Surface Modification of Ceramic Materials Using Excimer Laser

作     者：Yingna WU, Zhongchao FENG and Jing LIANG (Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110015, China) 

作者机构：Institute of Metal Research Chinese Academy of Sciences Shenyang 110015 China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2000年第16卷第4期

页      面：401-404页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：国家自然科学基金 

主　　题：Surface Modification of Ceramic Materials Using Excimer Laser SiC 

摘      要：Changes of surface morphology following XeCI excimer laser irradiation were investigated for three engineering ceramic materials (Al2O3, Al2O3-SiC nanocomposite and Si3N4). Al2O3 and AI2O3-SiC nanocomposite samples exhibit a smooth rapid melt layer on the surface, and the formation of the metastabfe γ-Al2Oa was observed. A silicon-rich layer on the surface was formed after laser irradiation of Si3N4. The toughness K1c of the materials was measured by the indentation fracture method. After laser irradiation, the toughness of Al2O3, Al2O3-SiC nanocomposite and Si3N4 was improved to various degrees: Al2O3-SiC nanocomposite, 60% (max.); AI203, 40% (max.); Si3N4, 12% (max.).