Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation
作者机构：School of Integrated Design EngineeringGraduate School of Science and TechnologyKeio UniversityHiyoshi 3-14-1Kohoku-kuYokohama 223-8522Japan Department of Mechanical EngineeringFaculty of Science and TechnologyKeio UniversityHiyoshi 3-14-1Kohoku-kuYokohama 223-8522Japan
出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)
年 卷 期：2023年第6卷第1期
页 面：36-48页
核心收录：
学科分类：080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0803[工学-光学工程]
基 金：Japan Society for the Promotion of Science JSPS (21H01230)
主 题：Reaction-bonded silicon carbide Surface texturing Laser-induced periodic surface structure Composite material Hybrid nanostructure
摘 要：Reaction-bonded silicon carbide(RB-SiC)is an excellent engineering material with high hardness,stiffness,and resistance to chemical ***,its widespread use is hindered due to the properties mentioned above,making it difficult to machine functional surface structures through mechanical and chemical *** study investigated the fundamental characteristics of laser-induced periodic surface structures(LIPSSs)on RB-SiC via femtosecond pulsed laser irradiation at a wavelength of 1028 ***-spatial-frequency LIPSS(LSFL)and high-spatial-frequency LIPSS(HSFL)formed on the surface along directions perpendicular to the laser *** grains surrounded by a large amount of Si show a reduced threshold for LIPSS *** varying laser fluence and scanning speed,HSFL-LSFL hybrid structures were generated on the SiC *** electron microscopy observations and Raman spectroscopy were carried out to understand the formation mechanism of the hybrid LIPSS.A possible mechanism based on the generation of multiple surface electromagnetic waves due to the nonlinear response of SiC was proposed to explain the hybrid structure ***,the direction of laser scanning with respect to laser polarization affects the uniformity of the generated LIPSS.
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