Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging

作     者：Jiaqi Wang Zhou Zheng Jasmine Chan John T.W.Yeow Jiaqi Wang;Zhou Zheng;Jasmine Chan;John T.W.Yeow

作者机构：Department of Systems Design EngineeringFaculty of EngineeringUniversity of WaterlooWaterlooON N2L 3G1Canada 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2020年第6卷第1期

页      面：565-577页

核心收录：

学科分类：0831[工学-生物医学工程（可授工学、理学、医学学位）] 1004[医学-公共卫生与预防医学(可授医学、理学学位)] 08[工学] 10[医学] 

基　　金：This work was supported by the natural sciences and engineering research council of Canada(NSERC) 

主　　题：piezoelectric transducers thereby 

摘      要：Intravascular ultrasound(IVUS)is a burgeoning imaging technology that provides vital information for the diagnosis of coronary arterial diseases.A significant constituent that enables the IVUS system to attain high-resolution images is the ultrasound transducer,which acts as both a transmitter that sends acoustic waves and a detector that receives the returning *** the most mature form of ultrasound transducer available in the market,piezoelectric transducers have dominated the field of biomedical ***,there are some drawbacks associated with using the traditional piezoelectric ultrasound transducers such as difficulties in the fabrication of high-density arrays,which would aid in the acceleration of the imaging speed and alleviate motion *** advent of microelectromechanical system(MEMS)technology has brought about the development of micromachined ultrasound transducers that would help to address this *** from the advantage of being able to be fabricated into arrays with lesser complications,the image quality of IVUS can be further enhanced with the easy integration of micromachined ultrasound transducers with complementary metal-oxide-semiconductor(CMOS).This would aid in the mitigation of parasitic capacitance,thereby improving the ***,there are two commonly investigated micromachined ultrasound transducers,piezoelectric micromachined ultrasound transducers(PMUTs)and capacitive micromachined ultrasound transducers(CMUTs).Currently,PMUTs face a significant challenge where the fabricated PMUTs do not function as per their ***,CMUTs with different array configurations have been developed for *** this paper,the different ultrasound transducers,including conventional-piezoelectric transducers,PMUTs and CMUTs,are reviewed,and a summary of the recent progress of CMUTs for IVUS is presented.