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Laser trimming of the operating wavelength of silicon nitride racetrack resonators

Photonics Research 2020年第5期8卷 677-683页

作者： GRETA DE PAOLI SENTA L.JANTZEN THALIA DOMINGUEZ BUCIO ILIAS SKANDALOS christopher holmes PETER G.R.SMITH MILAN M.MILOSEVIC FREDERIC Y.GARDES Department of Information Engineering Universitàdegli Studi di PadovaVia Giovanni Gradenigo 635131 PadovaItaly Optoelectronics Research Centre University of SouthamptonSouthampton S0171BJUK

We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet *** results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral *** process is much faster than similar,previously presented methods(in the order of seconds,compared to hours).This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.

关键词： trimming track faster

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