Laser trimming of the operating wavelength of silicon nitride racetrack resonators

作     者：GRETA DE PAOLI SENTA L.JANTZEN THALIA DOMINGUEZ BUCIO ILIAS SKANDALOS CHRISTOPHER HOLMES PETER G.R.SMITH MILAN M.MILOSEVIC FREDERIC Y.GARDES 

作者机构：Department of Information EngineeringUniversitàdegli Studi di PadovaVia Giovanni Gradenigo 635131 PadovaItaly Optoelectronics Research CentreUniversity of SouthamptonSouthampton S0171BJUK 

出 版 物：《Photonics Research》 (光子学研究（英文版）)

年 卷 期：2020年第8卷第5期

页      面：677-683页

核心收录：

学科分类：080904[工学-电磁场与微波技术] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：Engineering and Physical Sciences Research Council(EP/L00044X/1,EP/L021129/1,EP/M024539/1,EP/N03247/1,EP/R003076/1) European Commission 

主　　题：trimming track faster 

摘      要：We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet *** results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral *** process is much faster than similar,previously presented methods(in the order of seconds,compared to hours).This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.