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Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching

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Science China(Technological Sciences) 2024年第6期67卷 1923-1932页

作者： ZHAO Tao SHI Yan LU Kun XI Xiang WU XueZhong xiao dingbang College of Intelligence Science and Engineering National University of Defense TechnologyChangsha410073China

The quality factor(Q factor)is a crucial performance parameter for *** this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is *** method is based on femtosecond laser-assisted chemical ***,the optimal energy range of femtosecond laser modification is obtained through mechanism ***,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing *** results demonstrate why edge breakage in rounded corners is easy under different ***,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 *** addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer *** improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.

关键词： micro hemispherical resonator fused silica laser-assisted chemical etching quality factor

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昆虫级微型爬行机器人的研究综述

南京航空航天大学学报 2024年第3期56卷 387-406页

作者：曾潇丰尹灿辉刘青吴宇列肖定邦国防科技大学智能科学学院长沙410073

爬行作为动物的一种有节律的运动行为,众多学者对其潜在机理的研究已经持续了一百多年。随着计算机集成技术、材料科学、空气动力学、微纳制造与人工智能技术的不断进步,对仿生爬行机器人的研究正朝着微型化和智能化的方向发展。本文对... 详细信息

爬行作为动物的一种有节律的运动行为,众多学者对其潜在机理的研究已经持续了一百多年。随着计算机集成技术、材料科学、空气动力学、微纳制造与人工智能技术的不断进步,对仿生爬行机器人的研究正朝着微型化和智能化的方向发展。本文对昆虫级微型爬行机器人的前沿动态发展进行了综合评述,并结合当前发展态势给出了微型爬行机器人未来发展的建设性意见。首先介绍了微型爬行机器人的研究背景和基本概念,对微型爬行机器人的运动机理和稳定性判据进行了简单分析。然后分析了微型爬行机器人的驱动方式并比较了各种微型爬行机器人的性能。最后,从供能、制造和设计3方面对微型爬行机器人的关键技术进行了总结,探讨了微型爬行机器人研究面临的问题,并提出了微型爬行机器人未来的应用前景和发展方向。

关键词：微型爬行机器人步态动力学模型驱动器

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“工程制图”课程思政体系建设与实践探索

大学（思政教研） 2024年第8期 72-75页

作者：王朝光张湘肖定邦国防科技大学智能科学学院湖南长沙410073

课程思政是高等教育院校践行“三全育人”理念的重要方式和实践活动。工程制图基础是工科类大学生必修基础课,具有受众面广、介入时间早、基础性强、影响力大等特点,是学生开启工程学习,提升工程素养,树立工程观、价值观的重要载体,对... 详细信息

课程思政是高等教育院校践行“三全育人”理念的重要方式和实践活动。工程制图基础是工科类大学生必修基础课,具有受众面广、介入时间早、基础性强、影响力大等特点,是学生开启工程学习,提升工程素养,树立工程观、价值观的重要载体,对大学生的价值取向具有引领作用。文章以工程制图课程思政体系和教学方法为研究对象,在课程知识体系的基础上,进一步构建了“点—线—面—体”的课程思政体系,提供了教学各阶段的思政目标和思政案例,辨析了课程思政过程中的“时”与“机”,“度”与“量”以及课程思政特色等问题。文章基于大量教学实践,梳理了部分思政案例,总结了教学实践中的共性问题,具有显著工程学课程特色,可以为工程制图课程思政提供借鉴和参考,同时为其他工科课程的思政教学提供一定思路。

关键词：课程思政工程制图思政体系课程特色

Precision Balance Method for Cupped Wave Gyro Based on Cup-bottom Trimming

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Chinese Journal of Mechanical Engineering 2012年第1期25卷 63-70页

作者： TAO Yi XI Xiang xiao dingbang TAN Yingqi CUI Hongjuan WU Xuezhong College of Mecha tronics Engineering and Automation National University of Defense TechnologyChangsha 410073China Wuhan Ordnance N.C.O.Academy Wuhan 430075China Department of Mechatronics Engineering Zhuhai CollegeJilin UniversityZhuhai 519041China

