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Microsphere-assisted hyperspectral imaging:super-resolution,non-destructive metrology for semiconductor devices

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Light(Science & Applications) 2024年第6期13卷 1098-1111页

作者： Jangryul Park Youngsun Choi Soonyang Kwon Youngjun Lee jiwoong kim Jae-joon kim Jihye Lee Jeongho Ahn Hidong Kwak Yusin Yang Taeyong Jo Myungjun Lee Kwangrak kim Metrology and Inspection Equipment R&D Team Mechatronics ResearchSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department DRAM Process Development TeamSemiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea Process Development Department Semiconductor R&D CenterSamsung Electronics Co.Ltd.1-1 Samsungjeonja-rohwaseong-siGyeonggi-do18848Republic of Korea

As semiconductor devices shrink and their manufacturing processes advance,accurately measuring in-cell critical dimensions(CD)becomes increasingly *** test element group(TEG)measurements are becoming inadequate for representing the fine,repetitive patterns in cell *** non-destructive metrology technologies like optical critical dimension(OCD)are limited due to their large spot diameter of approximately 25μm,which impedes their efficacy for detailed in-cell structural ***,there is a pressing need for small-spot and non-destructive metrology *** address this limitation,we demonstrate a microsphere-assisted hyperspectral imaging(MAHSI)system,specifically designed for small spot optical metrology with *** microsphere-assisted super-resolution imaging,this system achieves an optical resolution of 66 nm within a field of view of 5.6μm×5.6μ*** approach effectively breaks the diffraction limit,significantly enhancing the magnification of the *** MAHSI system incorporating hyperspectral imaging with a wavelength range of 400–790 nm,enables the capture of the reflection spectrum at each camera *** achieved pixel resolution,which is equivalent to the measuring spot size,is 14.4 nm/pixel and the magnification is *** MAHSI system enables measurement of local uniformity in critical areas like corners and edges of DRAM cell blocks,areas previously challenging to inspect with conventional OCD *** our knowledge,this approach represents the first global implementation of microsphere-assisted hyperspectral imaging to address the metrology challenges in complex 3D structures of semiconductor devices.

关键词： metrology resolution enable

2D MoS2 Helical Liquid Crystalline Fibers for Multifunctional Wearable Sensors

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Advanced Fiber Materials 2024年第6期6卷 1813-1824页

作者： Jun Hyun Park Jang Hwan kim Su Eon Lee Hyokyeong kim Heo Yeon Lim Ji Sung Park Taeyeong Yun Jinyong Lee Simon kim Ho Jun Jin Kyeong Jun Park Heemin Kang Hoe Joon kim Hyeong Min Jin jiwoong kim Sang Ouk kim Bong Hoon kim Department of Robotics and Mechatronics Engineering DGISTDaegu 42988Republic of Korea Present Address:Platform Technology R&D Center LG ChemistrySeoul 07795Republic of Korea Department of Materials Science and Engineering Soongsil UniversitySeoul 06978Republic of Korea Department of Organic Materials and Fiber Engineering Soongsil UniversitySeoul 06978Republic of Korea Nano Convergence Technology Research Center Korea Electronics Technology Institute(KETI)Gyeonggi‑do 13509Republic of Korea Department of Green Chemistry and Materials Engineering Soongsil UniversitySeoul 06978Republic of Korea Department of Materials Science and Engineering Korea UniversitySeoul 02841Republic of Korea Department of Materials Science and Engineering National Creative Research Initiative Center for Multi‑Dimensional Directed Nanoscale AssemblyKAIST Institute for NanocenturyKAISTDaejeon 34141Republic of Korea Department of Organic Materials Engineering Chungnam National UniversityDaejeon 34134Republic of Korea Department of Materials Science and Engineering Chungnam National University99 Daehak‑roYuseong‑guDaejeon 34134Republic of Korea

Fiber-based material systems are emerging as key elements for next-generation wearable devices due to their remarkable advantages,including large mechanical deformability,breathability,and high ***,greatly improved mechani-cal stability has been established in functional fiber systems by introducing atomic-thick two-dimensional(2D)*** development of intelligent fibers that can respond to various external stimuli is strongly needed for versatile *** this work,helical-shaped semiconductive fibers capable of multifunctional sensing are obtained by wet-spinning MoS2 liquid crystal(LC)*** mechanical properties of the MoS2 fibers were improved by exploiting high-purity LC dispersions consisting of uniformly-sized MoS2 ***,three-dimensional(3D)helical fibers with structural chirality were successfully constructed by controlling the wet-spinning process *** helical fibers exhibited multifunctional sensing characteristics,including(1)photodetection,(2)pH monitoring,(3)gas detection,and(4)3D strain sensing.2D materials with semiconducting properties as well as abundant surface reactive sites enable smart multifunctionalities in one-dimensional(1D)and helical fiber geometry,which is potentially useful for diverse applications such as wearable internet of things(IoT)devices and soft robotics.

