Characteristics of Tantalum Surface Treated by 6-Triethoxysilylpropylamino-1,3,5-Triazine-2,4-Dithiol Using XPS

作     者：Hirahara Hidetoshi Aisawa Sumio Narita Eiichi Mori Katuhito 

作者机构：Graduate School of EngineeringIwate UniversityMoriokaIwate 0208551Japan 

出 版 物：《稀有金属材料与工程》 (Rare Metal Materials and Engineering)

年 卷 期：2012年第41卷第S1期

页      面：33-37页

核心收录：

学科分类：080503[工学-材料加工工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：tantalum surface functional structure XPS adhesion 

摘      要：The characteristic of material surfaces has a vital status in its application,for instance,surface properties of materials play a decisive role in adhesion technology between different materials.A method called molecule adhesion technology which can successfully adhere different materials such as polymers,rubbers,metals and exhibit strong adhesion strength without any adhesive *** this work,the rare metal of tantalum surface treated by corona and a molecular adhesive(6-triethoxysilylpropylamino1,3,5-triazine-2,4-dithiols,TES)has been investigated to clarify the reaction mechanism between tantalum and *** structures of surfaces treated by corona and TES were also *** contains two functional groups:one is alkoxysilyl group which can react with the OH group linked tantalum formed by the corona discharge treatment;the other is dithiol triazinyl group reacted with many other *** tantalum,corona treated and TES treated surfaces situation were analyzed by X-ray photoelectron spectroscopy(XPS).The result shows that the functional structure of OH groups was formed after corona discharge process and TES can be successfully reacted on the tantalum *** research can be as a preparation work to achieve the tantalum and other materials adhesion by using molecule adhesion technology in the MEMS and NEMS electronic device fields.