Cyclic Scheduling of Cluster Tools with Equipment Front-End Module and Multifunctional Load Locks
作者单位：Department of AutomationTsinghua University
会议名称：《第26届中国控制与决策会议》
会议日期：2014年
学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学]
基 金：supported in part by the No.2 Important National Science and Technology Specific Projects of China(No.2011ZX02504) in part by the National Key Technologies Research and Development Program of China(No.2011AA060203)
关 键 词：Cluster Tools Cyclic Scheduling Petri Net Mixed Integer Programming
摘 要：This paper proposes a cyclic scheduling method for cluster tools in semiconductor manufacturing with equipment front-end module and multifunctional load locks. In this special configured cluster tools, the equipment front-end module consists of an aligner, a signal-arm robot, and two load locks integrated with coolers. Hence, the two load locks both have multifunction of filling, pumping, and cooling wafers. The multifunctional load locks may become scheduling bottleneck for a certain specified recipe. To solve this problem, the Petri net models of the above configured cluster tool is developed first. Then, based on the Petri net models and state equations, a mixed integer programming model is presented, which can efficiently determine the optimal scheduling sequence in steady state. Through experiments, the effectiveness of the cyclic scheduling method proposed in this paper is verified.