关键词： Molybdenum disulfide(MoS2) Liquid crystal(LC) Two-dimensional(2D)material Sensor Fiber

Recent advances in deep-learning-enhanced photoacoustic imaging

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Advanced Photonics Nexus 2023年第5期2卷 2-32页

作者： Jinge Yang Seongwook Choi jiwoong kim Byullee Park Chulhong kim Pohang University of Science and Technology School of Interdisciplinary Bioscience and BioengineeringGraduate School of Artificial IntelligenceMedical Device Innovation CenterDepartment of Electrical EngineeringConvergence IT Engineeringand Mechanical EngineeringPohangRepublic of Korea Sungkyunkwan University Institute of Quantum BiophysicsDepartment of BiophysicsSuwonRepublic of Korea

Photoacoustic imaging(PAI),recognized as a promising biomedical imaging modality for preclinical and clinical studies,uniquely combines the advantages of optical and ultrasound *** PAI’s great potential to provide valuable biological information,its wide application has been hindered by technical limitations,such as hardware restrictions or lack of the biometric information required for image *** first analyze the limitations of PAI and categorize them by seven key challenges:limited detection,low-dosage light delivery,inaccurate quantification,limited numerical reconstruction,tissue heterogeneity,imperfect image segmentation/classification,and ***,because deep learning(DL)has increasingly demonstrated its ability to overcome the physical limitations of imaging modalities,we review DL studies from the past five years that address each of the seven challenges in ***,we discuss the promise of future research directions in DL-enhanced PAI.

关键词： photoacoustic imaging deep learning biomedical imaging.

Correction:2D MoS2 Helical Liquid Crystalline Fibers for Multifunctional Wearable Sensors

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Advanced Fiber Materials 2024年第6期6卷 1997-1997页

作者： Park, Jun Hyun kim, Jang Hwan Lee, Su Eon kim, Hyokyeong Lim, Heo Yeon Park, Ji Sung Yun, Taeyeong Lee, Jinyong kim, Simon Jin, Ho Jun Park, Kyeong Jun Kang, Heemin kim, Hoe Joon Jin, Hyeong Min kim, jiwoong kim, Sang Ouk kim, Bong Hoon Department of Robotics and Mechatronics Engineering DGIST Daegu Republic of Korea Platform Technology R&D Center LG Chemistry Seoul Republic of Korea Department of Materials Science and Engineering National Creative Research Initiative Center for Multi-Dimensional Directed Nanoscale Assembly KAIST Institute for Nanocentury KAIST Daejeon Republic of Korea Department of Materials Science and Engineering Soongsil University Seoul Republic of Korea Department of Organic Materials Engineering Chungnam National University Daejeon Republic of Korea Department of Materials Science and Engineering Chungnam National University Daejeon Republic of Korea Nano Convergence Technology Research Center Korea Electronics Technology Institute (KETI) Gyeonggi-do Republic of Korea Department of Green Chemistry and Materials Engineering Soongsil University Seoul Republic of Korea Department of Materials Science and Engineering Korea University Seoul Republic of Korea

In the Acknowledgements section, the following sentence was missing. "This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (No. RS-2024-00406240). " Th...

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Effective operation and performance improvement methods for OMTP BONDI-based mobile Web widget resources

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Journal of Zhejiang University-Science C(Computers and Electronics) 2011年第10期12卷 787-799页

作者： jiwoong BANG Daewon kim Department of Computer Science Dankook University Department of Multimedia Engineering Dankook University

