0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

作     者：Jiangkun Sun Sheng Yu Yongmeng Zhang Qingsong Li Xiang Xi Kun Lu Xuezhong Wu Dingbang Xiao 

作者机构：National University of Defense TechnologyChangsha 410073China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2021年第7卷第5期

页      面：129-139页

核心收录：

学科分类：07[理学] 0701[理学-数学] 070101[理学-基础数学] 

基　　金：the National Natural Science Foundation of China under Grant 51935013,52075540,51905538 the National Key R&D Program of China under Grant 2018YFB2002304 The Hunan Science Foundation for Distinguished Young Scholars 2020JJ2033 is also acknowledged gratefully 

主　　题：structure nonlinearity displacement 

摘      要：Whole-angle gyroscopes have broad prospects for development with inherent advantages of excellent scale factor,wide bandwidth and measurement range,which are restrictions on rate *** studies on the whole-angle mode are based mostly on the linear model of Lynch,and the essential nonlinearity of capacitive displacement detection is always neglected,which has significant negative effects on the *** this paper,a novel realtime calibration method of capacitive displacement detection is proposed to eliminate these nonlinear *** novel method innovatively takes advantage of the relationship between the first and third harmonic components of detective signals for *** on this method,the real-time calibration of capacitive displacement detection is achieved and solves the problems of traditional methods,which are usually related to the vibration amplitude,environmental variations and other ***,this novel calibration method is embedded into a whole-angle control system to restore the linear capacitive response in real time and then combined with a microshell resonator for the first time to exploit the enormous potential of an ultrahigh Q factor and symmetric *** effectiveness is proven because the angle drift is reduced significantly to improve the scale-factor nonlinearity by 14 times to 0.79 ppm with 0.0673/h bias instability and a 0.0017s rate threshold,which is the best reported performance of the MEMS whole-angle gyroscope thus *** importantly,this novel calibration method can be applied for all kinds of resonators with the requirement of a linear capacitive response even under a large resonant amplitude.