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International Journal of Extreme Manufacturing 2022年第2期4卷 145-160页

作者： Yusuke Sato jiwang yan Department of Mechanical Engineering Keio UniversityYokohama 223-8522Japan

Diamond turning based on a fast tool servo(FTS)is widely used in freeform optics fabrication due to its high accuracy and machining *** a new trend,recently developed high-frequency and long-stroke FTS units are independently driven by a separate control system from the machine tool ***,the tool path generation strategy for the independently controlled FTS is far from *** study aims to establish methods for optimizing tool path for the independent control FTS to reduce form errors in a single step of *** from the conventional integrated FTS control system,where control points are distributed in a spiral pattern,in this study,the tool path for the independent FTS controller is generated by the ring method and the mesh method,*** machined surface profile is predicted by simulation and the parameters for the control point generation are optimized by minimizing the deviation between the predicted and the designed *** demonstrate the feasibility of the proposed tool path generation strategies,cutting tests of a two-dimensional sinewave and a micro-lens array were conducted and the results were *** a result,after tool path optimization,the peak-to-valley form error of the machined surface was reduced from 429 nm to 56 nm for the two-dimensional sinewave by using the ring method,and from 191 nm to 103 nm for the micro-lens array by using the mesh method,respectively.

关键词： ultraprecision machining diamond turning fast tool servo freeform surface tool path optimization

Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation

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Nanomanufacturing and Metrology 2023年第1期6卷 36-48页

作者： Tushar Meshram jiwang yan School of Integrated Design Engineering Graduate School of Science and TechnologyKeio UniversityHiyoshi 3-14-1Kohoku-kuYokohama 223-8522Japan Department of Mechanical Engineering Faculty of Science and TechnologyKeio UniversityHiyoshi 3-14-1Kohoku-kuYokohama 223-8522Japan

Reaction-bonded silicon carbide(RB-SiC)is an excellent engineering material with high hardness,stiffness,and resistance to chemical ***,its widespread use is hindered due to the properties mentioned above,making it difficult to machine functional surface structures through mechanical and chemical *** study investigated the fundamental characteristics of laser-induced periodic surface structures(LIPSSs)on RB-SiC via femtosecond pulsed laser irradiation at a wavelength of 1028 ***-spatial-frequency LIPSS(LSFL)and high-spatial-frequency LIPSS(HSFL)formed on the surface along directions perpendicular to the laser *** grains surrounded by a large amount of Si show a reduced threshold for LIPSS *** varying laser fluence and scanning speed,HSFL-LSFL hybrid structures were generated on the SiC *** electron microscopy observations and Raman spectroscopy were carried out to understand the formation mechanism of the hybrid LIPSS.A possible mechanism based on the generation of multiple surface electromagnetic waves due to the nonlinear response of SiC was proposed to explain the hybrid structure ***,the direction of laser scanning with respect to laser polarization affects the uniformity of the generated LIPSS.

关键词： Reaction-bonded silicon carbide Surface texturing Laser-induced periodic surface structure Composite material Hybrid nanostructure

Generating Nanodot Structures on Stainless-Steel Surfaces by Cross Scanning of a Picosecond Pulsed Laser

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Nanomanufacturing and Metrology 2020年第2期3卷 105-111页

作者： Tomoki Kobayashi jiwang yan Department of Mechanical Engineering Faculty of Science and TechnologyKeio UniversityHiyoshi 3-14-1 KohokuYokohamaKanagawa 223-8522Japan

Ultrashort pulsed laser-induced periodic surface structures(LIPSS)can be generated on difFerent kinds of materials,which are widely utilized for modifying surface properties such as wettability,adhesion,and tribological,as well as optical *** studies have focused mainly on one-dimensional LIPSS(i.e.,line structure)*** this study,a picosecond pulsed laser was used to irradiate stainless-steel surfaces for generating two-dimensional LIPSS,namely nanodot structures,by cross-scanning the laser beam for a different number of *** obtained nanodot structures were found to be super hydrophilic just after laser irradiation,but turned to be hydrophobic after exposure in air for a few *** cross・scanning the laser beam for the same number of times,local LIPSS rewriting was *** study showed the possibility of improving the homogeneity of the surface properties of steel materials through laser-induced nanodot structuring.

关键词： Nanodot structure Surface patterning Picosecond pulsed laser LIPSS Tool steel Wettability control

Single-grain cutting based modeling of abrasive belt wear in cylindrical grinding

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Friction 2020年第1期8卷 208-220页

作者： Zhe HE Jianyong LI Yueming LIU jiwang yan School of Mechanical Electronic and Control EngineeringBeijing Jiaotong UniversityBeijing 100044China Key Laboratory of Vehicle Advanced Manufacturing Measuring and Control TechnologyMinistry of EducationBeijing 100044China Department of Mechanical Engineering Faculty of Science and TechnologyKeio UniversityHiyoshi 3-14-1Kohoku-kuYokohama 223-8522Japan

A systematic wear model of the cylindrical grinding process with an alumina abrasive belt from the perspective of single grain sliding wear was established in this *** model consists of three parts:a single cutting force model derived by applying a stress integration method,a single grain wear height analysis based on the wear rate of alumina,and a grinding mileage prediction of multiple grains with Gaussian distributed protrusion *** force,single grain wear height and full‐size grinding mileage verification experiments were *** results indicated that the established model was in reasonable agreement with the experimental outcomes,which suggests that this model could be useful in the industry to predict the wear process of abrasive belts.