The Open Mobile Terminal Platform (OMTP) is a global forum made by telecommunications providers to promote user-oriented mobile services and data businesses. Devised by OMTP, BONDI is a browser-based application or a mobile Web run-time platform to help widgets make good use of the functions of mobile devices in a secure way. BONDI enables applications programmed with Web standard technologies such as HTML, JavaScript, CSS, and AJAX to reach the internal functions of mobile devices. Since BONDI, which is not just a simple network application, can reach the internal resources of devices in standard ways, it enables the application and widgets to be developed regardless of the operating system (OS) or platform. Web browser-based widgets are vulnerable to the network environment, and their execution speed can be slowed as the operations of the widgets or applications become heavy. Compared with the native widgets inside the device, however, those Web widgets will be continuously used thanks to the user-friendly simple interface and the faster speed in using Web resources. This study deals with a method to effectively operate and manage the resources of OMTP BONDI Web widget and provides improved results based on running performance evaluation experiments. The experiments were carried out to improve the entire operating time by enhancing the module-loading speed. In this regard, only indispensable modules were allowed to be loaded while the BONDI widget was underway. For this purpose, the widget resource list, which can make the operating speed of the BONDI widget faster, was redefined while a widget cache was employed. In addition, the widget box, a management tool for removed widgets, was devised to store temporarily idle widgets.

关键词： Mobile OMTP BONDI Web Widget Resources

Recent Advances in Patterning Strategies for Full‑Color Perovskite Light‑Emitting Diodes

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Nano-Micro Letters 2024年第3期16卷 99-137页

作者： Gwang Heon Lee Kiwook kim Yunho kim jiwoong Yang Moon Kee Choi Graduate School of Semiconductor Materials and Devices Engineering Center for Future Semiconductor Technology(FUST)Ulsan National Institute of Science and Technology(UNIST)Ulsan 44919Republic of Korea Department of Energy Science and Engineering Daegu Gyeongbuk Institute of Science and Technology(DGIST)Daegu 42988Republic of Korea Energy Science and Engineering Research Center Daegu Gyeongbuk Institute of Science and Technology(DGIST)Daegu 42988Republic of Korea Department of Materials Science and Engineering Ulsan National Institute of Science and Technology(UNIST)Ulsan 44919Republic of Korea Center for Nanoparticle Research Institute for Basic Science(IBS)Seoul 08826Republic of Korea

Metal halide perovskites have emerged as promising light-emitting materials for next-generation displays owing to their remarkable material characteristics including broad color tunability,pure color emission with remarkably narrow bandwidths,high quantum yield,and solution *** recent advances have pushed the luminance efficiency of monochromic perovskite light-emitting diodes(PeLEDs)to their theoretical limits,their current fabrication using the spincoating process poses limitations for fabrication of full-color *** integrate PeLEDs into full-color display panels,it is crucial to pattern red–green–blue(RGB)perovskite pixels,while mitigating issues such as cross-contamination and reductions in luminous ***,we present state-of-the-art patterning technologies for the development of full-color ***,we highlight recent advances in the development of efficient ***,we discuss various patterning techniques of MPHs(i.e.,photolithography,inkjet printing,electron beam lithography and laserassisted lithography,electrohydrodynamic jet printing,thermal evaporation,and transfer printing)for fabrication of RGB pixelated *** patterning techniques can be classified into two distinct approaches:in situ crystallization patterning using perovskite precursors and patterning of colloidal perovskite *** review highlights advancements and limitations in patterning techniques for PeLEDs,paving the way for integrating PeLEDs into full-color panels.

关键词： Perovskite Light-emitting diode Full-color display High-resolution patterning Electroluminescence

Clinical and genetic analysis of Ser341Pro MYOC variant in a Korean family with primary open angle glaucoma

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International Journal of Ophthalmology(English edition) 2020年第11期13卷 1689-1696页

作者： Sangwoo Moon Namhee kim jiwoong Lee Department of Ophthalmology Pusan National University College of MedicineBusan 49241Republic of Korea Biomedical Research Institute Pusan National University HospitalBusan 49241Republic of Korea Department of Laboratory Medicine Dong A University College of MedicineBusan 49201Republic of Korea

