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Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching

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Science China(Technological Sciences) 2024年第6期67卷 1923-1932页

作者： ZHAO Tao SHI Yan LU Kun XI Xiang WU XueZhong xiao dingbang College of Intelligence Science and Engineering National University of Defense TechnologyChangsha410073China

The quality factor(Q factor)is a crucial performance parameter for *** this paper,a novel release method for highquality micro fused silica shell resonators with teeth-like tines with good surface morphology is *** method is based on femtosecond laser-assisted chemical ***,the optimal energy range of femtosecond laser modification is obtained through mechanism ***,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing *** results demonstrate why edge breakage in rounded corners is easy under different ***,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 *** addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer *** improved Q factor helps suppress mechanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.

关键词： micro hemispherical resonator fused silica laser-assisted chemical etching quality factor

Precision Balance Method for Cupped Wave Gyro Based on Cup-bottom Trimming

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Chinese Journal of Mechanical Engineering 2012年第1期25卷 63-70页

作者： TAO Yi XI Xiang xiao dingbang TAN Yingqi CUI Hongjuan WU Xuezhong College of Mecha tronics Engineering and Automation National University of Defense TechnologyChangsha 410073China Wuhan Ordnance N.C.O.Academy Wuhan 430075China Department of Mechatronics Engineering Zhuhai CollegeJilin UniversityZhuhai 519041China

The mechanical balance process is the key process to eliminate the quadrature error and improve the performance of the cupped wave gyro. The conventional mechanical balance method for cupped wave gyro based on cup-wall trimming requires high control accuracy of trimming quantity, which increases the production cost and decreases the fabrication efficiency in large extent. However, it is hard to reach the high balance accuracy with the natural frequency split of mHz grade by using the conventional method. In this paper, the lumped mass dynamic model of the cupped wave gyro is built by discretization method, and the effects of different position trimming on the natural frequency are analyzed. It is pointed out that trimming off a tiny quantity of material from cup-wall causes large variation of the natural frequency is the main reason for the low accuracy of the conventional mechanical balance method. Then, a precision balance method for cupped wave gyro based on cup-bottom trimming is presented and the entire procedures of this method are given. The static balance process and dynamic balance process of the precision balance method are simulated by the finite element software. The simulation result shows that the precision balance method based on cup-bottom trimming brings less additional natural frequency split in the static balance process, minimizes the natural frequency split to mHz grade and rectify the angle of mode offset to 0.1° grade in the dynamic balance process, furthermore, the method decreases the requirement for control accuracy of trimming quantity evidently. The research work provides references for structure optimization design and balance process plan of the cupped wave gyro.

关键词： cupped wave gyro precision balance trimming modal analysis natural frequency split

Removal of the rate table:MEMS gyrocompass with virtual maytagging

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Microsystems & Nanoengineering 2023年第6期9卷 175-184页

作者： Tongqiao Miao Qingsong Li Liangqian Chen Junjian Li xiaoping Hu Xuezhong Wu Wenqi Wu dingbang xiao College of Intelligence Science and Technology National University of Defense TechnologyChangsha 410073China

High-performance micro-electro-mechanical system(MEMS)gyrocompasses for north-finding systems have been very popular for *** this paper,a MEMS north-finding system(NFS)based on virtual maytagging(VM)is presented for the first *** stark contrast to previous schemes of MEMS-based NFSs(e.g.,carouseling,maytagging)and the abandoning rate table,we developed a honeycomb disk resonator gyroscope(HDRG)and two commercial accelerometers for azimuth *** of the physical rotation of the integrated turntable in traditional NFSs,the vibratory working modes of the HDRG are rotated periodically with electronic control to reduce the uncertainty in the *** systematically analyzing the principle of NFSs with VM,we designed tests to verify the practicability at the sensor level.A bias instability of 0.0078°/h can be obtained during one day with VM in an *** also implemented comparative north-finding experiments to further check our strategy at the system *** accuracy in the azimuth can reach 0.204°for 5 min at 28.2°latitude with VM and 0.172°with *** results show that without any mechanical turning parts,VM technology makes it possible to develop high-precision handheld MEMS NFSs.

