High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

作     者：Jun XU Xin LI Jin-hua DUAN Hai-bo XU 

作者机构：College of AutomationHarbin University of Science and Technology Computer CenterHarbin University of Science and Technology 

出 版 物：《Journal of Zhejiang University-Science C(Computers and Electronics)》 (浙江大学学报C辑（计算机与电子（英文版）)

年 卷 期：2013年第14卷第4期

页      面：264-273页

核心收录：

学科分类：0810[工学-信息与通信工程] 08[工学] 080202[工学-机械电子工程] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：Project (No. 11551074) supported by the Science Research Fund of Heilongjiang Provincial Education Department China 

主　　题：温度传感器 石英音叉 高精度 低功耗 优化 激励 共振 振动模式 

摘      要：This paper presents the design,fabrication,and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode.Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature.Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor.The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 ℃ with the thermo-sensitivity of 70×10-6/℃.Experimental results show that the sensor has high thermo-sensitivity,good stability,and good reproducibility.This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.