Principals of Operation and the Practical Use of Quadrupole Mass Spectrometers in Vacuum Processes and Applications.
作者单位：AMETEK-Process and Analytical Instruments Division
会议名称：《中国真空学会质谱与检漏专委会第十二届年会、中国计量测试学会真空校准专委会第七届年会》
会议日期：2004年
学科分类：08[工学] 0804[工学-仪器科学与技术]
关 键 词：Principals of Operation and the Practical Use of Quadrupole Mass Spectrometers in Vacuum Processes and Applications
摘 要：The Quadrupole Mass Spectrometer is an important tool to be used for Residual Gas Analysis(RGA) of vacuum systems and process. An overview of the technology and principals of operation of the analyzer will be presented from ionization through detection of the sample gases. Its capability of identifying the and quantifying both background and process gases in a vacuum chamber will be discussed,as well as identifying and locating an air leaks in the system. On-line process control in various applications will also be addressed.