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Chinese Physics Letters 2016年第6期33卷 49-52页

作者：孙科学张淑仪 kiyotaka wasa 水修基 Laboratory of Modern Acoustics Institute of AcousticsCollaborative Innovation Center of Advanced MicrostructuresNanjing University Graduate School of Yokohama City University

La-doped and undoped xBiIn03-（1 - x）PbTi03 （BI-PT） thin films are deposited on （101）SrRuO3/（lOO）Pt/（lO0） MgO substrates by the rf-magnetron sputtering method. The structures of the films are characterized by XRD and SEM, and the results indicate that the thin films are grown with mainly （100） oriented and columnar structures. The ferroelectricity and piezoelectricity of the BI-PT films are also measured, and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations. These results will open up wide potential applications of the films in electronic devices.

关键词： of BI Characterization of La-doped xBiInO3 x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method in by La PT

Thermal Diffusivity of Film/Substrate Structures Characterized by Transient Thermal Grating Method

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Chinese Physics Letters 2008年第1期25卷 176-179页

作者：徐晓东马頔张淑仪罗爱华 kiyotaka wasa Laboratory of Modern Acoustics Institute of Acoustics Nanjing University Nanjing 210093 Department of Micro-engineering Kyoto University Kyoto 606-8501 Japan

Transient thermal grating method is used to measure the thermal diffusivity of absorbing films deposited on transparent substrates. According to periodically modulated dielectric constant variations and thermoelastic deformations of the thin films caused by the transient thermal gratings, an improved optical diffraction theory is presented. In the experiment, the probing laser beam reflectively diffracted by the thermal grating is measured by a photomultiplier at different grating fringe spaces. The thermal diffusivity of the film can be evaluated by fitting the theoretical calculations of diffraction signals to the experimental measured data. The validity of the method is tested by measuring the thermal diffusivities of absorbing ZnO films deposited on glass substrates.

关键词： ACOUSTIC-WAVES THIN-FILMS

High Ferroelectricities and High Curie Temperature of BiInO3PbTiO3Thin Films Deposited by RF Magnetron Sputtering Method

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Chinese Physics Letters 2018年第12期35卷 19-22页

作者：孙科学张淑仪 kiyotaka wasa College of Electronic and Optical Engineering Nanjing University of Posts and Telecommunications Key Laboratory of Modern Acoustics Institute of Acoustics Nanjing University Faculty of Science Yokohama City University

Properties of ferroelectric xBiInO3-（1-x）PbTiO3（xBI-（1-x）PT） thin films deposited on（101） SrRuO3/（200）Pt/（200） MgO substrates by rf magnetron sputtering method and effects of deposition conditions are *** structures of the xBI-（1-x）PT films are characterized by x-ray diffraction and scanning electron *** results indicate that the thin films are grown with mainly（001） orientation. The chemical compositions of the films are analyzed by scanning electron probe and the results indicate that the loss phenomena of Pb and Bi elements depend on the pressure and temperature during the sputtering *** sputtering parameters including target composition, substrate temperature, and gas pressure are adjusted to obtain optimum sputtering conditions. To decrease leakage currents,2 mol% La2 O3 is doped in the targets. The P-E hysteresis loops show that the optimized xBI-（1-x）PT（x = 0.24） film has high ferroelectricities with remnant polarization2 Pr = 80μC/cm2 and coercive electric field 2 EC = 300 kV/cm. The Curie temperature is about 640℃. The results show that the films have optimum performance and will have wide applications.

关键词： In Pb MgO High Ferroelectricities and High Curie Temperature of BiInO3PbTiO3Thin Films Deposited by RF Magnetron Sputtering Method

CHARACTERIZATIONS OF ELASTIC CONSTANTS OF TRANSPARENT THIN FILMS DEPOSITED ON SUBSTRATES BY LASER ULTRASONIC METHOD

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CHARACTERIZATIONS OF ELASTIC CONSTANTS OF TRANSPARENT THIN F...

Fabrication and Characterization of PMnN-PZT Films with High Piezoelectricity

第三届全国压电和声波理论及器件技术研讨会

作者： kiyotaka wasa Lab of Modern Acoustics Institute of AcousticsNanjing University NanjingJiangsu 210093China Department of Micro-Engineering Kyoto UniversityKyoto 606-8501Japan

A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on *** film/substrate samples are prepared by a RF magnetron sputtering ***-like films,deposited on three kinds of substrates,silicone plates,glass and copper plates,have been studied and the related parameters have been evaluated.

关键词： Laser-ultrasonics thin films elastic constants

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Fabrication and Characterization of PMnN-PZT Films with High...

2008 IEEE International Ultrasonics Symposium

作者： kiyotaka wasa Department of Micro-engineering Kyoto UniversityKyoto 606-8501

＜正＞Background,Motivation and Objective The high electromechanical coupling coefficient is an important factor for developing acoustic and electronic devices and also MEMS techniques,so the piezoelectric films with ...

