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2008 9th International Conference on Solid-State and Integrated-Circuit Technology

作者： Hing Wah Lee Muhamad Ramdzan Buyong Mohd. Ismahadi Syono ishak hj. abd. azid Microsystems and MEMS MIMOS BERHADTechnology Park Malaysia57000 Kuala LumpurMalaysia

This paper presents the development of a diaphragm chamber actuated electrostatically utilizing CMOS-compatible silicon micromachining fabrication process. The process consists of six photolithography steps and five chemical vapor depositions. Etching of the sacrificial oxide layer for the diaphragm chamber is achieved using etch-release holes perforated on the diaphragm, similar to via holes used in IC-fabrication method. From the analysis, the best encapsulation has been successfully demonstrated by growing LPCVD silicon nitride of thickness 0.9μm. Accomplishing this feat enables electrostatically actuated diaphragm chamber to be developed and in particular, will spur advancement in the development of a CMOS-compatible electrostatically actuated diaphragm micropump.

关键词： [IEEE Keyword]Fluids Etching Fabrication Pumps Micropumps Encapsulation Silicon

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Magnetic,thermal stability and dynamic mechanical properties of beta isotactic polypropylene/natural rubber blends reinforced by NiZn ferrite nanoparticles

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Defence Technology（防务技术） 2019年第6期15卷 958-963页

作者： Lih-Jiun Yu Sahrim hj.Ahmad Ing Kong Mouad ATarawneh Shamsul Bahri Bin abd.Razak Elango Natarajan Chun Kit Ang Department of Mechanical Engineering Faculty of EngineeringTechnology and Built EnvironmentUCSI UniversityNo 1Jalan Menara GadingUCSI Heights(Taman Connaught)Cheras56000Kuala LumpurMalaysia School of Applied Physics Faculty of Science and TechnologyUniversity Kebangsaan Malaysia43600BangiSelangor Darul EhsanMalaysia School of Engineering and Mathematical Sciences La Trobe UniversityBundooraVIC3086Australia Department of Physics College of ScienceAl-Hussein Bin Talal UniversityP.O Box 20Ma'anJordan Department of Food Science and Technology University Malaysia TerengganuKuala NerusTerengganuMalaysia

The dispersion of magnetic nanoparticles in matrix is crucial to ensure optimum performance of the *** difficulty level of achieving good dispersion is further increase when a multi-phases of matrix is present.A pre-coating technique of magnetic nanoparticles with polypropylene using ball-mill prior to melt-blending process was employed to prepare a multi-phases thermoplastic natural rubber *** effect of filler loading(2 wt%-10 wt%) on morphology,structure,magnetic properties,thermal stability and dynamic mechanical properties of the composites were *** was found that the NiZn ferrite nanoparticles act as nucleating agent to form beta isostatic polypropylene thermoplastic *** composites’ magnetic properties are directly dependent on the filler *** dispersion of magnetic fillers in polymer matrix plays role in affecting the magnetic properties and thermal *** preference of filler to locate at amorphous phase has distorted the chain orientation of natural rubber and ***,the polymorphism and crystallinity of the matrix varied as the filler loading increased,affecting the dynamic mechanical *** was found that 8 wt% NiZn nanocomposite exhibits highest E’ and tanδ,indicating the dynamic mechanical properties of NiZn nanocomposite are affected by β-phase degree.

关键词： Magnetic Thermoplastic natural rubber Nanoparticles Composites

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