关键词： abrasive belt single grain cutting slide wear grinding mileage

Generation of micro/nano hybrid surface structures on copper by femtosecond pulsed laser irradiation

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Nanomanufacturing and Metrology 2022年第3期5卷 274-282页

作者： Ayumi Nakajima Masaki Omiya jiwang yan School of Integrated Design Engineering Graduate School of Science and TechnologyKeio UniversityYokohama 223-8522Japan Department of Mechanical Engineering School of Science and TechnologyKeio UniversityYokohama 223-8522Japan

The delamination of copper lead frames from epoxy molding compounds(EMC)is a severe problem for microelectronic devices,as it leads to reduced heat dissipation or circuit *** micro/nanoscale surface structuring of copper is a promising method to improve the copper-EMC interfacial *** this study,the generation of micro/nano hybrid structures on copper surfaces through femtosecond pulsed laser irradiation is proposed to improve interfacial *** micro/nano hybrid structures were realized by generating nanoscale laser-induced periodic surface structures(LIPSS)on microscale parallel *** types of hybrid surface structures were generated by changing the laser polarization direction,fluence,and scanning *** a specific aspect ratio of microgrooves,a latticed structure was generated on the sides of microgrooves by combining LIPSS formation and direct laser interference *** study provides an efficient method for the micro/nanoscale hybrid surface structure formation for interfacial adhesion improvement between copperand EMC.

关键词： Femtosecond pulsed laser Copper Metal surface LIPSS Direct laser interference patterning-Micro/nano hybrid structures

Multilayer Graphene-Coated Silicon Carbide Nanowire Formation Under Defocused Laser Irradiation

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Nanomanufacturing and Metrology 2023年第3期6卷 12-28页

作者： Kanon Minami Kyosuke Kobinata jiwang yan Department of Mechanical Engineering Faculty of Science and TechnologyKeio UniversityHiyoshi 3-14-1KohokuYokohama223-8522Japan DISCO Corporation 13-11 Omori-Kita 2-ChomeOta-KuTokyo143-8580Japan

Graphene-coated silicon carbide(SiC@C)core-shell nanostructures have attracted attention in the fields of energy storage and *** this study,multilayer graphene-coated silicon carbide(SiC)nanowires were obtained through the laser irradiation of a mixture target of graphite powder and silicon(Si)grinding sludge discharged from Si wafer *** irradiation was performed using an ytterbium(Yb)fiber pulsed laser with a pulse width of 10 ms and a wavelength of 1070 nm with various defocus *** effect of laser defocusing on the morphology of the generated nanostructures was *** showed that nanowires were produced under the defocused conditions,and nanoparticles were observed at the on-focus *** products obtained under all defocused conditions showed a core-shell structure,and the SiC nanowires were covered by graphene *** aspect ratio of the nanowires increased with the defocus *** of the laser-induced plume using a high-speed camera showed that when the laser was defocused,the plume propagation speed slowed down,and the shape of the plume changed to a swirling *** nanowire formation was closely related to the propagation speed and shape variation of the *** successful production of SiC@C core-shell nanowires from Si waste opens up the possibility of the sustainable development of new materials for energy storage and nanoelectronics.

关键词： Nanomaterial Laser irradiation Silicon carbide Nanowire Silicon sludge Core-shell structure Multilayer graphene

A theoretical and deep learning hybrid model for predicting surface roughness of diamond-turned polycrystalline materials

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International Journal of Extreme Manufacturing 2023年第3期5卷 620-644页

作者： Chunlei He jiwang yan Shuqi Wang Shuo Zhang Guang Chen Chengzu Ren Tianjin Key Laboratory of Equipment Design and Manufacturing Technology Department of Mechanical EngineeringTianjin UniversityTianjin 30054People’s Republic of China Department of Mechanical Engineering Keio UniversityYokohama 223-8522Japan Tianjin Key Laboratory of the Design and Intelligent Control of the Advanced Mechatronical System School of Mechanical EngineeringTianjin University of TechnologyTianjin 300384People’s Republic of China School of Mechanical Engineering Yanshan UniversityQinhuangdao 066004People’s Republic of China