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TeO_x薄膜的结构与声学特性研究

压电与声光 2010年第6期32卷 918-921,925页

作者：周凤梅李哲 wasa kiyotaka 范理张淑仪水修基南京大学声学研究所近代声学实验室江苏南京210093 京都大学工学研究科

采用射频磁控溅射技术在不同条件、不同基片上制备氧化碲(TeOx)薄膜,并通过X线衍射、傅里叶变换红外光谱、X线光电子能谱等技术对制备的TeOx薄膜的结构和成分进行了分析。研制了TeOx/36°YX-LiTaO3结构的Love波器件,对Love波器件的延时... 详细信息

采用射频磁控溅射技术在不同条件、不同基片上制备氧化碲(TeOx)薄膜,并通过X线衍射、傅里叶变换红外光谱、X线光电子能谱等技术对制备的TeOx薄膜的结构和成分进行了分析。研制了TeOx/36°YX-LiTaO3结构的Love波器件,对Love波器件的延时温度系数(TCD)进行研究。结果表明,与36°YX-LiTaO3基片上制作的水平切变声波器件的延时温度系数相比,Love波器件的延时温度系数因TeOx薄膜的沉积而减小,故TeOx薄膜的延时温度系数为负值,其变化量取决于TeOx薄膜的制备条件和薄膜厚度。因此,TeOx/36°YX-LiTaO3结构Love波器件的延时温度系数可通过选择TeOx薄膜的制备条件和膜厚进行优化。

关键词： TeOx薄膜 Love波器件延时温度系数

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ZnO薄膜的粉靶溅射沉积

南京大学学报（自然科学版） 2003年第4期39卷 532-539页

作者：刘天柱 kiyotaka wasa 张淑仪水修基陈培狄宋凤麒王广厚南京大学声学研究所近代声学国家重点实验室南京210093 南京电子器件研究所南京210016 南京大学物理系固体微结构国家重点实验室南京210093

氧化锌是一种重要的压电与光电材料,用粉靶代替常规的固体陶瓷靶溅射沉积ZnO薄膜,对基底的加热温度、溅射气压和氧气的混合比率等沉积条件对氧化锌薄膜特性的影响进行了研究,主要对沉积在玻璃基片上的ZnO薄膜进行了X-射线衍射(XRD)、扫... 详细信息

氧化锌是一种重要的压电与光电材料,用粉靶代替常规的固体陶瓷靶溅射沉积ZnO薄膜,对基底的加热温度、溅射气压和氧气的混合比率等沉积条件对氧化锌薄膜特性的影响进行了研究,主要对沉积在玻璃基片上的ZnO薄膜进行了X-射线衍射(XRD)、扫描电镜(SEM)、原子力显微镜(AFM)以及台阶仪的测量和分析比较,用粉靶溅射的ZnO薄膜具有很好的C轴长相和很窄的衍射峰半宽(0.2°～0.27°)。因为ZnO膜在C轴方向有很强的压电性,从而也说明了用粉靶溅射的ZnO薄膜具有很好的压电特性。分析和测量结果显示用粉靶溅射ZnO薄膜的最佳条件是:(1)基片加热温度为300～400℃。(2)氧气的混合含量为0.5～0.8.(3)溅射气压为1～2 Pa。得出了利用粉靶溅射制备的ZnO薄膜与用陶瓷靶制备同样具有很好的性能。

关键词：氧化锌薄膜 ZnO薄膜粉靶溅射沉积加热温度溅射气压压电性半导体制备方法

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用电子束光刻术制造矩形孔菲涅尔微透镜阵列

应用光学 1991年第4期12卷 54-58页

作者： Teruhiro Shiono Kentaro Sotsune Osamu YamaZaki kiyotaka wasa 陆锡南

本文提出一种矩形孔菲涅尔微透镜阵列。这些微透镜阵列的制作采用了专为制造微光学元件而研制的电子束写入系统。实验表明,这种透镜阵列具有聚焦均匀的特性,以及每一透镜具有衍射限聚焦特性,其效率为74％。

关键词：电子束光刻术菲涅尔微透镜列阵

Coatings on Mg alloys and their mechanical properties: A review

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Journal of Materials Science & Technology 2018年第7期34卷 1119-1126页

作者： Toko Tokunaga Munekazu Ohno kiyotaka Matsuura Faculty of Engineering Hokkaido University

Poor corrosion resistance is a serious drawback of Mg alloys, restricting their practical applications. Coating is one of the effective techniques for improvement in the poor corrosion resistance. In this paper, the coating processes for Mg alloys so far developed are reviewed. Among several processes, the coating processes based on mechanical energy, including metal forming, are attractive because the corrosion resistance and formability of Mg alloys are simultaneously improved.2017 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science ＆ Technology.

关键词： Magnesium alloy Coating Mechanical property Corrosion resistance

Selective synthesis of carbon monoxide via formates in reverse water–gas shift reaction over alumina-supported gold catalyst

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Journal of Energy Chemistry 2016年第2期25卷 304-308页

作者： Nobuhiro Ishito Kenji Hara kiyotaka Nakajima Atsushi Fukuoka Institute for Catalysis Hokkaido University Graduate School of Chemical Sciences and Engineering Hokkaido University School of Engineering Tokyo University of Technology

Thermal decomposition of formic acid on SiO2, CeO2 and γ-Al2O3 was studied as an elementary step of reverse water–gas shit reaction（RWGS） over supported Au catalysts. γ-Al2O3 showed the highest CO selectivity among the tested oxides in the decomposition of formic acid. Infrared spectroscopy showed the formation of four formate species on γ-Al2O3： three η~1-type and one μ~2-type species, and these formates decomposed to CO at 473 K or higher. Au-loaded γ-Al2O3 samples were prepared by a depositionprecipitation method and used as catalysts for RWGS. The supported Au catalyst gave CO with high selectivity over 99% from CO2 and H2, which is attributed to the formation of formates on Au and subsequent decomposition to CO on γ-Al2O3.

关键词： Reverse water–gas shift reaction Carbon dioxide Hydrogen Formate Carbon monoxide Alumina Gold