关键词： NFS virtual system

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

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Microsystems & Nanoengineering 2021年第5期7卷 129-139页

作者： Jiangkun Sun Sheng Yu Yongmeng Zhang Qingsong Li Xiang Xi Kun Lu Xuezhong Wu dingbang xiao National University of Defense Technology Changsha 410073China

Whole-angle gyroscopes have broad prospects for development with inherent advantages of excellent scale factor,wide bandwidth and measurement range,which are restrictions on rate *** studies on the whole-angle mode are based mostly on the linear model of Lynch,and the essential nonlinearity of capacitive displacement detection is always neglected,which has significant negative effects on the *** this paper,a novel realtime calibration method of capacitive displacement detection is proposed to eliminate these nonlinear *** novel method innovatively takes advantage of the relationship between the first and third harmonic components of detective signals for *** on this method,the real-time calibration of capacitive displacement detection is achieved and solves the problems of traditional methods,which are usually related to the vibration amplitude,environmental variations and other ***,this novel calibration method is embedded into a whole-angle control system to restore the linear capacitive response in real time and then combined with a microshell resonator for the first time to exploit the enormous potential of an ultrahigh Q factor and symmetric *** effectiveness is proven because the angle drift is reduced significantly to improve the scale-factor nonlinearity by 14 times to 0.79 ppm with 0.0673/h bias instability and a 0.0017s rate threshold,which is the best reported performance of the MEMS whole-angle gyroscope thus *** importantly,this novel calibration method can be applied for all kinds of resonators with the requirement of a linear capacitive response even under a large resonant amplitude.

关键词： structure nonlinearity displacement

0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant(74.9 s)

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Microsystems & Nanoengineering 2018年第1期4卷 46-56页

作者： Qingsong Li dingbang xiao Xin Zhou Yi Xu Ming Zhuo Zhanqiang Hou Kaixuan He Yongmeng Zhang Xuezhong Wu College of Intelligence Science National University of Defense TechnologyChangsha 410073China Laboratory of Science and Technology on Integrated Logistics Support National University of Defense TechnologyChangsha 410073China State Key Laboratory of ASIC and System School of MicroelectronicsFudan UniversityShanghai 200433China East China Institute of Photo-Electron IC Bengbu 233042China

The disk resonator gyroscope is an attractive candidate for high-performance MEMS *** gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the *** the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high *** report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our *** improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade *** gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further *** expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.

关键词： resonator constant attractive

Miniature optical force levitation system

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Chinese Optics Letters 2022年第1期20卷 180-185页

作者： Junji Pu Kai Zeng Yulie Wu dingbang xiao College of Intelligent Sciences Department of Intelligent Machinery and InstrumentsNational University of Defense TechnologyChangsha 410073China

Optical levitation technology is a new levitation technology for trapping micro/*** taking advantage of the mechanical effect of light,it has the characteristics of non-contact and high ***,the traditional optical levitation system is large in volume,complex in adjustment,and greatly affected by the external ***,a miniature optical levitation system based on a laser diode,miniature lenses,and a micro-electro-mechanical system(MEMS) particles cavity is ***,we analyze the output spot characteristics of the laser *** compared the characteristics of different kinds of laser diodes,the type,wavelength,and power of diodes in the levitation system are ***,the micro-particles cavity is fabricated based on the MEMS *** MEMS process is widely used in the manufacturing of micro-electronic devices because of its advantages of small size,high precision,and easy mass *** particle cavity processed in this way can not only ensure the advantage of small volume,but also possesses high processing *** volume of the entire package including the light source,focusing lenses,and MEMS cavity is just Φ10 mm×33 mm,which is the smallest optical levitation system reported,to the best of our *** the entire levitation system is designed and set up,one silica particle of 10 μm diameter is stably trapped in the atmospheric ***,the micro-displacement and vibration signal are detected by a four-quadrant photoelectric detector to evaluate the stiffness of the optical levitation system.

关键词： optical levitation system laser diode elliptical Gaussian beam quadrant photoelectric detector MEMS particles cavity

微半球振动陀螺的装配误差分析与精密微调机构设计

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机械工程学报 2020年第13期56卷 77-83页

作者：席翔肖定邦李微卢坤石岩袁超吴学忠国防科技大学智能科学学院长沙410073

分析了微半球振动陀螺的装配误差形成机理,对装配精度要求进行了计算。在微半球结构锚点直径为1 mm的情况下,要保证装配间隙均匀度小于10%,锚点面的高度偏差需要小于0.1μm。通过数值计算和有限元模型,分别研究了装配误差对电极驱动能... 详细信息

