Based on the technology of DC magnetron sputtering,the Vacuum Technology Group at IMP have developed a large-scale multi-target magnetron sputtering coating *** shown in Fig.1,it is mainly composed of four parts,i,e,t...
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Based on the technology of DC magnetron sputtering,the Vacuum Technology Group at IMP have developed a large-scale multi-target magnetron sputtering coating *** shown in Fig.1,it is mainly composed of four parts,i,e,the coating chamber,the evacuation system,the cooling system and the control *** coating chamber is installed with compound vacuum gauge and temperature sensor,which can accurately measure the pressure and temperature.
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