Research Progress on Planar DC Magnetron Sputtering Non-evaporable Getter (NEG) Films

作     者：Wei Ningfei Meng Jun Luo Cheng Yang Weishun Xie Wenjun Jiao Jiqiang Ma Xiangli 魏宁斐

作者机构：不详 

出 版 物：《IMP & HIRFL Annual Report》 (中国科学院近代物理研究所和兰州重离子研究装置年报（英文版）)

年 卷 期：2022年第1期

页      面：298-298页

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：coating temperature. system 

摘      要：Based on the technology of DC magnetron sputtering,the Vacuum Technology Group at IMP have developed a large-scale multi-target magnetron sputtering coating *** shown in Fig.1,it is mainly composed of four parts,i,e,the coating chamber,the evacuation system,the cooling system and the control *** coating chamber is installed with compound vacuum gauge and temperature sensor,which can accurately measure the pressure and temperature.