Preparation of ZrC-SiC composite coatings by chemical vapor deposition and study of co-deposition mechanism

作     者：Qiaomu Liu Jia Liu Xingang Luan 

作者机构：AECC Sichuan Gas Turbine EstablishmentChengdu 610500China College of Materials Science and EngineeringXi'an University of Science and TechnologyXi'an710054China Science and Technology on Thermostructural Composite Materials LaboratoryNorthwestern Polytechnical UniversityXi'an 710072China 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2019年第35卷第12期

页      面：2942-2949页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

主　　题：Chemical vapor deposition(CVD) Zirconium carbide Silicon carbide Composite coatings Co-deposition mechanism 

摘      要：In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition(CVD)using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were characterized by scanning electron microscopy(SEM), energy dispersive X-ray spectroscopy(EDS) and X-ray diffraction(XRD). The results indicated that the morphologies, compositions and phases of the composite coatings were related to the deposition temperature, the flow rate of the carrier H2 gas, and the ratio of C/Zr. Moreover, the co-deposition mechanism of the composite coatings was also studied. It was found that different deposition temperatures resulted in different deposition mechanisms. At temperatures in the range of 1150–1250℃, the Zr C-SiC co-deposition was controlled by the surface kinetic process. At temperatures in the range of 1250–1400℃, the Zr C-SiC co-deposition was controlled by the mass transport process.