Hybrid femtosecond laser three-dimensional micro-and nanoprocessing:a review

作     者：Koji Sugioka Koji Sugioka

作者机构：RIKEN Center for Advanced PhotonicsWakoSaitama 351-0198Japan 

出 版 物：《International Journal of Extreme Manufacturing》 (极端制造（英文）)

年 卷 期：2019年第1卷第1期

页      面：52-63页

核心收录：

学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0802[工学-机械工程] 0803[工学-光学工程] 0811[工学-控制科学与工程] 080201[工学-机械制造及其自动化] 

主　　题：femtosecond laser 3D processing hybrid processing microdevice nanodevice 

摘      要：The extremely high peak intensity associated with ultrashort pulse width of femtosecond(fs)lasers enabled inducing nonlinear multiphoton absorption in materials that are transparent to the laser *** importantly,focusing the fs laser beam inside the transparent materials confined the nonlinear interaction to within the focal volume only,realizing three-dimensional(3D)micro/*** 3D capability offers three different processing schemes for use in fabrication:undeformative,subtractive,and ***,a hybrid approach of different schemes can create much more complex 3D structures and thereby promises to enhance the functionality of the structures ***,hybrid fs laser 3D microprocessing opens a new door for material *** paper comprehensively reviews different types of hybrid fs laser 3D micro/nanoprocessing for diverse applications including fabrication of functional micro/nanodevices.