Modeling and experiments of a nano-positioning and high frequency scanning piezoelectric platform based on function module actuator

作     者：DENG Jie LIU YingXiang ZHANG ShiJing LIU JunKao DENG Jie;LIU YingXiang;ZHANG ShiJing;LIU JunKao

作者机构：School of Mechatronics and EngineeringHarbin Institute of TechnologyHarbin 150001China 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2020年第63卷第12期

页      面：2541-2552页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0810[工学-信息与通信工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 070205[理学-凝聚态物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：This work was supported by the National Natural Science Foundation of China(Grant Nos.U1913215&51975162) 

主　　题：piezoelectric actuator function modules nano-positioning platform large working range high frequency scanning 

摘      要：A piezoelectric platform using function module actuator is presented to achieve nano-positioning and high frequency scanning in large working range. A function module actuator is designed to produce a pair of orthogonal bending deformations and a longitudinal deformation through partition exciting. The bending deformations are used to actuate the planar motion,while the longitudinal deformation is utilized to dynamically adjust the driving force and broaden the scanning frequency. The dynamic model of the platform system is developed. The open-loop performances of a prototype are first tested: a scan frequency of 308 Hz in a scanning range of 3.368 μm×3.396 μm is measured in direct actuation mode,and the displacement resolution is measured to be 16 nm;maximum speed is measured to be 3.38 mm s^-1 in the inertial actuation mode. Furthermore,the closedloop experiments are carried out and a switching strategy is proposed to obtain the switching of the inertial and direct actuation modes automatically;the platform achieves the scanning with frequency of 300 Hz at the set position.