Polycrystalline materials are extensively employed in *** surface roughness significantly affects the working *** defects,particularly grain boundaries,have a great impact on the achieved surface roughness of polycrystalline ***,it is difficult to establish a purely theoretical model for surface roughness with consideration of the grain boundary effect using conventional analytical *** this work,a theoretical and deep learning hybrid model for predicting the surface roughness of diamond-turned polycrystalline materials is *** kinematic–dynamic roughness component in relation to the tool profile duplication effect,work material plastic side flow,relative vibration between the diamond tool and workpiece,etc,is theoretically *** material-defect roughness component is modeled with a cascade forward neural *** the neural network,the ratio of maximum undeformed chip thickness to cutting edge radius RT S,work material properties(misorientation angle θ_(g) and grain size d_(g)),and spindle rotation speed n s are configured as input *** material-defect roughness component is set as the output *** validate the developed model,polycrystalline copper with a gradient distribution of grains prepared by friction stir processing is machined with various processing parameters and different diamond *** with the previously developed model,obvious improvement in the prediction accuracy is observed with this hybrid prediction *** on this model,the influences of different factors on the surface roughness of polycrystalline materials are *** influencing mechanism of the misorientation angle and grain size is quantitatively *** fracture modes,including transcrystalline and intercrystalline fractures at different RTS values,are ***,optimal processing parameters are obtained with a simulated annealing *** experiments are performed with

关键词： diamond turning material-defect roughness component polycrystalline copper neural network simulated annealing algorithm

Effect of tool geometry on ultraprecision machining of soft-brittle materials:a comprehensive review

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International Journal of Extreme Manufacturing 2023年第1期5卷 60-98页

作者： Weihai Huang jiwang yan Department of Mechanical Engineering Faculty of Science and TechnologyKeio University3-14-1 HiyoshiKohoku-kuYokohama 223-8522Japan

Brittle materials are widely used for producing important components in the industry of optics,optoelectronics,and *** machining of brittle materials with high surface quality and surface integrity helps improve the functional performance and lifespan of the *** to their hardness,brittle materials can be roughly divided into hard-brittle and *** there have been some literature reviews for ultraprecision machining of hard-brittle materials,up to date,very few review papers are available that focus on the processing of soft-brittle *** to the‘soft’and‘brittle’properties,this group of materials has unique machining *** paper presents a comprehensive overview of recent advances in ultraprecision machining of soft-brittle *** aspects of machining mechanisms,such as chip formation,surface topography,and subsurface damage for different machining methods,including diamond turning,micro end milling,ultraprecision grinding,and micro/nano burnishing,are compared in terms of tool-workpiece *** effects of tool geometries on the machining characteristics of soft-brittle materials are systematically analyzed,and dominating factors are sorted *** and challenges in the engineering applications are identified,and solutions/guidelines for future R&D are provided.

关键词： ultraprecision machining soft-brittle materials ductile machining tool geometries material removal mechanisms surface integrity

Manufacturing technologies toward extreme precision

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International Journal of Extreme Manufacturing 2019年第2期1卷 11-32页

作者： Zhiyu Zhang jiwang yan Tsunemoto Kuriyagawa Key Laboratory of Optical System Advanced Manufacturing Technology Changchun Institute of OpticsFine Mechanics and PhysicsChinese Academy of SciencesChangchun 130033People’s Republic of China 2 Department of Mechanical Engineering Keio UniversityYokohama 223-8522Japan Department of Mechanical Systems Engineering Tohoku UniversitySendai 980-8575Japan

Precision is one of the most important aspects of *** precision creates high quality,high performance,exchangeability,reliability,and added value for industrial *** the past decades,remarkable advances have been achieved in the area of high-precision manufacturing technologies,where the form accuracy approaches the nanometer level and surface roughness the atomic *** extremely high precision manufacturing technologies enable the development of high-performance optical elements,semiconductor substrates,biomedical parts,and so on,thereby enhancing the ability of human beings to explore the macroand microscopic mysteries and potentialities of the natural *** this paper,state-of-the-art high-precision material removal manufacturing technologies,especially ultraprecision cutting,grinding,deterministic form correction polishing,and supersmooth polishing,are reviewed and compared with insights into their principles,methodologies,and *** key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

关键词： ultraprecision cutting grinding polishing supersmooth surface ultraprecision measurement extreme precision

Algorithm of Micro-Grooving and Imaging Processing for the Generation of High-Resolution Structural Color Images

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Nanomanufacturing and Metrology 2020年第3期3卷 187-198页

作者： Tianfeng Zhou Yupeng He Tianxing Wang Xiaobin Dong Peng Liu Wenxiang Zhao Yao Hu jiwang yan Key Laboratory of Fundamental Science for Advanced Machining.Beijing Institute of Technology Beijing 100081China Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology Beijing Institute of TechnologyBeijing 100081China Department of Mechanical Engineering Faculty of Science and TechnologyKeio UniversityYokohama 223-8522Japan

The use of submicron structures for structural coloration of surfaces has broad applications for color filters,projection displays,virtual reality,and ***,structural color images lack high resolution due to low manufacturing *** this study,the axial-feed fly cutting(AFC)method is proposed to fabricate submicron grooves for the diffraction of visible light to create structural color *** establish the relationship between the color information in the pixels of the original image and the parameters of the array units corresponding to the *** algorithm to determine groove spacing and the tool path is established,and array units with the desired groove spacing are machined to reproduce the structural color *** submicron grooves fabricated by AFC have high quality and good *** to the excellent diffraction performance of the machined grooves,images with high saturation and resolution can be *** is verified that images with various colors can be efficiently fabricated using the proposed method and algorithm.

关键词： Subniicron structure Microgroove Structural coloration Structural-color image Fly cutting Micromachining