AIM:To report the first discovery of Ser341Pro myocilin(MYOC)variant in Korea and analyze its clinical characteristics and genetic ***:Ten family members from three generations participated in this study and received the thorough ophthalmologic *** exome sequencing on a proband was performed to confirm the target mutations(MYOC c.1021T>C)in the family members,and the direct sequencing was *** was analyzed according to the American College of Medical Genetics and Genomics and the Association for Molecular Pathology(ACMG/AMP)***:A nucleotide change from thymine to cytosine at c.1021T>C was found in eight family *** members diagnosed with primary open angle glaucoma(POAG)were characterized by severe clinical presentations,high intraocular pressure,and poor response to medical treatment(100%of the patient required filtering surgery).On variant analysis by ACMG/AMP guidelines,Ser341Pro is not found in normal *** computational predictive programs support a deleterious effect of Ser341Pro variant(PoIyPhen 2,SIFT,Mutation Taster).Ser341Pro could be involved in moderate(PM)and supporting(PP)criteria(PM1,PM2,PP2,PP3).Combiningthe criteria,Ser341Pro has a combination of 2 moderate(PM1+PM2)and 2 supporting(PP2+PP3)criteria,which is interpreted to"likely pathogenic".CONCLUSION:The Ser341Pro variant is correlated with severe phenotype of *** are similar clinical aspects to previous studies:autosomal dominant inheritance,incomplete penetrance(62.50%and 66.67%),and proportion of patients requiring trabeculectomy(100%in both study).According to ACMG/AMP guidelines and the previous basic researches,the Ser341Pro variant had a"strong evidence of pathogenicity(PS3)"and then it could be interpreted to“pathogenic(PS3,PM1,PM2,PP2,PP3)”.Additionally,Ser341Pro variant can be reported as"c.1021T>C(***341Pro)",likely pathogenic,POAG,autosomal dominant”according to guideline.

关键词： Ser341Pro variant primary open angle glaucoma Korean

Flexible quantum dot light-emitting diodes for next-generation displays

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npj Flexible Electronics 2018年第1期2卷 76-89页

作者： Moon Kee Choi jiwoong Yang Taeghwan Hyeon Dae-Hyeong kim Center for Nanoparticle Research Institute for Basic Science(IBS)Seoul 08826Republic of Korea School of Chemical and Biological Engineering Institute of Chemical ProcessesSeoul National UniversitySeoul 08826Republic of Korea

In the future electronics,all device components will be connected wirelessly to displays that serve as information input and/or output *** is a growing demand of flexible and wearable displays,therefore,for information input/output of the nextgeneration consumer *** many kinds of light-emitting devices for these next-generation displays,quantum dot light-emitting diodes(QLEDs)exhibit unique advantages,such as wide color gamut,high color purity,high brightness with low turn-on voltage,and ultrathin form ***,we review the recent progress on flexible QLEDs for the next-generation ***,the recent technological advances in device structure engineering,quantum-dot synthesis,and high-resolution full-color patterning are ***,the various device applications based on cutting-edge quantum dot technologies are described,including flexible white QLEDs,wearable QLEDs,and flexible transparent ***,we showcase the integration of flexible QLEDs with wearable sensors,micro-controllers,and wireless communication units for the next-generation wearable electronics.

关键词： diodes quantum light

Enhancing BiVO_(4)photoanode performance by insertion of an epitaxial BiFeO_(3)ferroelectric layer

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Journal of Energy Chemistry 2024年第2期89卷 71-78,I0003页

作者： Haejin Jang Yejoon kim Hojoong Choi jiwoong Yang Yoonsung Jung Sungkyun Choi Donghyeon Lee Ho Won Jang Sanghan Lee School of Materials Science and Engineering Gwangju Institute of Science and TechnologyGwangju 61005Republic of Korea Department of Materials Science and Engineering Seoul National UniversitySeoul 08826Republic of Korea

BiVO_(4)(BVO)is a promising material as the photoanode for use in photoelectrochemical ***,the high charge recombination and slow charge transfer of the BVO have been obstacles to achieving satisfactory photoelectrochemical *** address this,various modifications have been attempted,including the use of ferroelectric *** materials can form a permanent polarization within the layer,enhancing the separation and transport of photo-excited electron-hole *** this study,we propose a novel approach by depositing an epitaxial BiFeO_(3)(BFO)thin film underneath the BVO thin film(BVO/BFO)to harness the ferroelectric property of *** self-polarization of the inserted BFO thin film simultaneously functions as a buffer layer to enhance charge transport and a hole-blocking layer to reduce charge *** a result,the BVO/BFO photoanodes showed more than 3.5 times higher photocurrent density(0.65 mA cm^(-2))at 1.23 V_(RHE)under the illumination compared to the bare BVO photoanodes(0.18 m A cm^(-2)),which is consistent with the increase of the applied bias photon-to-current conversion efficiencies(ABPE)and the result of electrochemical impedance spectroscopy(EIS)*** results can be attributed to the self-polarization exhibited by the inserted BFO thin film,which promoted the charge separation and transfer efficiency of the BVO photoanodes.

关键词： Photoelectrochemical Photoanode BiVO_(4) Ferroelectric materials BiFeO_(3)