Effect of Vacuum on the Laser-Induced Damage of Anti-Reflection Coatings

作     者：凌秀兰 赵元安 李大伟 周明 邵建达 范正修 

作者机构：Key Laboratory of Material Science and Technology for High Power Lasers Shanghai Institute of Optics and Fine Mechanics Shanghai 201800 Graduate School of Chinese Academy of Sciences Beijing 100049 Department of Information Engineering North University of China Taiyuan 030051 

出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)

年 卷 期：2009年第26卷第7期

页      面：126-129页

核心收录：

学科分类：0832[工学-食品科学与工程（可授工学、农学学位）] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 083203[工学-农产品加工及贮藏工程] 

基　　金：Supported by the National Natural Science Foundation of China under Grant No 60708004 

主　　题：Optics quantum optics and lasers Condensed matter: structural mechanical & thermal 

摘      要：In the comparison of damage modifications, absorption measurement and energy dispersive x-ray analysis, the effect of vacuum on the laser-induced damage of anti-reflection coatings is analyzed. It is found that vacuum decreases the laser-induced damage threshold of the films. The low laser-induced damage threshold in vacuum environments as opposed to air environments is attributed to water absorption and the formation of the O/Si, O/Zr sub-stoichiometry in the course of laser irradiation.