Fabrication of Micro -Optical Devices by a Femtosecond Laser

作     者：Kazuyuki Hirao 

作者机构：Graduate School of Engineering Kyoto University Japan 

出 版 物：《光学学报》 (Acta Optica Sinica)

年 卷 期：2003年第23卷第S1期

页      面：825-826页

核心收录：

学科分类：070207[理学-光学] 07[理学] 08[工学] 0803[工学-光学工程] 0702[理学-物理学] 

主　　题：by on in as of Optical Devices by a Femtosecond Laser Fabrication of Micro 

摘      要：Femtosecond laser is a perfect laser source for materials processing when high accuracy and small structure size are required. Due to the ultra short interaction time and the high peak power, the process is generally characterized by the absence of heat diffusion and, consequently molten layers. Various induced structures have been observed in materials after the femtosecond laser irradiation. Here, we report on fabrication of micro-optical devices by the femtosecond laser. 1) formation of optical waveg...