分析了微半球振动陀螺的装配误差形成机理,对装配精度要求进行了计算。在微半球结构锚点直径为1 mm的情况下,要保证装配间隙均匀度小于10%,锚点面的高度偏差需要小于0.1μm。通过数值计算和有限元模型,分别研究了装配误差对电极驱动能力、静态检测电容、静电刚度调节能力,以及1阶模态振型的影响。计算结果表明,电极间隙不均匀对检测、驱动和静电刚度修调能力的影响分别呈1、2、3次方关系,同时会引起微幅的结构偏摆。为提升电极装配间隙均匀性,设计了一种基于柔性缩小单元的微位移调节机构。该机构利用螺旋调节旋钮和柔性垫块,使石英玻璃基底产生2自由度微幅摆动,从而实现较高精度的装配。测试结果表明,微半球振动陀螺装配后平均电容误差约为30%~40%,但引入了较大的寄生电容,消除该影响后,电容平均误差为12%。

关键词：微半球振动陀螺装配误差精密微调位移缩小机构

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光悬浮微粒子旋转特性研究

中国科学：技术科学 2023年第8期53卷 1351-1359页

作者：曾凯蒲俊吉吴宇列肖定邦吴学忠国防科技大学智能科学学院长沙410073

悬浮光机械系统将微粒子悬浮在空中,较好地隔绝了环境噪声,在诸多精密测量及量子科学领域都发挥着重要作用.利用圆偏振激光驱动微粒子自旋,可以进行扭矩测量、气体辨识及真空摩擦等方面的研究.本文基于光悬浮微粒子旋转动力学模型,搭建... 详细信息

悬浮光机械系统将微粒子悬浮在空中,较好地隔绝了环境噪声,在诸多精密测量及量子科学领域都发挥着重要作用.利用圆偏振激光驱动微粒子自旋,可以进行扭矩测量、气体辨识及真空摩擦等方面的研究.本文基于光悬浮微粒子旋转动力学模型,搭建了真空光悬浮及旋转实验装置,对悬浮粒子的平均转速和转速波动进行了研究.结果表明,影响光力矩的激光功率越强,激光偏振态越接近圆偏振光,粒子的平均转速则越大.但影响粒子平均转速的主要因素是阻尼力矩,通过降低环境气压以减小粒子的旋转阻尼,其平均转速可大幅提升.通过调控这些实验参数,约4μm直径的球霰石微球在环境气压为0.1 Pa时被驱动至3.93 MHz转速.但在低气压环境下,微粒子的热运动也变得明显,从而导致悬浮粒子的等效激光功率随着热运动而变化,进而使得粒子的转速波动也随着气压的下降而增大.本文首创性地对比了相同气压不同转速下的转速波动,进一步说明了粒子热运动对转速波动的影响规律.此外,本文还研究了不同气压下转速相对波动的变化规律,这为光悬浮转子在陀螺仪领域的潜在应用奠定了基础.这些研究结果对于提升光悬浮系统已有应用以及开拓新领域均有重要意义.

关键词：悬浮光机械系统光致旋转超快旋转转速稳定性

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一种微半球谐振陀螺的制造方法与测试

中国惯性技术学报 2020年第5期28卷 561-567页

作者：卢坤肖定邦孙江坤石岩席翔吴学忠国防科技大学智能科学学院长沙410073

针对无人装备对惯性器件微小型化的需求,设计了一种新型的速率积分型微半球谐振陀螺。该陀螺设计有均匀分布的灵敏度放大单元,可提升驱动与检测效率。谐振结构采用高温旋转吹制技术加工,整体结构为面外电极形式,并采用圆片级微组装工艺... 详细信息

针对无人装备对惯性器件微小型化的需求,设计了一种新型的速率积分型微半球谐振陀螺。该陀螺设计有均匀分布的灵敏度放大单元,可提升驱动与检测效率。谐振结构采用高温旋转吹制技术加工,整体结构为面外电极形式,并采用圆片级微组装工艺装配。针对微半球谐振陀螺存在的初始频率裂解,提出了一种精密机械修调方法,可实现0.1 Hz内精度频率匹配修调。在此基础上,基于速率积分控制原理设计制造了陀螺的数字化测控电路。真空封装后陀螺工作频率约为6602 Hz,频率裂解为49 mHz,品质因数高于90万,衰减时间常数可达40 s。首次系统性测试了速率积分模式微半球谐振陀螺的综合性能,测试结果表明,陀螺零偏不稳定性(Allan方差)为0.235°/h,角度随机游走为0.0066°/h1/2,量程可高达±3000°/s,标度因数非线性优于8 ppm,标度因数对称性优于5 ppm,标度因数重复性优于1 ppm。

关键词：微半球谐振陀螺速率积分模式熔融石英飞秒激光修调品质因数