Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization

作     者：Daria D.Bezshlyakh Hendrik Spende Thomas Weimann Peter Hinze Steffen Bornemann Jan Gulink Joan Canals Joan Daniel Prades Angel Dieguez Andreas Waag Daria D. Bezshlyakh;Hendrik Spende;Thomas Weimann;Peter Hinze;Steffen Bornemann;Jan Gülink;Joan Canals;Joan Daniel Prades;Angel Dieguez;Andreas Waag

作者机构：Institute of Semiconductor TechnologyTechnische Universitat BraunschweigHans-Sommer Str.6638106 BraunschweigGermany Laboratory for Emerging NanometrologyLanger Kamp 6 a/b38106 BraunschweigGermany Epitaxy Competence Center ec2Technische Universitat BraunschweigHans-Sommer Str.6638106 BraunschweigGermany Nanostructuring and Clean Room Center InfrastructurePhysikalisch-Technische BundesanstaltBundesallee 10038116 BraunschweigGermany Department of Electronic and Biomedical EngineeringUniversity of BarcelonaCarrer Marti i Franques 108028 BarcelonaSpain 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2020年第6卷第1期

页      面：275-284页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：This work was funded by the European Union’s Horizon 2020 research and innovation program within the project of ChipScope under grant agreement no.737089 by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy-EXC-2123 QuantumFrontiers-390837967 

主　　题：arrays GaN optical 

摘      要：The rapid development of display technologies has raised interest in arrays of self-emitting,individually controlled light sources atthe *** nitride(GaN)micro-light-emitting diode(LED)technology meets this ***,the current technology is not suitable for the fabrication of arrays of submicron light sources that can be controlled *** approach is based on nanoLED arrays that can directly address each array element and a self-pitch with dimensions below the wavelength of *** design and fabrication processes are explained in detail and possess two geometries:a 6×6 array with 400 nm LEDs and a 2×32 line array with 200 nm *** nanoLEDs are developed as core elements of a novel on-chip super-resolution *** technology,based on its physical properties,is an ideal platform for such nanoLEDs.