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Characteristics of Tantalum Surface Treated by 6-Triethoxysilylpropylamino-1,3,5-Triazine-2,4-Dithiol Using XPS

稀有金属材料与工程 2012年第S1期41卷 33-37页

作者： hirahara hidetoshi Aisawa Sumio Narita Eiichi Mori Katuhito Graduate School of Engineering Iwate UniversityMoriokaIwate 0208551Japan

The characteristic of material surfaces has a vital status in its application,for instance,surface properties of materials play a decisive role in adhesion technology between different materials.A method called molecule adhesion technology which can successfully adhere different materials such as polymers,rubbers,metals and exhibit strong adhesion strength without any adhesive *** this work,the rare metal of tantalum surface treated by corona and a molecular adhesive(6-triethoxysilylpropylamino1,3,5-triazine-2,4-dithiols,TES)has been investigated to clarify the reaction mechanism between tantalum and *** structures of surfaces treated by corona and TES were also *** contains two functional groups:one is alkoxysilyl group which can react with the OH group linked tantalum formed by the corona discharge treatment;the other is dithiol triazinyl group reacted with many other *** tantalum,corona treated and TES treated surfaces situation were analyzed by X-ray photoelectron spectroscopy(XPS).The result shows that the functional structure of OH groups was formed after corona discharge process and TES can be successfully reacted on the tantalum *** research can be as a preparation work to achieve the tantalum and other materials adhesion by using molecule adhesion technology in the MEMS and NEMS electronic device fields.

关键词： tantalum surface functional structure XPS adhesion

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