLs-containing hierarchical microstructures,by femtosecond laser(pulse duration:457 fs,wavelength:1045 nm,and repetition rate:100 kHz)in liquids(water and acetone)at laser fluence of 1.7 J/cm^*** period of Si-HSFLs in the range of 110–200 nm is independent of the scanning speeds(0.1,0.5,1 and 2 mm/s),line intervals(5,15 and 20μm)of scanning lines and scanning directions(perpendicular or parallel to light polarization direction).It is interestingly found that besides normal HSFLs whose orientations are perpendicular to the direction of light polarization,both clockwise or anticlockwise randomly tilted HSFLs with a maximal deviation angle of 50°as compared to those of normal HSFLSs are found on the microstructures with height *** spectra and SEM characterization jointly clarify that surface melting and nanocapillary waves play important roles in the formation of *** fact that no HSFLs are produced by laser ablation in air indicates that moderate melting facilitated with ultrafast liquid cooling is beneficial for the formation of HSFLs by *** the basis of our findings and previous reports,a synergistic formation mechanism for HSFLs at high fluence was proposed and discussed,including thermal melting with the concomitance of ultrafast cooling in liquids,transformation of the molten layers into ripples and nanotips by surface plasmon polaritons(SPP)and second-harmonic generation(SHG),and modulation of Si-HSFLs direction by both nanocapillary waves and the localized electric field coming from the excited large Si particles.

关键词： high spatial frequency laser induced periodic surface structures silicon laser ablation in liquids hierarchical microstructures femtosecond laser high fluence formation mechanism surface melting nanocapillary wave surface plasmon polaritons second-harmonic generation

Ultrafast lasers—reliable tools for advanced materials processing

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Light(Science & Applications) 2014年第1期3卷 256-267页

作者： koji sugioka Ya Cheng RIKEN Center for Advanced Photonics SaitamaJapan State Key Laboratory of High Field Laser Physics Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina

The unique characteristics of ultrafast lasers,such as picosecond and femtosecond lasers,have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak ***,ultrafast lasers are currently used widely for both fundamental research and practical *** review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume *** processing includes micromachining,microand nanostructuring,and nanoablation,while volume processing includes two-photon polymerization and three-dimensional(3D)processing within transparent *** and industrial applications of ultrafast laser processing are also introduced,and a summary of the technology with future outlooks are also given.

关键词： 3D fabrication industrial application micromachining nanofabrication ultrafast laser

Fabrication of three-dimensional proteinaceous micro-and nano-structures by femtosecond laser cross-linking

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Opto-Electronic Advances 2018年第4期1卷 15-32页

作者： Daniela Serien koji sugioka Advanced Laser Processing Research Team RIKEN Center for Advanced Photonics

Proteins are a class of biomaterials having a vast array of functions, including the catalysis of metabolic reactions, DNA replication, stimuli response and transportation of molecules. Recent progress in laser-based fabrication technologies has enabled the formation of three-dimensional(3D) proteinaceous micro-and nano-structures by femtosecond laser cross-linking, which has expanded the possible applications of proteins. This article reviews the current knowledge and recent advancements in the femtosecond laser cross-linking of proteins. An overview of previous studies related to fabrication using a variety of proteins and detailed discussions of the associated mechanisms are provided. In addition, advances and applications utilizing specific protein functions are introduced. This review thus provides a valuable summary of the 3D micro-and nano-fabrication of proteins for biological and medical applications.

关键词： 3d fabrication Actuation Cross-linking Femtosecond laser Laser direct write Microfluidics Protein Scaffold

Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

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International Journal of Extreme Manufacturing 2023年第1期5卷 212-220页

作者： Shota Kawabata Shi Bai Kotaro Obata Godai Miyaji koji sugioka RIKEN Center for Advanced Photonics 2-1 HirosawaWakoSaitama 351-0198Japan Department of Applied Physics Tokyo University of Agriculture and Technology2-24-16 NakachoKoganeiTokyo 184-8588Japan

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses(single-pulse mode).However,most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material *** this study,we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures(LIPSS)on *** is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization *** contrast,we find that the GHz burst mode femtosecond laser(wavelength:1030 nm,intra-pulse duration:220 fs,intra-pulse interval time(intra-pulse repetition rate):205 ps(4.88 GHz),burst pulse repetition rate:200 kHz)creates unique two-dimensional(2D)*** regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic ***,generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D ***,hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.

关键词： GHz burst laser-induced periodic surface structures(LIPSS) surface nanostructuring 2D nanostructures