Solution-Based Deposition of Single-Walled Carbon Nanotube Thin Films for High Performance Thin-Film Transistors
作者单位：燕山大学
学位级别：硕士
导师姓名：赵元春
授予年度：2020年
学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学]
摘 要：Owing to their outstanding chemical,mechanical and electrical properties,single walled carbon nanotubes（SWNT）are promising and favorable contender for a diverse range of applications including high strength hybrid nano-composites,growth platforms for neuronal circuits,highly chemical/biological sensors,electrode material for solar cells and channel of active elements in electronic *** and thin film transistors（TFTs）have been a potential candidate for the future electrical and photonic applications,including integrated circuits,control circuits,liquid crystal display and flexible and transparent *** research field has attracted much attention and intensive *** uniformity,density and morphology of the deposited SWNT thin films has remarkable impact on the device *** is significant to improve the performance and uniformity of the fabricated thin film field effect transistors（FETs）for the upcoming integration of logic *** this dissertation,we presented an understanding on fabrication of large-scale and high-performance thin film FET arrays with notably improved *** addition,the electrical transport characteristics of the SWNT field effect transistor arrays have been ***-based deposition method has been used to deposit high-quality semiconducting SWNT thin films on the Si/Si O
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