Kirigami-inspired multiscale patterning of metallic structures via predefined nanotrench templates

作     者：Mengjie Zheng Yiqin Chen Zhi Liu Yuan Liu Yasi Wang Peng Liu Qing Liu Kaixi Bi Zhiwen Shu Yihui Zhang Huigao Duan 

作者机构：School of Physics and ElectronicsState Key laboratory of Advanced Design and Manufacturing for Vehicle BodyHunan University410082 ChangshaPeople’s Republic of China College of Mechanical and Vehicle EngineeringHunan University410082 ChangshaPeople’s Republic of China AMLDepartment of Engineering MechanicsAMLDepartment of Engineering Mechanics 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2019年第5卷第1期

页      面：59-69页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 0817[工学-化学工程与技术] 08[工学] 0807[工学-动力工程及工程热物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0802[工学-机械工程] 0811[工学-控制科学与工程] 0702[理学-物理学] 

基　　金：financial support from the National Natural Science Foundation of China(Grant nos.11574078 and 51722503) 

主　　题：structures film template 

摘      要：Reliable fabrication of multiscale metallic patterns with precise geometry and size at both the nanoscale and macroscale is of importance for various applications in electronic and optical *** existing fabrication processes,which usually involve film deposition in combination with electron-beam patterning,are either timeconsuming or offer limited *** by the kirigami,an ancient handicraft art of paper cutting,this work demonstrates an electron-beam patterning process for multiscale metallic structures with significantly enhanced efficiency and *** to the kirigami,in which the final pattern is defined by cutting its contour in a paper and then removing the unwanted parts,we define the target multiscale structures by first creating nanotrench contours in a metallic film via an electron-beam-based process and then selectively peeling the separated film outside the *** with the conventional approach,which requires the exposure of the whole pattern,much less exposure area is needed for nanotrench contours,thus enabling reduced exposure time and enhanced geometric precision due to the mitigated proximity effect.A theoretical model based on interface mechanics allows a clear understanding of the nanotrench-assisted selective debonding behaviour in the peeling *** using this fabrication process,multiscale metallic structures with sub-10-nm up to submillimetre features can be reliably achieved,having potential applications for anti-counterfeiting and gap-plasmon-enhanced spectroscopy.