The mechanical balance process is the key process to eliminate the quadrature error and improve the performance of the cupped wave gyro. The conventional mechanical balance method for cupped wave gyro based on cup-wall trimming requires high control accuracy of trimming quantity, which increases the production cost and decreases the fabrication efficiency in large extent. However, it is hard to reach the high balance accuracy with the natural frequency split of mHz grade by using the conventional method. In this paper, the lumped mass dynamic model of the cupped wave gyro is built by discretization method, and the effects of different position trimming on the natural frequency are analyzed. It is pointed out that trimming off a tiny quantity of material from cup-wall causes large variation of the natural frequency is the main reason for the low accuracy of the conventional mechanical balance method. Then, a precision balance method for cupped wave gyro based on cup-bottom trimming is presented and the entire procedures of this method are given. The static balance process and dynamic balance process of the precision balance method are simulated by the finite element software. The simulation result shows that the precision balance method based on cup-bottom trimming brings less additional natural frequency split in the static balance process, minimizes the natural frequency split to mHz grade and rectify the angle of mode offset to 0.1° grade in the dynamic balance process, furthermore, the method decreases the requirement for control accuracy of trimming quantity evidently. The research work provides references for structure optimization design and balance process plan of the cupped wave gyro.

关键词： cupped wave gyro precision balance trimming modal analysis natural frequency split

Removal of the rate table:MEMS gyrocompass with virtual maytagging

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Microsystems & Nanoengineering 2023年第6期9卷 175-184页

作者： Tongqiao Miao Qingsong Li Liangqian Chen Junjian Li xiaoping Hu Xuezhong Wu Wenqi Wu dingbang xiao College of Intelligence Science and Technology National University of Defense TechnologyChangsha 410073China

High-performance micro-electro-mechanical system(MEMS)gyrocompasses for north-finding systems have been very popular for *** this paper,a MEMS north-finding system(NFS)based on virtual maytagging(VM)is presented for the first *** stark contrast to previous schemes of MEMS-based NFSs(e.g.,carouseling,maytagging)and the abandoning rate table,we developed a honeycomb disk resonator gyroscope(HDRG)and two commercial accelerometers for azimuth *** of the physical rotation of the integrated turntable in traditional NFSs,the vibratory working modes of the HDRG are rotated periodically with electronic control to reduce the uncertainty in the *** systematically analyzing the principle of NFSs with VM,we designed tests to verify the practicability at the sensor level.A bias instability of 0.0078°/h can be obtained during one day with VM in an *** also implemented comparative north-finding experiments to further check our strategy at the system *** accuracy in the azimuth can reach 0.204°for 5 min at 28.2°latitude with VM and 0.172°with *** results show that without any mechanical turning parts,VM technology makes it possible to develop high-precision handheld MEMS NFSs.

关键词： NFS virtual system

Miniature optical force levitation system

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Chinese Optics Letters 2022年第1期20卷 180-185页

作者： Junji Pu Kai Zeng Yulie Wu dingbang xiao College of Intelligent Sciences Department of Intelligent Machinery and InstrumentsNational University of Defense TechnologyChangsha 410073China

Optical levitation technology is a new levitation technology for trapping micro/*** taking advantage of the mechanical effect of light,it has the characteristics of non-contact and high ***,the traditional optical levitation system is large in volume,complex in adjustment,and greatly affected by the external ***,a miniature optical levitation system based on a laser diode,miniature lenses,and a micro-electro-mechanical system(MEMS) particles cavity is ***,we analyze the output spot characteristics of the laser *** compared the characteristics of different kinds of laser diodes,the type,wavelength,and power of diodes in the levitation system are ***,the micro-particles cavity is fabricated based on the MEMS *** MEMS process is widely used in the manufacturing of micro-electronic devices because of its advantages of small size,high precision,and easy mass *** particle cavity processed in this way can not only ensure the advantage of small volume,but also possesses high processing *** volume of the entire package including the light source,focusing lenses,and MEMS cavity is just Φ10 mm×33 mm,which is the smallest optical levitation system reported,to the best of our *** the entire levitation system is designed and set up,one silica particle of 10 μm diameter is stably trapped in the atmospheric ***,the micro-displacement and vibration signal are detected by a four-quadrant photoelectric detector to evaluate the stiffness of the optical levitation system.

