Coating nano-Co3O4 film on the polydimethyl-siloxane(PDMS) substrate by PEMOCVD method
作者单位：Key Laboratory of Advanced Textile Materials and Manufacturing Technology and Engineering Research Center for Eco-Dyeing & Finishing of TextilesMinistry of EducationZhejiang Sci-Tech University School of Environmental Science and EngineeringDongHua University
会议名称：《第十六届全国等离子体科学技术会议暨第一届全国等离子体医学研讨会》
会议日期：2013年
学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学]
关 键 词：PEMOCVD Co3O4 catalyst Crystal structure Ultra-small nano-particle
摘 要：In this paper,tricobalt tetraoxide(CoO) film built with utra-small particles were deposited on the polydimethyl-siloxane(PDMS) surface by the plasma-enhanced metal-organic chemical vapor deposition technique(PEMOCVD).The crystal structure of CoO was achieved by post-treatment with argon(Ar) and oxygen(O) plasmas at room *** emission scanning electron microscopy(FESEM),transmission electron microscropy(TEM),X-ray diffraction(XRD) and X-ray photoelectron spectrometer(XPS) were used to investigate the structure characteristics of CoO *** results revealed that the interlayer of TiO inhibited effectively the migrations of atoms,especially silicon, from PDMS to the CoO *** the surface modification,the cobalt content in the catalyst film increased from 18.6%to 27%.Moreover,catkin-liked profiles were formed on the CoO surface,and they can increase the specific surface area of CoO catalyst. The average diameter of crystallized CoO particles was about 5 nm,and predominantly exposed their(311) and(220) ***,these structure characteristics of fabricated CoO may be very useful for the CO and hydrocarbon catalytic oxidation.