关键词： optical levitation system laser diode elliptical Gaussian beam quadrant photoelectric detector MEMS particles cavity

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

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Microsystems & Nanoengineering 2021年第5期7卷 129-139页

作者： Jiangkun Sun Sheng Yu Yongmeng Zhang Qingsong Li Xiang Xi Kun Lu Xuezhong Wu dingbang xiao National University of Defense Technology Changsha 410073China

Whole-angle gyroscopes have broad prospects for development with inherent advantages of excellent scale factor,wide bandwidth and measurement range,which are restrictions on rate *** studies on the whole-angle mode are based mostly on the linear model of Lynch,and the essential nonlinearity of capacitive displacement detection is always neglected,which has significant negative effects on the *** this paper,a novel realtime calibration method of capacitive displacement detection is proposed to eliminate these nonlinear *** novel method innovatively takes advantage of the relationship between the first and third harmonic components of detective signals for *** on this method,the real-time calibration of capacitive displacement detection is achieved and solves the problems of traditional methods,which are usually related to the vibration amplitude,environmental variations and other ***,this novel calibration method is embedded into a whole-angle control system to restore the linear capacitive response in real time and then combined with a microshell resonator for the first time to exploit the enormous potential of an ultrahigh Q factor and symmetric *** effectiveness is proven because the angle drift is reduced significantly to improve the scale-factor nonlinearity by 14 times to 0.79 ppm with 0.0673/h bias instability and a 0.0017s rate threshold,which is the best reported performance of the MEMS whole-angle gyroscope thus *** importantly,this novel calibration method can be applied for all kinds of resonators with the requirement of a linear capacitive response even under a large resonant amplitude.

关键词： structure nonlinearity displacement

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant(74.9 s)

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Microsystems & Nanoengineering 2018年第1期4卷 46-56页

作者： Qingsong Li dingbang xiao Xin Zhou Yi Xu Ming Zhuo Zhanqiang Hou Kaixuan He Yongmeng Zhang Xuezhong Wu College of Intelligence Science National University of Defense TechnologyChangsha 410073China Laboratory of Science and Technology on Integrated Logistics Support National University of Defense TechnologyChangsha 410073China State Key Laboratory of ASIC and System School of MicroelectronicsFudan UniversityShanghai 200433China East China Institute of Photo-Electron IC Bengbu 233042China

The disk resonator gyroscope is an attractive candidate for high-performance MEMS *** gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the *** the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high *** report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our *** improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade *** gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further *** expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.

关键词： resonator constant attractive

微半球振动陀螺的装配误差分析与精密微调机构设计

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机械工程学报 2020年第13期56卷 77-83页

作者：席翔肖定邦李微卢坤石岩袁超吴学忠国防科技大学智能科学学院长沙410073

分析了微半球振动陀螺的装配误差形成机理,对装配精度要求进行了计算。在微半球结构锚点直径为1 mm的情况下,要保证装配间隙均匀度小于10%,锚点面的高度偏差需要小于0.1μm。通过数值计算和有限元模型,分别研究了装配误差对电极驱动能... 详细信息

分析了微半球振动陀螺的装配误差形成机理,对装配精度要求进行了计算。在微半球结构锚点直径为1 mm的情况下,要保证装配间隙均匀度小于10%,锚点面的高度偏差需要小于0.1μm。通过数值计算和有限元模型,分别研究了装配误差对电极驱动能力、静态检测电容、静电刚度调节能力,以及1阶模态振型的影响。计算结果表明,电极间隙不均匀对检测、驱动和静电刚度修调能力的影响分别呈1、2、3次方关系,同时会引起微幅的结构偏摆。为提升电极装配间隙均匀性,设计了一种基于柔性缩小单元的微位移调节机构。该机构利用螺旋调节旋钮和柔性垫块,使石英玻璃基底产生2自由度微幅摆动,从而实现较高精度的装配。测试结果表明,微半球振动陀螺装配后平均电容误差约为30%~40%,但引入了较大的寄生电容,消除该影响后,电容平均误差为12%。

关键词：微半球振动陀螺装配误差精密微调位移缩小机构